IP Library Granted Patent US 11,349,039
Granted Patent B2
US 11,349,039 · App. 16/130,157 · Granted May 31, 2022

Axially-integrated epitaxially-grown tandem wire arrays

Inventors: Nathan S. Lewis (La Canada Flintridge, CA); Shu Hu (Pasadena, CA)
Assignee: California Institute of Technology
H01L31/035236C01B13/0207C25B1/55C25B9/19H01L31/03529H01L31/035281H01L31/0687H01L31/078H01L31/1804H01L31/1892Y02E10/544Y02E10/547Y02P70/50
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Quick Facts
Patent No.
US 11,349,039
App. No.
16/130,157
Granted
May 31, 2022
Kind
B2
Abstract

A photoelectrode, methods of making and using, including systems for water-splitting are provided. The photoelectrode can be a semiconducting material having a photocatalyst such as nickel or nickel-molybdenum coated on the material. The photoelectrode includes an elongated axially integrated wire having at least two different wire compositions.

Claims (18)

1. A method of making a nano- or micro-wire, comprising:

(a) fabricating a first junction structure on an Si substrate comprising

(i) forming a templated oxide layer on the Si substrate, wherein the templated oxide layer comprises an opening therein for the formation of the first junction structure; and

(ii) growing the first junction structure on the substrate, wherein the growth of the first junction structure is supported by a catalyst deposited in the opening in the templated oxide layer;

(b) encapsulating the fabricated first junction structure in a passivation layer;

(c) etching the passivation layer at an end of the first junction structure, to remove the catalyst and an end portion of the first junction structure such that a hollow tube of the passivation layer extends above the first junction structure;

(d) depositing an ohmic contact layer on the first junction structure in the hollow tube; and

(e) growing a second junction structure on the ohmic contact layer in the hollow tube to form the nano- or micro-wire comprising an axially integrated junction.

2. The method of claim 1 , wherein the passivation layer comprises SiO 2 , Si 3 N 4 , SiO x N y or amorphous Si and wherein the encapsulating of (b) comprises depositing the passivation layer on the first junction structure.

3. The method of claim 1 , wherein the second junction structure is grown by a metal-organic chemical vapor deposition (MOCVD) system or a molecular beam epitaxy (MBE) system.

4. The method of claim 1 , wherein the ohmic contact layer comprises a semiconducting material.

5. The method of claim 4 , wherein the semiconducting material comprises a material selected from the group consisting of GaAs, GaP, GaAs x P 1-x , Al x Ga 1-x , As, Al x Ga 1-x As y P 1-y , In x Ga 1-x As, In x Ga 1-x P, In x Ga 1-x As y P 1-y , As y P 1-y , Al x In 1-x As y P 1-y , Al x Ga 1-x As y N z P 1-y-z , Zn 3 P 2 , Zn 3 S 2 , and ZnP x S 1-x (0≤x≤1, 0≤y≤1, 0≤z≤1, 0≤y+z≤1).

6. The method of claim 5 , wherein the second junction structure comprise GaAs y P 1-y (0≤y≤1).

7. The method of claim 4 , wherein the ohmic contact layer comprises a tunnel junction or a tunnel junction and a graded composition segment.

8. The method of claim 1 , further comprising substantially embedding the nano- or micro-wire in a wax, glass or polymer.

9. The method of claim 8 , wherein the embedded nano- or micro-wire is mechanically removed from the Si substrate.

10. The method of claim 9 , further comprising applying a hydrogen evolving and/or oxygen evolving catalyst to the nano- or micro-wire.

11. The method according to claim 10 , wherein the hydrogen evolving and/or oxygen evolving catalyst is selected from the group consisting of Pt, Co, Cu, Fe, MoS x where x is nominally 2, or a sub or super-stoichiometric, Ni, CoMo, CoW, FeMo, NiCo, NiFe, NiFeC, NiFeS, NiMnS, NiMo, NiMoP, NiSn, NiW, NiZn, NiZnP, CoNiFe, NiCoPMo, NiMoCo, NiMoCu, NiMoFe, NiMoW, NiSiMo, NiSiW, NiWPCu, IrO x where x is nominally 2, or sub or super-stoichiometric, Pt, Co, Co/(PO 4 ) 3− , Co/(BO 3 ) 3− , CoP, Cu, Fe, Mn, Ni, Ni/(BO 3 ) 3− , NiP, Pb, CoFe, CoPSc 2 O 3 , FeMn, NiCo, NiCr, NiCu, NiFe, NiLa, NiLa, NiPSc 2 O 3 , NiSn, NiZn and NiMoFe.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 26, 2022
From: HU, SHU; LEWIS, NATHAN S.
To: CALIFORNIA INSTITUTE OF TECHNOLOGY
Reel/Frame 059728/0289 →
CONFIRMATORY LICENSE Recorded Mar 26, 2019
From: CALIFORNIA INSTITUTE OF TECHNOLOGY
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 048704/0424 →
Continuity (3)
Division 13771617 · Feb 20, 2013
Provisional Application 61601430 · Feb 21, 2012
Related Publication 20190013426A1 · Jan 10, 2019