Semiconductor device
In a first aspect of a present inventive subject matter, a semiconductor device includes an n-type semiconductor layer, an i-type semiconductor layer and a p-type semiconductor layer. The i-type semiconductor layer includes an oxide semiconductor as a major component. The oxide semiconductor that is included as the major component of the i-type semiconductor layer includes at least one metal selected from among aluminum, indium, and gallium.
1. A semiconductor device comprising:
an n-type semiconductor layer;
an i-type semiconductor layer; and
a p-type semiconductor layer;
wherein the i-type semiconductor layer has a first carrier concentration,
wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration,
wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,
wherein the i-type semiconductor layer comprises an oxide semiconductor as a major component,
wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium, and
wherein a breakdown voltage of the semiconductor device is 400 V or more.
2. The semiconductor device according to claim 1 ,
wherein the i-type semiconductor layer is arranged on the n-type semiconductor layer, and
wherein the p-type semiconductor layer is arranged on the i-type semiconductor layer to form a PiN structure.
3. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises gallium.
4. The semiconductor device according to claim 1 ,
wherein the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.
5. The semiconductor device according to claim 1 ,
wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component, and
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises gallium.
6. The semiconductor device according to claim 5 ,
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.
7. The semiconductor device according to claim 1 ,
wherein the p-type semiconductor layer comprises an oxide semiconductor as a major component, and
wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a d-block metal in the periodic table.
8. The semiconductor device according to claim 7 ,
wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a metal of Group 9 of the periodic table.
9. The semiconductor device according to claim 7 ,
wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises a corundum structure, a β-gallia structure or an ε-type structure.
10. The semiconductor device according to claim 1 , further comprising:
a reduced surface field (RESURF) region.
11. The semiconductor device according to claim 1 , further comprising
a guard ring.
12. The semiconductor device according to claim 1 ,
wherein the semiconductor device is a diode.
13. The semiconductor device according to claim 1 ,
wherein the semiconductor device is a power device.
14. A semiconductor device comprising:
an n-type semiconductor layer;
an i-type semiconductor layer; and
a p-type semiconductor layer,
wherein the i-type semiconductor layer has a first carrier concentration,
wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration,
wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,
wherein the p-type semiconductor layer comprises an oxide semiconductor as a major component,
wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises iridium or gallium, and
wherein a breakdown voltage of the semiconductor device is 400 V or more.
15. The semiconductor device according to claim 14 ,
wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component, and
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium.
16. The semiconductor device according to claim 15 ,
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least gallium.
17. The semiconductor device according to claim 14 ,
wherein the oxide semiconductor that is comprised as the major component of the p-type semiconductor layer comprises gallium.
18. A semiconductor device comprising:
an n-type semiconductor layer;
an i-type semiconductor layer; and
a p-type semiconductor layer,
wherein the i-type semiconductor layer has a first carrier concentration,
wherein the n-type semiconductor layer has a second carrier concentration that is larger than the first carrier concentration, and
wherein the p-type semiconductor layer has a third carrier concentration that is larger than the first carrier concentration,
wherein the n-type semiconductor layer comprises an oxide semiconductor as a major component,
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least one metal selected from among aluminum, indium, and gallium, and
wherein a breakdown voltage of the semiconductor device is 400 V or more.
19. The semiconductor device according to claim 18 ,
wherein the i-type semiconductor layer comprises an oxide semiconductor as a major component, and the oxide semiconductor that is comprised as the major component of the i-type semiconductor layer comprises one selected from among a corundum structure, a β-gallia structure or an ε-type structure.
20. The semiconductor device according to claim 18 ,
wherein the oxide semiconductor that is comprised as the major component of the n-type semiconductor layer comprises at least gallium.