Semiconductor package having inductive lateral interconnects
View Patent ↗Semiconductor packages including a lateral interconnect having an arc segment to increase self-inductance of a signal line is described. In an example, the lateral interconnect includes a circular segment extending around an interconnect pad. The circular segment may extend around a vertical axis of a vertical interconnect to introduce an inductive circuitry to compensate for an impedance mismatch of the vertical interconnect.
1. A semiconductor package, comprising:
a package substrate including an interconnect pad having a pad perimeter around a vertical axis, a vertical interconnect extending from the interconnect pad along the vertical axis, and a lateral interconnect extending laterally from the interconnect pad, wherein the lateral interconnect includes an arc segment extending around and encircling at least a portion of the interconnect pad about the vertical axis; and
an integrated circuit mounted on the package substrate, wherein the integrated circuit is electrically connected to the vertical interconnect through the interconnect pad and the lateral interconnect.
2. The semiconductor package of claim 1 , wherein the package substrate further includes a second interconnect pad having a second pad perimeter around a second vertical axis laterally offset from the vertical axis, and a second vertical interconnect extending along the second vertical axis from the second interconnect pad, wherein the lateral interconnect extends from a first end at the pad perimeter to a second end at the second pad perimeter.
3. The semiconductor package of claim 2 , wherein the vertical interconnect includes a plated-through-hole, and wherein the second vertical interconnect includes a microvia.
4. The semiconductor package of claim 2 , wherein the package substrate further includes a reference plane around the interconnect pad and the second interconnect pad, and a dielectric spacer between the reference plane and the interconnect pads, wherein the lateral interconnect extends through the dielectric spacer between the pad perimeter and the second pad perimeter.
5. The semiconductor package of claim 4 , wherein the lateral interconnect includes a radial segment extending radially from the pad perimeter, and a circular segment extending from the radial segment to the second pad perimeter around the pad perimeter at a radius from the vertical axis.
6. The semiconductor package of claim 5 , wherein a first distance between the pad perimeter and the circular segment is equal to a second distance between the circular segment and the reference plane.
7. The semiconductor package of claim 4 , wherein the lateral interconnect includes a spiral segment between the pad perimeter and the second pad perimeter.
8. The semiconductor package of claim 7 , wherein the spiral segment includes a plurality of revolutions around the vertical axis.
9. The semiconductor package of claim 1 , wherein a self-inductance of the lateral interconnect is at least twice a self-inductance of the vertical interconnect when an electrical signal travels through the vertical interconnect and the lateral interconnect.
10. A semiconductor package assembly, comprising:
a circuit board having an interconnect pad having a pad perimeter around a vertical axis, a vertical interconnect extending from the interconnect pad along the vertical axis, and a lateral interconnect extending laterally from the interconnect pad, wherein the lateral interconnect includes an arc segment extending around and encircling at least a portion of the interconnect pad about the vertical axis; and
a semiconductor package mounted on the circuit board, wherein the semiconductor package includes an integrated circuit mounted on a package substrate, and wherein the integrated circuit is electrically connected to the vertical interconnect through the interconnect pad and the lateral interconnect.
11. The semiconductor package assembly of claim 10 , wherein the circuit board further includes a second interconnect pad having a second pad perimeter around a second vertical axis laterally offset from the vertical axis, wherein the lateral interconnect extends from a first end at the pad perimeter to a second end at the second pad perimeter.
12. The semiconductor package assembly of claim 11 , wherein the lateral interconnect includes a radial segment extending radially from the pad perimeter, and a circular segment extending from the radial segment to the second pad perimeter around the pad perimeter at a radius from the vertical axis.
13. The semiconductor package assembly of claim 11 , wherein the lateral interconnect includes a spiral segment between the pad perimeter and the second pad perimeter.
14. The semiconductor package assembly of claim 13 , wherein the spiral segment includes a plurality of revolutions around the vertical axis.
15. The semiconductor package assembly of claim 10 , wherein a self-inductance of the lateral interconnect is at least twice a self-inductance of the vertical interconnect when an electrical signal travels through the vertical interconnect and the lateral interconnect.
16. A method, comprising:
forming a vertical interconnect along a vertical axis through a dielectric layer;
forming an interconnect pad over the dielectric layer at an end of the vertical interconnect, wherein the interconnect pad includes a pad perimeter around the vertical axis; and
forming a lateral interconnect extending laterally from the interconnect pad over the dielectric layer, wherein the lateral interconnect includes an arc segment extending around and encircling at least a portion of the interconnect pad about the vertical axis.
17. The method of claim 16 , further comprising:
forming a second interconnect pad over the dielectric layer, wherein the second interconnect pad includes a second pad perimeter around a second vertical axis laterally offset from the vertical axis, and wherein the lateral interconnect extends from a first end at the pad perimeter to a second end at the second pad perimeter.
18. The method of claim 17 , wherein the lateral interconnect includes a radial segment extending radially from the pad perimeter, and a circular segment extending from the radial segment to the second pad perimeter around the pad perimeter at a radius from the vertical axis.
19. The method of claim 17 , wherein the lateral interconnect includes a spiral segment between the pad perimeter and the second pad perimeter.
20. The method of claim 19 , wherein the spiral segment includes a plurality of revolutions around the vertical axis.