IP Library Granted Patent US 10,593,755
Granted Patent B2
US 10,593,755 · App. 16/091,119 · Granted Mar 17, 2020

Electronic colloidal nanocrystal devices

Inventors: Cherie R. Kagan (Bala Cynwyd, PA); Ji-Hyuk Choi (Daejeon, KR); Han Wang (Philadelphia, PA); Soong Ju Oh (Seoul, KR)
Assignees: The Trustees of the University of Pennsylvania; Korea Institute of Geoscience and Mineral Resources
H01L29/0665H01L21/02554H01L21/02573H01L21/02601H01L21/02628H01L29/43H01L29/7869H01L29/78681C23C14/08
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Quick Facts
Patent No.
US 10,593,755
App. No.
16/091,119
Granted
Mar 17, 2020
Kind
B2
Abstract

Colloidal nanocrystal electronic devices including multiple types of nanocrystal device elements including nanocrystal metallic electrodes, nanocrystal insulators, and nanocrystal insulators. Colloidal nanocrystal electronic devices may be produced by forming multiple nanocrystal electronic device elements on a substrate.

Claims (34)

1. A method for producing an electronic device comprising the steps of:

forming a first colloidal nanocrystal electronic device element of a first type on a substrate;

forming a second colloidal nanocrystal electronic device element of a second type on the first colloidal nanocrystal electronic device element; and

forming a third colloidal nanocrystal electronic device element of a third type on the second colloidal nanocrystal electronic device element;

wherein the first, second, and third types are different.

2. The method of claim 1 , wherein one or more of the first, second, or third nanocrystal electronic device elements is a semiconductor and wherein at least one of the one or more steps of forming the semiconductor electronic device element comprises the steps of:

forming a base colloidal nanocrystal layer; and

forming an adjacent colloidal nanocrystal layer configured to dope the base colloidal nanocrystal layer to form the semiconductor.

3. The method of claim 2 , wherein the adjacent colloidal nanocrystal layer comprises Indium and the method further comprising:

annealing the electronic device to supply atomic Indium from the adjacent colloidal nanocrystal layer to dope the base colloidal nanocrystal layer and form a semiconductor channel in the base colloidal nanocrystal layer.

4. The method of claim 1 , wherein the first colloidal nanocrystal electronic device element is a metallic electrode, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a semiconductor.

5. The method of claim 1 , wherein the first colloidal nanocrystal electronic device element is a semiconductor, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a metallic electrode.

6. The method of claim 1 , further comprising the step of:

forming a fourth colloidal nanocrystal electronic device element of the first type on the third nanocrystal electronic device element;

wherein the first and fourth colloidal nanocrystal electronic device elements are metallic electrodes, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a semiconductor.

7. A colloidal nanocrystal field effect transistor (FET) comprising:

a substrate;

a colloidal nanocrystal gate electrode formed on the substrate;

a colloidal nanocrystal insulator covering the colloidal nanocrystal gate electrode;

a colloidal nanocrystal semiconductor formed on the insulator;

a colloidal nanocrystal source electrode formed on the colloidal nanocrystal semiconductor in a first area; and

a colloidal nanocrystal drain electrode formed on the colloidal nanocrystal semiconductor in a second area.

8. The FET of claim 7 , wherein the colloidal nanocrystal gate electrode comprises Ag nanocrystals, the colloidal nanocrystal insulator comprises Al 2 O 3 nanocrystals, the colloidal nanocrystal semiconductor comprises Al 2 O 3 nanocrystals, and the colloidal nanocrystal source and drain electrodes comprise In nanocrystals and Ag nanocrystals.

9. A colloidal nanocrystal electronic device comprising:

a substrate;

a first colloidal nanocrystal electronic device element of a first type formed on the substrate;

a second colloidal nanocrystal electronic device element of a second type formed on the first colloidal nanocrystal electronic device element; and

a third colloidal nanocrystal electronic device element of a third type formed on the second colloidal nanocrystal electronic device element;

wherein the first, second, and third types are different.

10. The device of claim 9 , wherein the first colloidal nanocrystal electronic device element is a metallic electrode, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a semiconductor.

11. The method of claim 9 , wherein the first colloidal nanocrystal electronic device element is a semiconductor, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a metallic electrode.

12. The device of claim 9 , further comprising:

a fourth colloidal nanocrystal electronic device element formed on the third nanocrystal electronic device element;

wherein the first and fourth colloidal nanocrystal electronic device elements are metallic electrodes, the second colloidal nanocrystal electronic device element is an insulator, and the third colloidal nanocrystal electronic device element is a semiconductor.

Assignments (4)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2019
From: OH, SOONG JU
To: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
Reel/Frame 049095/0752 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2019
From: KAGAN, CHERIE R.; WANG, HAN
To: THE TRUSTEES OF THE UNIVERSITY OF PENNSYLVANIA
Reel/Frame 049087/0715 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 6, 2019
From: CHOI, JI-HYUK
To: KOREA INSTITUTE OF GEOSCIENCE AND MINERAL RESOURCES
Reel/Frame 049087/0725 →
CONFIRMATORY LICENSE Recorded Nov 2, 2018
From: UNIVERSITY OF PENNSYLVANIA
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 047412/0815 →
Continuity (2)
Provisional Application 62319395 · Apr 7, 2016
Related Publication 20190131393A1 · May 2, 2019