Manufacturing method of image-sensing module
A manufacturing method of an image-sensing module includes following steps. A substrate is provided. At least one photosensitive chip is disposed on the substrate, and each of the at least one photosensitive chip has an active area. At least one protection layer covers the at least one active area of the at least one photosensitive chip. A first manufacturing process is performed, and dust is generated during the first manufacturing process. The at least one protection layer is suitable for isolating the dust from the at least one active area. The at least one protection layer is removed to expose the at least one active area.
1. A manufacturing method of an image-sensing module, comprising:
providing a substrate;
placing at least one photosensitive chip on the substrate, each of the at least one photosensitive chip having at least one active area;
covering the at least one active area of the at least one photosensitive chip with at least one protection layer;
performing a first manufacturing process, wherein the at least one protection layer covers the at least one active area during the first manufacturing process; and
removing the at least one protection layer to expose the at least one active area,
wherein the first manufacturing process comprises disposing a plurality of conductive wires between the at least one photosensitive chip and the substrate to electrically connect the at least one photosensitive chip and the substrate.
2. The manufacturing method as recited in claim 1 , further comprising: performing a second manufacturing process, wherein the at least one protection layer covers the at least one active area during the second manufacturing process, and the second manufacturing process comprises: cleaning a surface of the substrate with use of plasma.
3. The manufacturing method as recited in claim 1 , further comprising: performing a third manufacturing process, wherein the at least one protection layer covers the at least one active area during the third manufacturing process, and the third manufacturing process comprises: forming a package layer on the substrate, the package layer encapsulating a portion of the at least one photosensitive chip and exposing the whole upper surface of the at least one protection layer.
4. The manufacturing method as recited in claim 3 , wherein the number of the at least one photosensitive chip is plural, after the step of forming the package layer on the substrate, the package layer and the substrate are cut to form a plurality of photosensitive assemblies, and during the step of cutting the package layer and the substrate, the at least one protection layer covers the at least one active area.
5. The manufacturing method as recited in claim 3 , further comprising: arranging a lens assembly on the package layer after the step of removing the at least one protection layer, the lens assembly corresponding to the at least one active area.
6. The manufacturing method as recited in claim 3 , further comprising: performing a cleaning process after the step of removing the at least one protection layer.
7. The manufacturing method as recited in claim 1 , further comprising: performing a fourth manufacturing process, wherein the fourth manufacturing process comprises one of a step of cleaning a surface of the substrate with use of plasma, and a step of forming a package layer on the substrate.
8. The manufacturing method as recited in claim 1 , further comprising: arranging a mirror holder on the substrate after the step of removing the at least one protection layer, wherein the mirror holder exposes the at least one active area.
9. The manufacturing method as recited in claim 8 , further comprising: arranging a lens assembly on the mirror holder, the lens assembly corresponding to the at least one active area.
10. The manufacturing method as recited in claim 1 , further comprising: adhering a plurality of passive devices to a surface of the substrate before the step of covering the at least one active area with the at least one protection layer.