Chemically-amplified-type negative-type photoresist composition
The present invention relates to a chemically-amplified-type negative photoresist composition, and more particularly to a chemically-amplified-type negative photoresist composition suitable for use in a semiconductor process, which includes a specific organic acid additive, thereby improving a processing margin in a short-wavelength exposure light source compared to conventional negative photoresists.
1. A chemically-amplified-type negative photoresist composition, consisting of, based on a total weight of the composition, 0.1 to 1 wt % of an organic acid additive represented by Chemical Formula 3 below:
wherein the composition further includes, based on the total weight of the composition, 5 to 15 wt % of a 4-vinyl phenol monomer-derived phenol polymer resin, 1 to 2 wt % of a crosslinking agent, 0.1 to 0.4 wt % of a photoacid generator, 0.01 to 0.2 wt % of an acid diffusion inhibitor, and the remainder of a solvent.
2. The chemically-amplified-type negative photoresist composition of claim 1 , wherein the phenol polymer resin is a resin derived from at least one monomer selected from among 4-hydroxy-3-methyl benzoic acid, 4-hydroxy-2-methyl benzoic acid, 5-hydroxy-2-methyl benzoic acid, 3,5-di-tert-butyl-4-hydroxy benzoic acid, 4-hydroxy-3,5-dimethyl benzoic acid, 4-hydroxy isophthalic acid, 2,4,6-hydroxy toluene, 2,4,6-trihydroxy benzoic acid monohydrate, 2,4,6-trihydroxy benzaldehyde, and 4-vinyl phenol, and the cresol polymer resin is a resin derived from at least one cresol selected from among o-cresol, p-cresol, m-cresol, epoxy o-cresol, epoxy p-cresol, and epoxy m-cresol.
3. The chemically-amplified-type negative photoresist composition of claim 1 , wherein the crosslinking agent is at least one selected from the group consisting of tris(2,3-epoxypropyl)isocyanurate, trimethylolmethane triglycidyl ether, trimethylolpropane triglycidyl ether, hexamethylol melamine, trimethylolethane triglycidyl ether, hexamethoxymethyl melamine, hexamethoxyethyl melamine, tetramethylol 2,4-diamino-1,3,5-triazine, tetramethoxymethyl-2,4-diamino-1,3,5-triazine, tetramethylol glycoluril, tetramethoxymethyl glycoluril, tetramethoxyethyl glycoluril, tetramethylol urea, tetramethoxy methyl urea, tetramethoxy ethyl urea, and tetramethoxyethyl-2,4-diamino-1,3,5-triazine.
4. The chemically-amplified-type negative photoresist composition of claim 1 , wherein the photoacid generator is at least one selected from the group consisting of triphenylsulfonium triflate, triphenylsulfonium antimonate, diphenyliodonium triflate, diphenyliodonium antimonate, methoxydiphenyliodonium triflate, di-t-butyldiphenyliodonium triflate, norbornene dicarboxyimide triflate, triphenylsulfonium nonaflate, diphenyliodonium nonaflate, methoxydiphenyliodonium nonaflate, di-t-butyldiphenyliodonium nonaflate, N-hydroxysuccinimide nonaflate, norbornene dicarboxyimide nonaflate, triphenylsulfonium perfluorooctane sulfonate, diphenyliodonium perfluorooctane sulfonate, methoxydiphenyliodonium perfluorooctane sulfonate, di-t-butyldiphenyliodonium perfluorooctane sulfonate, N-hydroxysuccinimide perfluorooctane sulfonate, and norbornene dicarboxyimide perfluorooctane sulfonate.
5. The chemically-amplified-type negative photoresist composition of claim 1 , wherein the acid diffusion inhibitor is at least one selected from the group consisting of dimethylamine, diethylamine, trimethylamine, triethylamine, tributylamine, dimethanolamine, diethanolamine, trimethanolamine, triethanolamine, and tributanolamine.