Thin film sensor element for a resistance thermometer
The present disclosure relates to a thin film sensor element for determining and/or monitoring temperature. For this purpose, a resistive structure is provided, which is arranged in a resistive region on a substrate. The resistive structure is so formed that a first section of the resistive structure branches at a first reference point into two branches, and that a second section of the resistive structure branches at a second reference point into two other branches. In a contact region, the four branches are connected with four intermediate conductors in four contact areas, which are insulated from one another. In this way, the thin film sensor element is a real four conductor sensor element, wherein the reference points of the four conductor circuit lie within the resistive region. The resistance thermometer with the thin film sensor element of the invention is distinguished by a high accuracy.
1. A thin film sensor element for determining temperature, comprising:
a substrate having a resistive region and a contact region adjoining the resistive region;
a resistive structure having a temperature-dependent electrical resistance, wherein the resistive structure is disposed in the resistive region, wherein the resistive structure includes a first section having a first branch and a second branch connected in parallel with the first branch, wherein the resistive structure further includes a second section having a first branch and a second branch connected in parallel with the first branch of the second section, wherein a first reference point is formed in the resistive region by the connection of the first branch of the first section with the second branch of the first section, and wherein a second reference point is formed in the resistive region by the connection of the first branch of the second section with the second branch of the second section;
a first intermediate conductor connected to the first branch of the first section in a first contact area;
a second intermediate conductor connected to the second branch of the first section in a second contact area;
a third intermediate conductor connected to the first branch of the second section in a third contact area; and
a fourth intermediate conductor connected to the second branch of the second section in a fourth contact area,
wherein the first contact area, the second contact area, the third contact area, and the fourth contact area are disposed in the contact region and are electrically insulated from one another.
2. The thin film sensor element as claimed in claim 1 , wherein the first and/or the second reference point are/is arranged in an end region of the resistive region near the contact region.
3. The thin film sensor element as claimed in claim 1 , wherein the first and/or the second reference point are arranged in a region which lies between an end region of the resistive region away from the contact region and an end region of the resistive region near the contact region.
4. The thin film sensor element as claimed in claim 1 , wherein the resistive structure is composed of a metal cold conductor.
5. The thin film sensor element as claimed in claim 4 , wherein the metal cold conductor includes platinum.
6. The thin film sensor element as claimed in claim 4 , wherein the metal cold conductor includes nickel.
7. The thin film sensor element as claimed in claim 1 , further comprising:
a first cover layer disposed in the resistive region for covering the resistive structure.
8. The thin film sensor element as claimed in claim 7 , further comprising:
a second cover layer disposed in the contact region for covering the four contact areas.
9. The thin film sensor element as claimed in claim 1 , wherein a layer thickness of the thin film sensor element in the resistive region is less than a layer thickness of the thin film sensor element in the contact region.
10. The thin film sensor element as claimed in claim 7 , wherein a totality of the substrate, the resistive structure and the first cover layer in the resistive region has an effective coefficient of thermal expansion greater than or equal to a coefficient of thermal expansion of the material of the resistive structure as bulk-metal.
11. The thin film sensor element as claimed in claim 1 , wherein the substrate is at least partially ceramic.
12. The thin film sensor element as claimed in claim 11 , wherein the substrate includes aluminum oxide.
13. The thin film sensor element as claimed in claim 11 , wherein the substrate includes zirconium oxide.
14. The thin film sensor element as claimed in claim 12 , wherein the substrate further includes zirconium oxide.
15. The thin film sensor element as claimed in claim 1 , wherein a surface layer of the substrate is non-conducting, and wherein the non-conducting surface layer of the substrate has a minimum layer thickness of 1 micrometer.
16. The thin film sensor element as claimed in claim 1 , wherein the intermediate conductors are composed of the same material.
17. The thin film sensor element as claimed in claim 1 , wherein the resistive structure has a layer thickness of 0.1-10.0 micrometers.
18. The thin film sensor element as claimed in claim 8 , wherein the first cover layer has a maximum layer thickness of 50 micrometers and the second cover layer has a maximum layer thickness of 2.0 millimeters.
19. A resistance thermometer, comprising:
a thin film sensor element for determining temperature, comprising:
a substrate having a resistive region and a contact region adjoining the resistive region;
a resistive structure having a temperature-dependent electrical resistance, wherein the resistive structure is disposed in the resistive region, wherein the resistive structure includes a first section having a first branch and a second branch connected in parallel with the first branch, wherein the resistive structure further includes a second section having a first branch and a second branch connected in parallel with the first branch of the second section, wherein a first reference point is formed in the resistive region by the connection of the first branch of the first section with the second branch of the first section, and wherein a second reference point is formed in the resistive region by the connection of the first branch of the second section with the second branch of the second section;
a first intermediate conductor connected to the first branch of the first section in a first contact area;
a second intermediate conductor connected to the second branch of the first section in a second contact area;
a third intermediate conductor connected to the first branch of the second section in a third contact area; and
a fourth intermediate conductor connected to the second branch of the second section in a fourth contact area,
wherein the first contact area, the second contact area, the third contact area, and the fourth contact area are disposed in the contact region and are electrically insulated from one another; and
a control/evaluation unit,
wherein the first intermediate conductor, the second intermediate conductor, the third intermediate conductor, and the fourth intermediate conductor are connected with the control/evaluation unit, and
wherein the control/evaluation unit is embodied to operate the thin film sensor element in a four conductor circuit, to ascertain a resistance of the resistive structure between the first reference point and the second reference point, and to determine from the ascertained resistance a temperature present at the resistive structure.