Coated cutting tool
The present invention discloses a coated cutting tool having a hard coating film on a surface of the tool. The hard coating film is a nitride, the content ratio of titanium (Ti) with respect to a total amount of metal elements (including semimetal elements) is in a range of 70 at % to 95 at %, the content ratio of silicon (Si) with respect to the total amount of metal elements (including semimetal elements) is in a range of 5 at % to 30 at %, and the content ratio of argon (Ar) with respect to the total amount of metal elements (including semimetal elements) and non-metal elements is 0.1 at % or less. The hard coating film has a NaCl type crystal structure and has an average crystal grain size in a range of 5 nm to 30 nm.
1. A coated cutting tool having a hard coating film on a surface of a cutting tool, wherein:
the hard coating film is a nitride, a content ratio of titanium (Ti) with respect to a total amount of metal elements (including semimetal elements) is in a range of 70 at % to 95 at %, a content ratio of silicon (Si) with respect to the total amount of metal elements (including semimetal elements) is in a range of 5 at % to 30 at %, and, with respect to the total amount of metal elements (including semimetal elements) and non-metal elements, the hard coating film contains argon (Ar) at 0.05 at % or more and 0.1 at % or less;
the hard coating film has a NaCl type crystal structure, a face (200) exhibits the maximum intensity, and the hard coating film has an average crystal grain size in a range of 5 nm to 30 nm; and
with respect to a composition at every 20 nm-depth of the hard coating film from a depth of 20 nm to 200 nm, a content ratio of nitrogen is 50.0 at % or higher in a case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
2. The coated cutting tool according to claim 1 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, a content ratio of oxygen is 3 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
3. The coated cutting tool according to claim 1 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, a content ratio of carbon is 5 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
4. The coated cutting tool according to claim 1 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, the total content ratio of oxygen and carbon is 3 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
5. The coated cutting tool according to claim 1 , wherein, in a case in which a structure of the hard coating film is observed with a transmission electron microscope (TEM), the number of amorphous phases whose circle-equivalent diameter is 5 nm or greater present in the hard coating film is one or less within a range of 50 nm×50 nm.
6. The coated cutting tool according to claim 1 , wherein a nanoindentation hardness of the hard coating film is in a range of 40 GPa to 60 GPa, and an elastic coefficient of the hard coating film is in a range of 400 GPa to 500 GPa.
7. The coated cutting tool according to claim 1 , having an intermediate coating film disposed between the cutting tool and the hard coating film.
8. The coated cutting tool according to claim 1 , wherein, in surface and cross-section observations of the hard coating film, a droplet whose circle-equivalent diameter is 1.5 μm or greater is not present, and the number of droplets whose circle-equivalent diameter is 1.0 μm or greater is five or less per 100 μm 2 .
9. The coated cutting tool according to claim 2 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, a content ratio of carbon is 5 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
10. The coated cutting tool according to claim 2 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, the total content ratio of oxygen and carbon is 3 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
11. The coated cutting tool according to claim 3 , wherein, with respect to the composition at every 20 nm-depth of the hard coating film from the depth of 20 nm to 200 nm, the total content ratio of oxygen and carbon is 3 at % or less in the case in which the total content ratio of metal elements (including semimetal elements), nitrogen, oxygen, and carbon is 100 at %.
12. The coated cutting tool according to claim 2 , wherein, in a case in which a structure of the hard coating film is observed with a transmission electron microscope (TEM), the number of amorphous phases whose circle-equivalent diameter is 5 nm or greater present in the hard coating film is one or less within a range of 50 nm×50 nm.
13. The coated cutting tool according to claim 3 , wherein, in a case in which a structure of the hard coating film is observed with a transmission electron microscope (TEM), the number of amorphous phases whose circle-equivalent diameter is 5 nm or greater present in the hard coating film is one or less within a range of 50 nm×50 nm.
14. The coated cutting tool according to claim 4 , wherein, in a case in which a structure of the hard coating film is observed with a transmission electron microscope (TEM), the number of amorphous phases whose circle-equivalent diameter is 5 nm or greater present in the hard coating film is one or less within a range of 50 nm×50 nm.
15. The coated cutting tool according to claim 2 , wherein a nanoindentation hardness of the hard coating film is in a range of 40 GPa to 60 GPa, and an elastic coefficient of the hard coating film is in a range of 400 GPa to 500 GPa.
16. The coated cutting tool according to claim 3 , wherein a nanoindentation hardness of the hard coating film is in a range of 40 GPa to 60 GPa, and an elastic coefficient of the hard coating film is in a range of 400 GPa to 500 GPa.
17. The coated cutting tool according to claim 2 , having an intermediate coating film disposed between the tool and the hard coating film.
18. The coated cutting tool according to claim 3 , having an intermediate coating film disposed between the tool and the hard coating film.
19. The coated cutting tool according to claim 2 , wherein, in surface and cross-section observations of the hard coating film, a droplet whose circle-equivalent diameter is 1.5 μm or greater is not present, and the number of droplets whose circle-equivalent diameter is 1.0 μm or greater is five or less per 100 μm 2 .
20. The coated cutting tool according to claim 3 , wherein, in surface and cross-section observations of the hard coating film, a droplet whose circle-equivalent diameter is 1.5 μm or greater is not present, and the number of droplets whose circle-equivalent diameter is 1.0 μm or greater is five or less per 100 μm 2 .