Methods of forming semiconductor devices using aspect ratio dependent etching effects, and related semiconductor devices
View Patent ↗A method of forming a semiconductor device comprises forming a patterned masking material comprising parallel structures and parallel trenches extending at a first angle from about 30° to about 75° relative to a lateral direction. A mask is provided over the patterned masking material and comprises additional parallel structures and parallel apertures extending at a second, different angle from about 0° to about 90° relative to the lateral direction. The patterned masking material is further patterned using the mask to form a patterned masking structure comprising elongate structures separated by the parallel trenches and additional parallel trenches. Exposed portions of a hard mask material underlying the patterned masking structure are subjected to ARDE to form a patterned hard mask material. Exposed portions of a semiconductive material underlying the patterned hard mask material are removed to form semiconductive pillar structures. Semiconductor devices and electronic systems are also described.
1. A semiconductor device, comprising elongate semiconductive pillars each individually comprising a digit line contact region disposed laterally between two storage node contact regions, each of the two storage node contact regions having a larger width than the digit line contact region.
2. The semiconductor device of claim 1 , further comprising:
first trenches adjacent first opposing side surfaces of the elongate semiconductive pillars and oriented at a first angle within a range of from about 30 degrees to about 75 degrees offset from a first lateral direction; and
second trenches adjacent second opposing side surfaces of the elongate semiconductive pillars and oriented at a second, different angle within a range of from about 0 degrees to about 90 degrees offset from the first lateral direction.
3. The semiconductor device of claim 2 , wherein first opposing side surfaces and the second opposing side surfaces of each of the elongate semiconductive pillars are substantially vertical.
4. The semiconductor device of claim 3 , wherein at least the first opposing side surfaces of each of the elongate semiconductive pillars are substantially non-planar.
5. The semiconductor device of claim 2 , wherein the first angle is about 69 degrees and the second, different angle is about 41 degrees.
6. The semiconductor device of claim 2 , wherein the first angle is about 69 degrees and the second, different angle is about 90 degrees.
7. The semiconductor device of claim 2 , wherein the first angle is about 49 degrees and the second, different angle is about 90 degrees.
8. The semiconductor device of claim 1 , further comprising:
a digit line contact at the digit line contact region of each of the elongate semiconductive pillars;
storage node contacts at the two storage node contact regions of each of the elongate semiconductive pillars;
digit lines individually in electrical communication with the digit line contact of each of the elongate semiconductive pillars;
word lines laterally extending in a different direction than the digit lines; and
storage node structures individually in electrical communication with the storage node contacts, and positioned proximate intersections of the digit lines and the word lines.
9. The semiconductor device of claim 8 , further comprising redistribution structures in electrical communication with and extending between the storage node contacts and the storage node structures, upper portions of the redistribution structures underlying the storage node structures and laterally offset from lower portions of the redistribution structures overlying the storage node contacts.