IP Library Granted Patent US 10,916,497
Granted Patent B2
US 10,916,497 · App. 16/144,615 · Granted Feb 9, 2021

Apparatuses and methods for protecting transistor in a memory circuit

Inventors: Takashi Ishihara (Machida, JP); Wataru Nobehara (Sagamihara, JP)
Assignee: Micron Technology, Inc.
H01L23/5222H01L24/09H01L27/0266H01L27/0292H01L27/105H01L2224/02331
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Quick Facts
Patent No.
US 10,916,497
App. No.
16/144,615
Granted
Feb 9, 2021
Kind
B2
Abstract

A semiconductor device may include a multi-level wiring structure comprising a first-level wiring layer, a second-level wiring layer and an insulating layer between the first-level wiring layer and the second-level wiring layer. The device may also include a bond pad, a first wiring extending from the bond pad, and a second wiring overlapping at least in part with the first wiring through the insulating layer to be capacitively coupled to the first wiring. The first wiring and the second wiring may each be formed respectively as the first-level wiring layer and the second-level wiring layer. The device may also include a protection circuit configured to be DC coupled to the second wiring. The first-level wiring layer may include a redistribution layer (RDL).

Claims (58)

1. A device comprising:

a multi-level wiring structure comprising a first-level wiring layer, a second-level wiring layer below the first-level wiring layer, an additional first-level wiring layer on the same level as the first-level wiring layer, and an insulating film between the first-level wiring layer and the second-level wiring layer;

a bonding pad;

a first wiring formed as the first-level wiring layer, the first wiring extending from the bonding pad, wherein the bonding pad is formed as the additional first-level wiring layer;

a second wiring formed as the second-level wiring layer, the second wiring overlapping, at least in part, with the first wiring through the insulating film to be capacitively coupled to the first wiring;

a circuit including a transistor including a gate coupled to the second wiring and further including a gate insulating layer disposed between the gate and a substrate; and

a protection element configured to be DC coupled to the second wiring.

2. The device of claim 1 , further comprising an additional protection element located in a center region of the device, the additional protection element configured to be DC coupled to the first wiring;

wherein the bonding pad is located in an edge region of the device and the first wiring is connected between the bonding pad and the additional protection element; and

wherein the second wiring is capacitively coupled to the first wiring in an intermediate region between the center region and the edge region of the device.

3. The device of claim 1 , wherein the circuit comprises a driver circuit having an output node coupled to the second wiring and further comprises a receiver circuit having an input node coupled to the second wiring;

Wherein the protection element is located at a side of the receiver circuit.

4. The device of claim 1 , wherein the circuit comprises a driver circuit coupled to a first end of the second wiring;

wherein the protection element is coupled to a second end of the second wiring.

5. A device comprising:

a multi-level wiring structure comprising a first-level wiring layer, a second-level wiring layer below the first-level wiring layer, and an insulating film between the first-level wiring layer and the second-level wiring layer;

a bonding pad;

a first wiring formed as the first-level wiring layer, the first wiring extending from the bonding pad;

a second wiring formed as the second-level wiring layer, the second wiring overlapping, at least in part, with the first wiring through the insulating film to be capacitively coupled to the first wiring, wherein the second wiring elongates in a memory cell array region between first and second peripheral regions;

a driver circuit arranged in the first peripheral region and having an output node coupled to the second wiring;

a receiver circuit arranged in the second peripheral region and having an input node coupled to the second wiring; and

a protection element located in the second peripheral region and at a side of the receiver circuit and configured to be DC coupled to the second wiring.

6. A device comprising:

a multi-level wiring structure comprising a first-level wiring layer, a second-level wiring layer below the first-level wiring layer, and an insulating film between the first-level wiring layer and the second-level wiring layer;

a bonding pad;

a first wiring formed as the first-level wiring layer, the first wiring extending from the bonding pad;

a second wiring formed as the second-level wiring layer, the second wiring overlapping, at least in part, with the first wiring through the insulating film to be capacitively coupled to the first wiring;

a protection element configured to be DC coupled to the second wiring;

a first driver circuit arranged in a first peripheral region, the first driver circuit comprising an output node coupled to the second wiring;

a first receiver circuit arranged in a second peripheral region, the first receiver circuit comprising an input node coupled to the second wiring;

a second driver circuit arranged in the second peripheral region, the second driver circuit comprising an output node coupled to the second wiring;

a second receiver circuit arranged in the first peripheral region, the second receiver circuit comprising an input node coupled to the second wiring; and

an additional protection element configured to be DC coupled to the second wiring, the additional protection element being located in the first peripheral region;

wherein the second wiring elongates in a memory array region between the first and second peripheral regions; and

wherein the protection element is located in the second peripheral region.

