IP Library Granted Patent US 11,181,759
Granted Patent B2
US 11,181,759 · App. 16/100,558 · Granted Nov 23, 2021

Methods of improving the retardation accuracy and stability of photoelastic modulator devices

Inventors: Nigel Thornton Hopley White (Dorking, GB); Lindsay John Cole (Bookham, GB)
Assignee: Applied Photophysics Limited
G02F1/0131
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Quick Facts
Patent No.
US 11,181,759
App. No.
16/100,558
Granted
Nov 23, 2021
Kind
B2
Abstract

The present invention relates to methods for calibrating and controlling a polarization modulator, for example a photoelastic modulator (PEM) device on a CD measurement instrument, the method comprising scanning the control input voltage (V in ) at a fixed wavelength (λ meas ); and recording the CD scan, wherein the control input voltage (V in ) determines the peak retardation (δ) at the fixed wavelength (λ meas ), and wherein the method is repeated for one or more fixed wavelengths. An augmented drive function allows the PEM to be operated with greater accuracy over the full wavelength range, and measurement of resonant frequency provides a means to continually correct for temperature related drift of retardation.

Claims (175)

1. A method for calibrating a system comprising a photoelastic modulator (PEM) on a circular dichroism (CD) measurement instrument, the method comprising:

providing a circular dichroism (CD) sample;

scanning the control input voltage (V in ) at a fixed wavelength (λ meas ); and

recording the CD scan of the sample,

wherein the control input voltage (V in ) determines the peak retardation (δ) at the fixed wavelength (λ meas ), and wherein the method is repeated for two or more fixed wavelengths, wherein the method further comprises the step of fitting the results measured at each wavelength to a drive function (F).

2. The method of claim 1 , wherein the drive function is an augmented drive function.

3. The method of claim 2 , wherein the augmented drive function is characterized by the equation:

V

in

=

(

c

+

m

λ

+

n

λ

-

1

)

·

2

π

·

Φ

,

wherein V in is the control input voltage, c is the intercept, m is slope, λ is wavelength.

4. The method of claim 2 , wherein a CD measurement error for the augmented drive is about less than 0.01%.

5. The method of claim 1 , wherein the fixed wavelength is selected from two or more wavelengths listed in Table 1

TABLE 1

Peak

Wavelength

Peak No.

(nm)

1

175.29

2

184.26

3

194.26

4

205.64

5

218.79

6

234.24

7

252.72

8

275.25

9

303.30

10

339.15

11

386.46

12

451.54

13

546.20

14

695.61

15

964.10

16

1577.53.

6. The method of claim 5 , wherein the fixed wavelength is selected from at least four wavelengths in Table 1.

7. The method of claim 5 , wherein the fixed wavelength is selected from at least eight wavelengths in Table 1.

8. The method of claim 5 , wherein the fixed wavelength consists of the 16 wavelengths in Table 1.

9. The method of claim 1 , wherein the CD sample is a DichOS optical standard.

10. The method of claim 1 , wherein conditions for recording the scans comprise:

a) a bandwidth of about 1 nm to about 8 nm;

b) a time per point of about 0.1 seconds to about 5 seconds; and

c) about 50 to about 500 points.

11. The method of claim 1 , further comprising a drive correction to account for temperature shifts, wherein the drive correction is characterized by the equation:

Dcorr

=

V

rate

V

ratenom

,

wherein V rate , corresponds to the actual volts per radian of retardation at the V-scan wavelength, V ratenom , corresponds to a nominal value for this parameter, and Dcorr is a function of the PEM resonance frequency shift (Δf).

12. The method of claim 11 , wherein the control input voltage V in is scaled by the drive correction to give a corrected control voltage V in,corr characterized by the equation:

V in,corr =V in ·Dcorr.

13. The method of claim 1 , wherein the system transmits light through the sample to measure its optical properties and the system includes a sample stage that carries the sample and has an aperture through which light is transmitted for each calibration of the system.

14. The method of claim 1 , wherein the system reflects light from the sample to measure its optical properties and the system includes a sample stage that carries the sample and also carries a mirror from which light is reflected for each calibration of the system.

15. The method of claim 1 , further comprising a temperature control system.

16. The method of claim 15 , wherein the temperature control system is used to stabilize the temperature of the PEM core.

17. The method of claim 16 , wherein the temperature control system is a proportional integral derivative (PID) control system.

18. A calibration system comprising a photoelastic modulator (PEM) on a circular dichroism (CD) measurement instrument, wherein the calibration system is configured to for calibrating the PEM on the CD measurement instrument, and a device or program for collecting data, wherein the calibration system comprises a mechanism for scanning the control input voltage ( V in) at a fixed wavelength ( λ meas), wherein the fixed wavelength is selected from two or more wavelengths listed in Table 1

Peak Wavelength

Peak No.

(nm)

 1

 175.29

 2

 184.26

 3

 194.26

 4

 205.64

 5

 218.79

 6

 234.24

 7

 252.72

 8

 275.25

 9

 303.30

10

 339.15

11

 386.46

12

 451.54

13

 546.20

14

 695.61

15

 964.10

16

1577.53;

and an analyzer for recording the CD scan, wherein the control input voltage V in determines the peak retardation (δ) at the fixed wavelength ( λ meas).

19. A method for calibrating a system comprising a photoelastic modulator (PEM) on a circular dichroism (CD) measurement instrument, the method comprising:

providing a circular dichroism (CD) sample;

scanning the control input voltage (V in ) at a fixed wavelength (λ meas ); and

recording the CD scan of the sample,

wherein the control input voltage (V in ) determines the peak retardation (δ) at the fixed wavelength (λ meas ) and wherein the method is repeated for the 16 fixed wavelengths in Table 1

TABLE 1

Peak Wavelength

Peak No.

(nm)

 1

 175.29

 2

 184.26

 3

 194.26

 4

 205.64

 5

 218.79

 6

 234.24

 7

 252.72

 8

 275.25

 9

 303.30

10

 339.15

11

 386.46

12

 451.54

13

 546.20

14

 695.61

15

 964.10

16

1577.53.

.

20. The method of claim 19 , further comprising the step of fitting the results measured at each wavelength to a drive function (F).

Assignments (3)
SECURITY INTEREST Recorded Dec 16, 2025
From: APPLIED PHOTOPHYSICS LIMITED
To: CANADIAN IMPERIAL BANK OF COMMERCE
Reel/Frame 073234/0773 →
SECURITY INTEREST Recorded Nov 24, 2025
From: APPLIED PHOTOPHYSICS LIMITED
To: SWK FUNDING LLC
Reel/Frame 073021/0713 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 10, 2019
From: WHITE, NIGEL THORNTON HOPLEY; COLE, LINDSAY JOHN
To: APPLIED PHOTOPHYSICS LIMITED
Reel/Frame 047958/0169 →
Continuity (3)
Continuation PCTUS2017017111 · Feb 9, 2017
Provisional Application 62293514 · Feb 10, 2016
Related Publication 20190243166A1 · Aug 8, 2019