Die seal ring and manufacturing method thereof
A die seal ring and a manufacturing method thereof are provided. The die seal ring includes a substrate, a dielectric layer, and conductive layers. The dielectric layer is disposed on the substrate. The conductive layers are stacked on the substrate and located in the dielectric layer. Each of the conductive layers includes a first conductive portion and a second conductive portion. The second conductive portion is disposed on the first conductive portion. A width of the first conductive portion is smaller than a width of the second conductive portion. A first air gap is disposed between a sidewall of the first conductive portion and the dielectric layer. A second air gap is disposed between a sidewall of the second conductive portion and the dielectric layer. The die seal ring and the manufacturing method thereof can effectively prevent cracks generated during the die sawing process from damaging the circuit structure.
1. A die seal ring, comprising: a substrate; a dielectric layer disposed on the substrate; conductive layers stacked on the substrate and located in the dielectric layer, wherein each of the conductive layers comprises: a first conductive portion; and a second conductive portion disposed on the first conductive portion, wherein a width of the first conductive portion is smaller than a width of the second conductive portion, wherein a first air gap is disposed between a sidewall of the first conductive portion and the dielectric layer, and a second air gap is disposed between a sidewall of the second conductive portion and the dielectric layer; and a first strengthening layer disposed between the first air gap and the dielectric layer and between the second air gap and the dielectric layer, wherein the first air gap is located between the first strengthening layer and the first conductive portion, the second air gap is located between the first strengthening layer and the second conductive portion, and a portion of the first strengthening layer is directly below a bottom surface of the first conductive portion, wherein a material of the first strengthening layer comprises aluminum nitride, titanium nitride, or tantalum nitride.
2. The die seal ring according to claim 1 , wherein the first air gap and the second air gap are not connected to each other.
3. The die seal ring according to claim 1 , wherein the dielectric layer comprises a multilayer structure.
4. The die seal ring according to claim 1 , wherein a material of the dielectric layer comprises a low dielectric constant (low-k) material, silicon oxide, silicon nitride, or a combination thereof.
5. The die seal ring according to claim 4 , wherein the low-k material comprises fluorosilicate glass, Black Diamond, or methyl silsesquioxane.
6. The die seal ring according to claim 1 , wherein the first conductive portion and the second conductive portion in each of the conductive layers are integrally formed.
7. The die seal ring according to claim 1 , further comprising:
a second strengthening layer disposed between the first air gap and the first conductive portion and between the second air gap and the second conductive portion.
8. The die seal ring according to claim 7 , wherein a material of the second strengthening layer comprises aluminum nitride, titanium nitride, or tantalum nitride.
9. A die seal ring, comprising: a substrate; a dielectric layer disposed on the substrate; conductive layers stacked on the substrate and located in the dielectric layer, wherein each of the conductive layers comprises: a first conductive portion; and a second conductive portion disposed on the first conductive portion, wherein a width of the first conductive portion is smaller than a width of the second conductive portion, wherein a first air gap is disposed between a sidewall of the first conductive portion and the dielectric layer, and a second air gap is disposed between a sidewall of the second conductive portion and the dielectric layer; and a first strengthening layer disposed between the first air gap and the dielectric layer and between the second air gap and the dielectric layer, wherein the first air gap is located between the first strengthening layer and the first conductive portion, the second air gap is located between the first strengthening layer and the second conductive portion, and the first strengthening layer is a continuous structure extending from one side of the first air gap to one side of the second air gap, wherein a material of the first strengthening layer comprises aluminum nitride, titanium nitride, or tantalum nitride.