METHOD OF MANUFACTURING A SEMICONDUCTOR DEVICE

A technique is described that provides efficient production management of a substrate processing system that includes a substrate processing apparatus and a mobile terminal. The substrate processing apparatus includes: at least one reactor where a substrate is processed; a transfer chamber adjacent to at least one reactor; a detector that detects a state of at least one reactor, a state of the transfer chamber, and generates monitored apparatus information representing the state of at least one reactor, and the state of the transfer chamber. A mobile terminal is authenticated based on information transmitted from the mobile terminal; a first transceiver transmits apparatus information that contains an apparatus management number and monitored apparatus information to the mobile terminal, and wherein the mobile terminal includes: a second transceiver that receives the apparatus information transmitted from the first transceiver; and a display device that displays the apparatus information received by the second transceiver.