IP Library › Granted Patent US 10,643,957
Granted Patent B2
US 10,643,957 · App. 16/113,387 · Granted May 5, 2020

Conformal dummy die

Inventors: Antonius Hendrikus Jozef Kamphuis (Lent, NL); Amar Ashok Mavinkurve (Malden, NL); Jetse De Witte (Nijmegen, NL); Andrei-Alexandru Damian (Nijmegen, NL)
Assignee: NXP B.V.
H01L23/562H01L21/565H01L23/3121H01L23/49541H01L24/05H01L24/32H01L24/48H01L24/73H01L24/83H01L24/85H01L24/92H01L24/94H01L21/30625H01L21/78H01L2224/0401H01L2224/29191H01L2224/32225H01L2224/32245H01L2224/33181H01L2224/4845H01L2224/48091H01L2224/48106H01L2224/48175H01L2224/48463H01L2224/73215H01L2224/73265H01L2224/92247H01L2924/0715H01L2924/2064H01L2924/3511
View Patent ↗
Loading inventors, assignments & file history…
Monitor This Case
Get email alerts when status or documents change.
Order Certified Copies
Most orders are placed with the USPTO same day — all within 24 business hours.
Order via The Patent Place →
Pre-filled with this patent's details
Quick Facts
Patent No.
US 10,643,957
App. No.
16/113,387
Granted
May 5, 2020
Kind
B2
Abstract

Embodiments of packaged semiconductor devices and methods of making thereof are provided herein, which include a semiconductor die having a plurality of pads on an active side; a dummy die having a plurality of openings that extend from a first major surface to a second major surface opposite the first major surface, wherein the plurality of openings are aligned with the plurality of pads; and a silicone-based glue attaching the dummy die to the active side of the semiconductor die, wherein a plurality of bondable surfaces of the semiconductor die are exposed through the plurality of openings of the dummy die.

Claims (52)

1. A packaged semiconductor device comprising:

a semiconductor die having a plurality of pads on an active side;

a dummy die having a plurality of openings that extend from a first major surface to a second major surface opposite the first major surface, wherein the plurality of openings are aligned with the plurality of pads;

a silicone-based glue attaching the dummy die to the active side of the semiconductor die, wherein a plurality of bondable surfaces of the semiconductor die are exposed through the plurality of openings of the dummy die;

an under bump metallization (UBM) layer formed on the plurality of pads, wherein top surfaces of the UBM layer on the plurality of pads provide the plurality of bondable surfaces;

a plurality of solder bumps attached to the UBM layer on the plurality of pads, and

a fillet of the silicone-based glue laterally surrounding and contacting each solder bump, wherein the fillet provides a sealed barrier over the active surface of the semiconductor die within each opening of the dummy die.

2. The packaged semiconductor device of claim 1 , wherein

each opening of the dummy die is aligned to a respective pad of the semiconductor die, and

a portion of the dummy die is located between adjacent pads.

3. The packaged semiconductor device of claim 1 , wherein

the dummy die has a perimeter that corresponds to a perimeter of the semiconductor die.

4. The packaged semiconductor device of claim 1 , wherein

the semiconductor die includes a stress-sensitive area on the active side, wherein the dummy die covers the stress-sensitive area.

5. The packaged semiconductor device of claim 4 , wherein

the dummy die has a perimeter that extends beyond a perimeter of the stress-sensitive area by a minimum distance.

6. The packaged semiconductor device of claim 4 , wherein

the stress-sensitive area extends underneath at least one of the plurality of pads on the semiconductor die.

7. The packaged semiconductor device of claim 1 , wherein

the dummy die has a thickness in a range between 10 and 100 microns.

8. The packaged semiconductor device of claim 1 , wherein

the silicone-based glue has a thickness in a range between 20 and 50 microns.

9. The packaged semiconductor device of claim 1 , wherein

a portion of the plurality of openings are located in a peripheral part of the dummy die.

10. The packaged semiconductor device of claim 1 , wherein

a portion of the plurality of openings are located in a central part of the dummy die.

11. The packaged semiconductor device of claim 1 , wherein

the semiconductor die is one of a plurality of semiconductor dies as part of a semiconductor die wafer,

the dummy die is one of a plurality of dummy dies as part of a dummy die wafer, and

the silicone-based glue attaches the dummy die wafer to the semiconductor die wafer, wherein the plurality of bondable surfaces of each of the plurality of semiconductor dies are exposed through the plurality of openings of each of the plurality of dummy dies.

12. A packaged semiconductor device comprising:

a semiconductor die having a plurality of pads on an active side;

a dummy die having a plurality of openings that extend from a first major surface to a second major surface opposite the first major surface, wherein the plurality of openings are aligned with the plurality of pads; and

a silicone-based glue attaching the dummy die to the active side of the semiconductor die, wherein a plurality of bondable surfaces of the semiconductor die are exposed through the plurality of openings of the dummy die;

a plurality of stud bumps formed on the plurality of pads, wherein top surfaces of the plurality of stud bumps provide the plurality of bondable surfaces; and

a fillet of the silicone-based glue laterally surrounding and contacting each stud bump, wherein the fillet provides a sealed barrier over the active surface of the semiconductor die within each opening of the dummy die.

13. A packaged semiconductor device comprising:

a semiconductor die having a plurality of pads on an active side;

a dummy die having a plurality of openings that extend from a first major surface to a second major surface opposite the first major surface, wherein the plurality of openings are aligned with the plurality of pads; and

a silicone-based glue attaching the dummy die to the active side of the semiconductor die, wherein a plurality of bondable surfaces of the semiconductor die are exposed through the plurality of openings of the dummy die;

a plurality of ball bonds attached to the plurality of bondable surfaces within each opening of the dummy die; and

a fillet of the silicone-based glue laterally surrounding and contacting each ball bond, wherein the fillet provides a sealed barrier over the active surface of the semiconductor die within each opening of the dummy die.

14. A packaged semiconductor device comprising:

a semiconductor die having a plurality of pads on an active side;

a dummy die having a plurality of openings that extend from a first major surface to a second major surface opposite the first major surface, wherein the plurality of openings are aligned with the plurality of pads; and

a silicone-based glue attaching the dummy die to the active side of the semiconductor die, wherein a plurality of bondable surfaces of the semiconductor die are exposed through the plurality of openings of the dummy die;

a plurality of ball bonds attached to the plurality of bondable surfaces within each opening of the dummy die; and

a lead frame having a die flag and a plurality of lead fingers, wherein

a back side of the semiconductor die is attached to the die flag with die attach material, and

the plurality of ball bonds are part of a plurality of wire bond interconnects that also include tail bonds attached to the plurality of lead fingers.

15. The packaged semiconductor device of claim 14 , further comprising:

an encapsulant body that encapsulates the lead frame, the semiconductor die, the dummy die, and the plurality of wire bond interconnects.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 27, 2018
From: KAMPHUIS, ANTONIUS HENDRIKUS JOZEF; MAVINKURVE, AMAR ASHOK; DE WITTE, JETSE; DAMIAN, ANDREI-ALEXANDRU
To: NXP B.V.
Reel/Frame 046714/0421 →
Continuity (1)
Related Publication 20200066653A1 · Feb 27, 2020