Imaging device, manufacturing device, and manufacturing method

1. An imaging device, comprising:

an organic photoelectric conversion film;

an upper electrode in an upper portion of the organic photoelectric conversion film; and

a lower electrode in a lower portion of the organic photoelectric conversion film, wherein

the lower electrode comprises a metal oxide layer, and the metal oxide layer is disposed between the organic photoelectric conversion film and the lower electrode,

the upper electrode comprises an oxide semiconductor, a metal oxide and a metal thin film,

the oxide semiconductor, the metal oxide and the metal thin film are stacked, and

the metal oxide is an oxidized portion of the metal thin film.

2. The imaging device according to claim 1 , wherein the metal oxide is aluminum oxide (AlO), and the metal thin film includes aluminum (Al).

3. The imaging device according to claim 1 , wherein the metal thin film includes one of aluminum (Al), indium (In), silver (Ag), gold (Au), zinc (Zn), lithium (Li), tin (Sn), antimony (Sb), magnesium (Mg), cadmium (Cd), calcium (Ca), potassium (K), rubidium (Rb), cesium (Cs), strontium (Sr), barium (Ba), cerium (Ce), yttrium (Y), hafnium (Hf), nickel (Ni), gallium (Ga), or titanium (Ti).

4. The imaging device according to claim 1 , wherein each of the upper electrode and the lower electrode includes one of ITO, tin oxide-based SnO2, aluminum zinc oxide, gallium zinc oxide, indium zinc oxide, IGZO, CuI, InSbO4, ZnMgO, CuInO2, MgIn2O4, CdO, or ZnSnO3.

5. The imaging device according to claim 1 , wherein the organic photoelectric conversion film includes one of a quinacridone derivative, a naphthalene derivative, an anthracene derivative, a phenanthrene derivative, a tetracene derivative, a pyrene derivative, a perylene derivative, or a fluoranthene derivative.

6. The imaging device according to claim 1 , wherein the organic photoelectric conversion film includes one of a polymer, a metal complex dye, a cyanine dye, a merocyanine dye, a phenylxanthene dye, a triphenylmethane dye, a rhodacyanine dye, a xanthene dye, a macrocyclic azaannulene dye, an azulene dye, naphthoquinone, an anthraquinone dye, a condensed polycyclic aromatic compound, a chain compound, a heterocyclic ring compound, or a first dye, the polymer is one of phenylene vinylene, fluorene, carbazole, indole, pyrene, pyrrole, picoline, thiophene, acetylene, or diacetylene, the metal complex dye is one of a dithiol metal complex dye, a metal phthalocyanine dye, a metal porphyrin dye, or a ruthenium complex dye, the condensed polycyclic aromatic compound is one of anthracene or pyrene, the chain compound is one of a condensed aromatic ring or a condensed heterocyclic compound, the heterocyclic ring compound is one of quinoline, benzothiazole, or benzoxazole, and the first dye is bonded by one of a squarylium group or a croconic methine group.

7. The imaging device according to claim 1 , wherein the metal thin film has a thickness of one of equal to 5 nm or less than 5 nm.

8. The imaging device described in claim 1 , wherein

the metal thin film is of one of a spherical shape, and

the metal thin film is scattered between the organic photoelectric conversion film and the upper electrode at one of equal intervals or at random intervals.

9. The imaging device according to claim 1 , further comprising a hole blocking layer between the metal thin film and the organic photoelectric conversion film.

10. The imaging device according to claim 1 , further comprising an enthalpy control layer along with the metal thin film.

11. The imaging device according to claim 10 , wherein the enthalpy control layer is between the organic photoelectric conversion film and the lower electrode.

12. The imaging device according to claim 10 , wherein the enthalpy control layer includes one of Ag2O, CoO, Co3O4, CdO, Cs2O, CuO, Cu2O, GeO(c), GeO2(c1), GeO2(c2), NiO(c), PbO(c), PbO2(c2), PbO2(c), PdO(c), Rb2O(c), Rb2O2(c), SeO2(c), SeO3(c), TeO2(c), Tl2O(c), or Tl2O3(c).