Substrate processing apparatus and temperature measurement unit
There is provided a technique capable of easily improving accuracy of temperature measurement of a substrate, regardless of a film formation state of the substrate. There is provided a substrate processing apparatus including a substrate mounting table having a mounting surface on which a substrate is mounted, a heater configured to heat the substrate mounted on the mounting surface, and an elastically deformable temperature sensor whose leading end portion constitutes a temperature detection part. The temperature sensor is configured to extend from below the mounting surface to above the mounting surface, and the leading end portion protrudes from the mounting surface.
1. A substrate processing apparatus, comprising:
a substrate mounting table having a mounting surface on which a substrate is mounted;
a heater configured to heat the substrate mounted on the mounting surface;
an elastically deformable temperature sensor whose leading end portion constitutes a temperature detection part; and
a substrate transfer mechanism including an arm configured to hold the substrate, the substrate transfer mechanism configured to transfer the substrate held by the arm onto the mounting surface,
wherein the temperature sensor is configured to extend from below the mounting surface to above the mounting surface, and the leading end portion protrudes from the mounting surface,
wherein the substrate mounting table includes a recess or a notch portion configured to accommodate at least a portion of the arm, and
wherein the temperature sensor is installed such that the temperature sensor extends from the inside of the recess or the notch portion to above the mounting surface, and the leading end portion protrudes from the mounting surface.
2. The apparatus of claim 1 , wherein when the substrate is mounted on the mounting surface, the temperature sensor is configured to be elastically deformed such that the leading end portion makes contact with a rear surface of the substrate and a portion protruding from the mounting surface is accommodated below the mounting surface.
3. The apparatus of claim 2 , wherein when the substrate is mounted on the mounting surface, the temperature sensor is configured to be elastically deformed only by a weight of the substrate itself such that the portion protruding from the mounting surface is accommodated below the mounting surface.
4. The apparatus of claim 2 , wherein the temperature sensor is configured with a sheath thermocouple.
5. The apparatus of claim 4 , wherein when the substrate is mounted on the mounting surface, the temperature sensor is configured such that the sheath thermocouple itself is elastically deformed.
6. The apparatus of claim 1 , wherein the temperature sensor is configured with a sheath thermocouple.
7. The apparatus of claim 6 , wherein the temperature sensor is configured such that the sheath thermocouple itself is elastically deformed.
8. The apparatus of claim 6 , wherein a diameter of the sheath thermocouple is 0.5 mm or less.
9. The apparatus of claim 6 , wherein a portion of the sheath thermocouple protruding from the mounting surface is installed to be inclined with respect to the mounting surface.
10. The apparatus of claim 1 , wherein the temperature detection part of the temperature sensor is installed to protrude from the inside of one of a recess, a notch portion, and a through hole, which are formed in the substrate mounting table, to above the mounting surface,
wherein an installation member configured such that the temperature sensor is fixed to the installation member is installed in the inside of one of the recess, the notch portion, and the through hole, and
wherein the installation member includes a protrusion-shape support portion, and the installation member is configured to be fixed to the substrate mounting table via the support portion.
11. The apparatus of claim 10 , wherein the heater is installed in the substrate mounting table.
12. A temperature measurement unit installed in a substrate mounting table having a mounting surface on which a substrate is mounted so that a substrate transfer mechanism includes an arm configured to hold the substrate to transfer the substrate held by the arm onto the mounting surface,
wherein the temperature measurement unit comprises:
an elastically deformable temperature sensor whose leading end portion constitutes a temperature detection part,
wherein the temperature sensor is configured to extend from below the mounting surface to above the mounting surface, and the leading end portion protrudes from the mounting surface,
wherein the substrate mounting table includes a recess or a notch portion configured to accommodate at least a portion of the arm, and
wherein the temperature sensor is installed such that the temperature sensor extends from the inside of the recess or the notch portion to above the mounting surface, and the leading end portion protrudes from the mounting surface.
13. The temperature measurement unit of claim 12 , wherein the temperature sensor is configured with a sheath thermocouple.