IP Library › Patent Application 16131822
Patent Application
App. No. 16/131,822

MOVEABLE EDGE RING DESIGN

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Quick Facts
Patent No.
US None
App. No.
16/131,822
Abstract

An edge ring is configured to be raised and lowered relative to a pedestal, via one or more lift pins, in a processing chamber of a substrate processing system. The edge ring includes an upper surface, an annular inner diameter, an annular outer diameter, a lower surface, and at least one feature arranged in the lower surface of the edge ring. At least one inner surface of the at least one feature is sloped.

Claims (18)

1 . An edge ring configured to be raised and lowered relative to a pedestal, via one or more lift pins, in a processing chamber of a substrate processing system, the edge ring comprising:

an upper surface;

an annular inner diameter;

an annular outer diameter;

a lower surface; and

at least one feature arranged in the lower surface of the edge ring, wherein at least one inner surface of the at least one feature is sloped.

2 . The edge ring of claim 1 , wherein at least two inner surfaces of the at least one feature are sloped.

3 . The edge ring of claim 1 , wherein the at least one feature is triangular in at least one cross-sectional view.

4 . The edge ring of claim 1 , wherein the annular inner diameter of the edge ring is configured to overlap an upper plate of the pedestal.

5 . The edge ring of claim 4 , wherein the at least one feature is arranged in a portion of the lower surface of the edge ring overlapping the upper plate of the pedestal.

6 . The edge ring of claim 1 , wherein the lower surface of the edge ring is arranged to receive the one or more lift pins.

7 . The edge ring of claim 1 , wherein the at least one feature comprises a plurality of features each having at least one inner surface that is sloped.

8 . The edge ring of claim 7 , wherein the plurality of features are circumferentially arranged in a spaced relationship around the lower surface of the edge ring.

9 . The edge ring of claim 8 , wherein the plurality of features is arranged to align the edge ring relative to the one or more lift pins.

10 . The edge ring of claim 8 , wherein the plurality of features is arranged to self-center the edge ring relative to the pedestal.

11 . The edge ring of claim 1 , wherein the at least one feature corresponds to a groove.

12 . A pedestal comprising the edge ring of claim 1 .

13 . A system comprising the pedestal of claim 12 and further comprising an actuator configured to raise and lower the one or more lift pins to raise and lower the edge ring.