IP Library Granted Patent US 10,943,981
Granted Patent B2
US 10,943,981 · App. 16/110,123 · Granted Mar 9, 2021

Semiconductor device

Inventors: Masahiro Sugimoto (Kyoto, JP); Isao Takahashi (Kyoto, JP); Takashi Shinohe (Kyoto, JP); Toshimi Hitora (Kyoto, JP)
Assignee: FLOSFIA INC.
H01L29/24H01L21/0262H01L21/02483H01L21/02502H01L21/02565H01L21/02576H01L21/02579H01L21/02581H01L21/02628H01L29/04H01L29/045H01L29/063H01L29/0619H01L29/66969H01L29/868H01L29/872
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Quick Facts
Patent No.
US 10,943,981
App. No.
16/110,123
Granted
Mar 9, 2021
Kind
B2
Abstract

In a first aspect of a present inventive subject matter, a semiconductor device includes an n-type semiconductor layer, an i-type semiconductor layer and a p-type semiconductor layer. The i-type semiconductor layer includes an oxide semiconductor as a major component. The oxide semiconductor that is included as the major component of the i-type semiconductor layer includes at least one metal selected from among aluminum, indium, and gallium.

Claims (68)

1. A semiconductor device comprising:

an n-type semiconductor layer;

an i-type semiconductor layer; and

a p-type semiconductor layer;

wherein the i-type semiconductor layer has a first carrier concentration,

wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration,

wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,

wherein the i-type semiconductor layer comprises an oxide semiconductor as a major component,

wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium, and

wherein a breakdown voltage of the semiconductor device is 400 V or more.

2. The semiconductor device according to claim 1 ,

wherein the i-type semiconductor layer is arranged on the n-type semiconductor layer, and

wherein the p-type semiconductor layer is arranged on the i-type semiconductor layer to form a PiN structure.

3. The semiconductor device according to claim 1 ,

wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises gallium.

4. The semiconductor device according to claim 1 ,

wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.

5. The semiconductor device according to claim 1 ,

wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component, and

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises gallium.

6. The semiconductor device according to claim 5 ,

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.

7. The semiconductor device according to claim 1 ,

wherein the p-type semiconductor layer comprises an oxide semiconductor as a major component, and

wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a d-block metal in the periodic table.

8. The semiconductor device according to claim 7 ,

wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a metal of Group 9 of the periodic table.

9. The semiconductor device according to claim 7 ,

wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.

10. The semiconductor device according to claim 1 , further comprising:

a reduced surface field (RESURF) region.

11. The semiconductor device according to claim 1 , further comprising

a guard ring.

12. The semiconductor device according to claim 1 ,

wherein the semiconductor device is a diode.

13. The semiconductor device according to claim 1 ,

wherein the semiconductor device is a power device.

14. A semiconductor device comprising:

an n-type semiconductor layer;

an i-type semiconductor layer; and

a p-type semiconductor layer,

wherein the i-type semiconductor layer has a first carrier concentration,

wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration,

wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,

wherein the p-type semiconductor layer comprises an oxide semiconductor as a major component,

wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises iridium or gallium, and

wherein a breakdown voltage of the semiconductor device is 400 V or more.

15. The semiconductor device according to claim 14 ,

wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component, and

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium.

16. The semiconductor device according to claim 15 ,

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least gallium.

17. The semiconductor device according to claim 14 ,

wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises gallium.

18. A semiconductor device comprising:

an n-type semiconductor layer;

an i-type semiconductor layer; and

a p-type semiconductor layer,

wherein the i-type semiconductor layer has a first carrier concentration,

wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration, and

wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,

wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component,

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium, and

wherein a breakdown voltage of the semiconductor device is 400 V or more.

19. The semiconductor device according to claim 18 ,

wherein the i-type semiconductor layer comprises an oxide semiconductor as a major component, and the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises one selected from among a corundum structure, a β-gallia structure or an ε-type structure.

20. The semiconductor device according to claim 18 ,

wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least gallium.

Assignments (2)
CHANGE OF ASSIGNEE ADDRESS Recorded Jun 6, 2019
From: FLOSFIA INC.
To: FLOSFIA INC.
Reel/Frame 049393/0558 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 23, 2018
From: SUGIMOTO, MASAHIRO; TAKAHASHI, ISAO; SHINOHE, TAKASHI; HITORA, TOSHIMI
To: FLOSFIA INC.
Reel/Frame 046683/0696 →
Priority Claims (1)
JP JP2017-161677 · Aug 24, 2017 · national
Continuity (1)
Related Publication 20190067426A1 · Feb 28, 2019