IP Library Granted Patent US 11,236,426
Granted Patent B2
US 11,236,426 · App. 16/104,460 · Granted Feb 1, 2022

Plasmonic diamond films and related methods

Inventors: Robert John Hamers (Madison, WI); Shuo Li (Madison, WI)
Assignee: Wisconsin Alumni Research Foundation
C23C16/56B01J23/50B01J35/004B01J35/0013C23C14/18C23C16/0281C23C16/06C23C16/27C23C16/274C23C16/30
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Quick Facts
Patent No.
US 11,236,426
App. No.
16/104,460
Granted
Feb 1, 2022
Kind
B2
Abstract

Methods of forming plasmonic diamond films are provided. In an embodiment, such a method comprises forming a first layer of diamond on a substrate; depositing a layer of a metal on a surface of the first layer of diamond to form an as-deposited layer of metal; exposing the as-deposited layer of metal to a plasma treatment to convert the as-deposited layer of metal to a plurality of discrete regions of the metal on the surface of the first layer of diamond; and forming a second layer of diamond on the plurality of discrete regions of metal to form the plasmonic diamond film comprising a plurality of plasmonic nanoparticles.

Claims (24)

1. A method of forming a plasmonic diamond film, the method comprising:

(a) forming a first layer of diamond on a substrate;

(b) depositing a layer of a metal on a surface of the first layer of diamond to form an as-deposited layer of metal;

(c) exposing the as-deposited layer of metal to a plasma treatment to convert the as-deposited layer of metal to a plurality of discrete regions of the metal on the surface of the first layer of diamond; and

(d) forming a second layer of diamond on the plurality of discrete regions of metal to form the plasmonic diamond film comprising a plurality of plasmonic nanoparticles.

2. The method of claim 1 , wherein the second layer encapsulates the plurality of discrete regions of the metal to provide the plurality of plasmonic nanoparticles embedded within a continuous diamond matrix.

3. The method of claim 1 , wherein the second layer encapsulates the plurality of discrete regions of the metal to provide the plurality of plasmonic nanoparticles as core-shell plasmonic nanoparticles distributed on the surface of the first layer of diamond, each core-shell plasmonic nanoparticle comprising a core of the metal and a diamond shell thereover.

4. The method of claim 3 , wherein the surface of the first layer of diamond between the core-shell plasmonic nanoparticles is uncoated by the second layer of diamond.

5. The method of claim 1 , wherein the diamond of the first layer of diamond is hydrogen-terminated diamond.

6. The method of claim 1 , wherein the diamond of the first and second layers of diamond is polycrystalline diamond.

7. The method of claim 1 , wherein the metal is selected from Cu, Ag, Au, Pt, Al, Co, Pd, and combinations thereof.

8. The method of claim 1 , wherein the metal is selected from Ag, Au, Cu, Al, and combinations thereof.

9. The method of claim 8 , wherein the plurality of plasmonic nanoparticles have an average diameter of less than 100 nm.

10. The method of claim 1 , wherein the as-deposited layer of metal has an average thickness in the range of from 1 nm to 100 nm.

11. The method of claim 1 , wherein the plasma treatment in step (c) is an H 2 plasma treatment.

12. The method of claim 1 , wherein the as-deposited layer of metal is seeded with diamond prior to the plasma treatment in step (c).

13. The method of claim 1 , further comprising repeating steps (b)-(d) of the method one or more times to form a multi-layer plasmonic diamond structure.

14. The method of claim 1 , wherein the metal is Ag and the second layer encapsulates the plurality of discrete regions of Ag to provide the plurality of plasmonic nanoparticles as core-shell plasmonic nanoparticles distributed on the surface of the first layer of diamond, each core-shell plasmonic nanoparticle comprising an Ag core and a diamond shell thereover.

15. The method of claim 14 , wherein the surface of the first layer of diamond between the core-shell plasmonic nanoparticles is uncoated by the second layer of diamond.

16. The method of claim 14 , wherein the diamond of the first layer of diamond is hydrogen-terminated diamond.

17. The method of claim 14 , wherein the diamond of the shell is polycrystalline diamond.

18. The method of claim 14 , wherein the as-deposited layer of Ag has an average thickness in the range of from 1 nm to 100 nm and the diamond shells have an average thickness in the range of from 1 nm to 100 nm.

19. The method of claim 14 , wherein the plasma treatment is an H 2 plasma treatment.

20. The method of claim 14 , wherein Ag cores of the core-shell plasmonic nanoparticles have an average diameter of less than 100 nm.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jul 27, 2023
From: LI, SHUO; HAMERS, ROBERT
To: WISCONSIN ALUMNI RESEARCH FOUNDATION
Reel/Frame 064404/0875 →
CONFIRMATORY LICENSE Recorded Sep 6, 2018
From: UNIVERSITY OF WISCONSIN, MADISON
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 047024/0351 →
Continuity (2)
Provisional Application 62554713 · Sep 6, 2017
Related Publication 20190071779A1 · Mar 7, 2019