Real-time sensing of flowing nanoparticles with electro-opto-mechanics

1. A system, comprising:

a resonator device including walls forming a channel;

where the walls are shaped to simultaneously confine light in an optical mode and to confine vibration in a mechanical mode;

where the mechanical mode is selected so that vibration in the mechanical mode can couple to the optical mode;

a waveguide coupled with the resonator device for guiding a probe light through the resonator device;

an electro-mechanical actuation mechanism to provide a mechanical drive force to the resonator device, wherein the electro-mechanical actuation mechanism comprises a first electrode and a second electrode for receiving an RF electronic signal from a signal generator, wherein the first electrode is placed on a first side of the resonator device and the second electrode is placed on a second side of the resonator device, wherein at least one of the first electrode and the second electrode is placed in contact with the resonator device;

a photodetector to measure light outputted by the waveguide after passing through the resonator device, the outputted light including a modulated version of the probe light based on passing through the resonator device and interacting with a fluid, or a fluid containing a particle, contained by the channel of the resonator device, the photodetector configured to convert the outputted light to an electronic output signal for sensing properties of particles contained within the channel of the resonator device without requiring labeling or binding of the particle, and with or without requiring direct interaction of the particle with an optical mode of the resonator device; and

one or more lock-in amplifiers to receive the electronic output signal from the photodetector via an amplifier, wherein the one or more lock-in amplifiers is configured to compare the electronic output signal from the photodetector, via the amplifier, the RF electronic signal received from the signal generator, and configured to output an amplitude and phase based on comparing the electronic output signal from the photodetector, via the amplifier, to the RF electronic signal received from the signal generator, wherein the amplifier processes the electronic output signal from the photodetector to mitigate influence of the RF electronic signal.

2. The system of claim 1 , where the electro-mechanical actuation mechanism comprises two or more electrodes.

3. The system of claim 2 , where the electrodes produce at least one of a dielectrophoretic mechanical drive force and an electrostatic mechanical drive force.

4. The system of claim 2 , where the electrodes are in contact with the resonator device.

5. The system of claim 2 , where the electrodes comprise a wire geometry.

6. The system of claim 2 , where the resonator device is coated with conductive material to operate as one of the electrodes.

7. The system of claim 1 , where the electro-mechanical actuation mechanism produces mechanical vibration of a mechanical mode of the resonator device.

8. The system of claim 1 , further comprising one or more electrical spectrum analyzers to measure the output signal from the photodetector.

9. The system of claim 1 , where the amplitude or phase is used to measure a property of the particles.

10. The system of claim 9 , where the property of particles comprises at least one of stiffness, volume, compressibility, speed of sound, mass and density.

11. The system of claim 1 , where the amplitude or phase is used to measure a property of the fluid.

12. The system of claim 11 , where the property of the fluid comprises at least one of bulk modulus, speed of sound, density, viscosity and non-Newtonian parameters.

13. A method, comprising:

providing a liquid containing a particle in a resonator device;

providing a probe light passing through the resonator device;

simultaneously confining light in an optical mode and confining vibration in a mechanical mode, where the mechanical mode is selected so that vibration in the mechanical mode can couple to the optical mode;

providing a mechanical drive force to the resonator device, wherein the mechanical drive force comprises a first electrode and a second electrode for receiving an RF electronic signal from a signal generator, wherein the first electrode is placed on a first side of the resonator device and the second electrode is placed on a second side of the resonator device, wherein at least one of the first electrode and the second electrode is placed in contact with the resonator device;

measuring a light outputted by the waveguide after passing the probe light through the resonator device, the outputted light including a modulated version of the probe light based on passing through the resonator device and interacting with the fluid containing the particle;

converting the outputted light to an electronic output signal;

sensing, via the electronic output signal, properties of particles contained within the channel of the resonator device without requiring labeling or binding of the particle, and with or without requiring direct interaction of the particle with an optical mode of the resonator device;

receiving, at one or more lock-in amplifiers, the electronic output signal via an amplifier, wherein the amplifier processes the electronic output signal;

comparing, via the one or more lock-in amplifiers, the electronic output signal processed by the amplifier to a generated output signal; and

outputting an amplitude and phase based on comparing the electronic output signal processed by the amplifier to the generated output signal.

14. The system of claim 13 , where the amplitude or phase is used to measure a property of the particles.

15. The method of claim 13 , further comprising detecting particles based on observable frequency shifts in the received outputted light as modified by passing through the resonator device with the provided mechanical drive force.