7. A device comprising:

a redistribution layer (RDL) coupled to one or more bond pads;

a first circuit having an input node;

a signal line extending from a first area of the device to a second area of the device that is different from the first area, the signal line is further capacitively coupled to the RDL, and also coupled to the input node of the first circuit in the first area; and

a protection circuit disposed in the first area and coupled to the input node of the first circuit, wherein the protection circuit is configured to discharge noise capacitively coupled onto the signal line from the RDL layer.

8. The device of claim 7 , wherein the first area and the second area each includes one of a memory cell and sense amplifier area, an array region and a peripheral area.

9. The device of claim 7 , wherein the signal line may include a control line, an address line, a data bus and/or a combination thereof.

10. The device of claim 7 , wherein the first circuit includes a receiver buffer circuit and the input node of the first circuit includes a transistor gate.

11. The device of claim 10 , wherein the protection circuit includes a first transistor and a second transistor connected coupled at a common source/drain, wherein the common source/drain is coupled to the input node of the buffer circuit.

12. The device of claim 7 , wherein the first circuit includes a driver buffer circuit comprising an input node and a receiver buffer circuit comprising an output node, the driver buffer circuit and the receiver buffer circuit are coupled in parallel, wherein an input node of the receiver buffer circuit and an output node of the driver buffer circuit are coupled together and are further coupled to the signal line.

13. The device of claim 12 , wherein the protection circuit is coupled to the input node of the receiver buffer circuit.

14. The device of claim 13 further comprising an additional protection circuit coupled to the output node of the driver buffer circuit.

15. The device of claim 7 further comprising a second circuit coupled to the signal line at the second area of the device, and an additional protection circuit coupled to the second circuit, wherein the additional protection circuit is configured to discharge noise capacitively coupled onto the signal line from the RDL layer.

16. The device of claim 15 , wherein:

the first circuit includes a driver buffer circuit comprising an input node and a receiver buffer circuit comprising an output node, the driver buffer circuit and the receiver buffer circuit of the first circuit are coupled in parallel so that an input node of the receiver buffer circuit and an output node of the driver buffer circuit are coupled together and are further coupled to the signal line; and

the second circuit includes a driver buffer circuit comprising an input node and a receiver buffer circuit comprising an output node, the driver buffer circuit and the receiver buffer circuit of the second circuit are coupled in parallel so that an input node of the receiver buffer circuit and an output node of the driver buffer circuit are coupled together and are further coupled to the signal line.

17. The device of claim 16 , wherein:

the protection circuit is coupled to the input node of the receiver buffer circuit of the first circuit; and

the additional protection circuit is coupled to the input node of the receiver buffer of the second circuit.

18. The device of claim 17 further comprising:

a third protection circuit coupled to the output node of the driver buffer circuit of the first circuit, wherein the third protection circuit is configured to discharge noise capacitively coupled onto the signal line from the RIM, layer; and

a fourth protection circuit coupled to the output node of the driver buffer circuit of the second circuit, wherein the fourth protection circuit is configured to discharge noise capacitively coupled onto the signal line from the RDL layer.

19. The device of claim 7 further comprising an additional protection circuit coupled to a terminal of the signal line in the second area, wherein the additional protection circuit is configured to discharge noise capacitively coupled onto the signal line from the RDL layer.

Assignments (5)
RELEASE OF SECURITY INTEREST Recorded Nov 15, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051041/0317 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050724/0392 →
SUPPLEMENT NO. 12 TO PATENT SECURITY AGREEMENT Recorded Apr 19, 2019
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048948/0677 →
SUPPLEMENT NO. 3 TO PATENT SECURITY AGREEMENT Recorded Apr 19, 2019
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 048951/0902 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 27, 2018
From: ISHIHARA, TAKASHI; NOBEHARA, WATARU
To: MICRON TECHNOLOGY, INC.
Reel/Frame 046998/0385 →