IP Library › Granted Patent US 10,948,824
Granted Patent B2
US 10,948,824 · App. 16/124,579 · Granted Mar 16, 2021

Dispensing nozzle design and dispensing method thereof

Inventors: Wei Chang Cheng (Taichung, TW); Chi-Hung Liao (Taipei, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
G03F7/162B05B1/005H01L21/0273
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Quick Facts
Patent No.
US 10,948,824
App. No.
16/124,579
Granted
Mar 16, 2021
Kind
B2
Abstract

An apparatus for dispensing fluid includes a fluid source; a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore.

Claims (18)

1. An apparatus for dispensing fluid, comprising:

a fluid source;

a nozzle having an inner layer and an outer layer, the inner layer defining a bore in fluid communication with the fluid source; and

a plurality of pins each moveable to be in physical contact with the outer layer, wherein the plurality of pins is operable to apply a force towards the outer layer to adjust a cross-section of the bore, and wherein the inner and outer layers are made of elastic material.

2. The apparatus of claim 1 , wherein each of the plurality of pins is moveable in a direction perpendicular to a longitudinal axis of the bore.

3. The apparatus of claim 1 , wherein each of the plurality of pins is movable by applying a gaseous pressure.

4. The apparatus of claim 1 , wherein the elastic material of the inner layer is more rigid than that of the outer layer.

5. The apparatus of claim 1 , wherein the inner and outer layers form a cavity that can be inflated by pumping in gas.

6. The apparatus of claim 1 , wherein the cross-section of the bore is adjustable to vary in shapes.

7. The apparatus of claim 6 , wherein the shapes are selected from triangle, rectangle, square, circle, oval, and polygon.

8. The apparatus of claim 1 , wherein the cross-section of the bore is adjustable to vary in cross-sectional areas along a longitudinal axis of the bore.

9. The apparatus of claim 1 , further comprising:

a gas outlet nozzle in a proximity region of an orifice of the nozzle, wherein the gas outlet nozzle is operable to increase an ambient pressure in the proximity region.

10. The apparatus of claim 1 , further comprising:

a moveable arm attached to the nozzle, the moveable arm being operable to move the nozzle horizontally and vertically.

11. The apparatus of claim 1 , further comprising:

a rotatable platform to hold and rotate a substrate to coat with the fluid dispensed from the nozzle.

12. The apparatus of claim 1 , wherein the plurality of pins is separated from the inner layer by the outer layer.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 7, 2018
From: CHENG, WEI CHANG; LIAO, CHI-HUNG
To: TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Reel/Frame 046813/0014 →
Continuity (2)
Provisional Application 62691113 · Jun 28, 2018
Related Publication 20200004153A1 · Jan 2, 2020
Cited By (2)
US 12,429,775 US 12,533,771