Solid-state imaging device, method of manufacturing the same, and electronic apparatus
A solid state imaging device that includes a substrate having oppositely facing first and second surfaces and a photoelectric conversion unit layer having a light incident side facing away from the substrate. The substrate includes a first photoelectric conversion unit and a second photoelectric conversion and the photoelectric conversion layer includes a third photoelectric conversion unit.
1. A solid-state imaging device comprising:
a silicon substrate having a light incident side and a second side opposite to the light incident side;
a first photodiode in the silicon substrate;
a first gate electrode and a second gate electrode in contact with the silicon substrate from the second side, wherein the first photodiode is disposed adjacent to where the first gate electrode contacts the silicon substrate;
an organic photoelectric conversion unit above the light incident side of the silicon substrate;
a first floating diffusion in the silicon substrate, the first floating diffusion being disposed adjacent to where the first gate electrode contacts the silicon substrate, wherein the first gate electrode is configured to transmit a charge in the first photodiode to the first floating diffusion; and
a second floating diffusion in the silicon substrate, the second floating diffusion being disposed adjacent to where the second gate electrode contacts in the silicon substrate.
2. The solid-state imaging device according to claim 1 , wherein the organic photoelectric conversion unit has a lower electrode, an organic photoelectric conversion layer, and an upper electrode in order from the light incident side of the silicon substrate.
3. The solid-state imaging device according to claim 1 , further comprising a second photodiode in the silicon substrate, wherein the second photodiode is disposed above the first photodiode.
4. The solid-state imaging device according to claim 3 , wherein the first photodiode is for a red color and the second photodiode is for a blue color.
5. The solid-state imaging device according to claim 3 , further comprising a semiconductor region having a p-type conductivity between the first photodiode and an insulating layer on the light incident side of the silicon substrate.
6. The solid-state imaging device according to claim 3 , wherein the first photodiode is for a blue color and the second photodiode is for a red color.
7. The solid-state imaging device according to claim 1 , further comprising an insulating layer disposed between the silicon substrate and the first gate electrode.
8. The solid-state imaging device according to claim 2 , further comprising a conductive plug disposed through the silicon substrate, wherein the conductive plug is connected to the lower electrode.
9. The solid-state imaging device according to claim 1 , further comprising a multi-layer wiring layer below the second side of the silicon substrate.
10. An electronic apparatus comprising:
an optical system;
a driving circuit;
a signal processing circuit; and
a solid-state imaging device, comprising:
a silicon substrate having a light incident side and a second side opposite to the light incident side;
a first photodiode in the silicon substrate;
a first gate electrode and a second gate electrode in contact with the silicon substrate from the second side, wherein the first photodiode is disposed adjacent to where the first gate electrode contacts the silicon substrate;
an organic photoelectric conversion unit above the light incident side of the silicon substrate;
a first floating diffusion in the silicon substrate, the first floating diffusion being disposed adjacent to where the first gate electrode contacts the silicon substrate, wherein the first gate electrode is configured to transmit a charge in the first photodiode to the first floating diffusion; and
a second floating diffusion in the silicon substrate, the second floating diffusion being disposed adjacent to where the second gate electrode contacts the silicon substrate.
11. The solid-state imaging device according to claim 1 , wherein the first gate electrode and the second gate electrode are disposed between the first floating diffusion and the second floating diffusion.
12. The electronic apparatus according to claim 10 , wherein the first gate electrode and the second gate electrode are disposed between the first floating diffusion and the second floating diffusion.
13. The electronic apparatus according to claim 10 , wherein the organic photoelectric conversion unit has a lower electrode, an organic photoelectric conversion layer, and an upper electrode in order from the light incident side of the silicon substrate.
14. The electronic apparatus according to claim 10 , further comprising a second photodiode in the silicon substrate, wherein the second photodiode is disposed above the first photodiode.
15. The electronic apparatus according to claim 14 , wherein the first photodiode is for a red color and the second photodiode is for a blue color.
16. The electronic apparatus according to claim 14 , wherein the first photodiode is for a blue color and the second photodiode is for a red color.
17. The electronic apparatus according to claim 10 , further comprising:
an insulating layer disposed between the silicon substrate and the first gate electrode.
18. The electronic apparatus according to claim 13 , further comprising:
a conductive plug disposed through the silicon substrate, wherein the conductive plug is connected to the lower electrode.
19. The electronic apparatus according to claim 10 , further comprising:
a multi-layer wiring layer below the second side of the silicon substrate.