Semiconductor device and method of manufacturing the same
In one embodiment, a semiconductor device includes a first interconnection including a first extending portion extending in a first direction, and a first curved portion curved with respect to the first extending portion. The device further includes a second interconnection including a second extending portion extending in the first direction and adjacent to the first extending portion in a second direction, and a second curved portion curved with respect to the second extending portion. The device further includes a first plug provided on the first curved portion, or on a first non-opposite portion included in the first extending portion and not opposite to the second extending portion in the second direction. The device further includes a second plug provided on the second curved portion, or on a second non-opposite portion included in the second extending portion and not opposite to the first extending portion in the second direction.
1. A semiconductor device comprising:
a first interconnection including a first extending portion that extends in a first direction, and a first curved portion that is curved with respect to the first extending portion;
a second interconnection including a second extending portion that extends in the first direction and is adjacent to the first extending portion in a second direction perpendicular to the first direction, and a second curved portion that is curved with respect to the second extending portion;
a first plug provided on the first curved portion, or provided on a first non-opposite portion that is included in the first extending portion and is not opposite to the second extending portion in the second direction; and
a second plug provided on the second curved portion, or provided on a second non-opposite portion that is included in the second extending portion and is not opposite to the first extending portion in the second direction.
2. The device of claim 1 , wherein
the first curved portion is curved on the second extending portion side with respect to the first extending portion, and
the second curved portion is curved on the first extending portion side with respect to the second extending portion.
3. The device of claim 1 , further comprising:
a first lower plug provided under the first extending portion; and
a second lower plug provided under the second extending portion,
wherein
an area of an upper face and an area of a lower face of the first plug are respectively larger than an area of an upper face and an area of a lower face of the first lower plug, and
an area of an upper face and an area of a lower face of the second plug are respectively larger than an area of an upper face and an area of a lower face of the second lower plug.
4. The device of claim 1 , further comprising:
a third interconnection including a third extending portion that extends in the first direction and is adjacent to the second extending portion in the second direction, and a third curved portion that is curved with respect to the third extending portion;
a fourth interconnection including a fourth extending portion that extends in the first direction and is adjacent to the third extending portion in the second direction, and a fourth curved portion that is curved with respect to the fourth extending portion;
a third plug provided on the third curved portion, or provided on a third non-opposite portion that is included in the third extending portion and is not opposite to the fourth extending portion in the second direction; and
a fourth plug provided on the fourth curved portion, or provided on a fourth non-opposite portion that is included in the fourth extending portion and is not opposite to the third extending portion in the second direction,
wherein the fourth non-opposite portion is located in the second direction of the first non-opposite portion.
5. The device of claim 1 , further comprising:
a third interconnection including a third extending portion that extends in the first direction and is adjacent to the first extending portion in the second direction, and a third curved portion that is curved with respect to the third extending portion;
a fourth interconnection including a fourth extending portion that extends in the first direction and is adjacent to the second extending portion in the second direction, and a fourth curved portion that is curved with respect to the fourth extending portion;
a third plug provided on the third curved portion; and
a fourth plug provided on the fourth curved portion.
6. The device of claim 5 , wherein
the third curved portion is curved on the fourth extending portion side with respect to the third extending portion, and
the fourth curved portion is curved on the third extending portion side with respect to the fourth extending portion.
7. The device of claim 5 , wherein
a radius of curvature of the third curved portion is greater than a radius of curvature of the first curved portion, and
a radius of curvature of the fourth curved portion is greater than a radius of curvature of the second curved portion.
8. The device of claim 5 , wherein
the first plug is provided on the first non-opposite portion and the third non-opposite portion, and
the second plug is provided on the second non-opposite portion and the fourth non-opposite portion.