Two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer
A two-dimensional photonic crystal laser with transparent conductive cladding layer is provided. The two-dimensional photonic crystal region through the etching process is composed by multiple periodic air-holes with proper duty cycle. Then, the transparent conductive oxide layer is directly deposited on the top of the entire two-dimensional photonic crystal structure to cover the entire two-dimensional photonic crystal structure in order to form a current spreading layer. The configuration and the process condition of transparent conductive oxide layer are optimized to provide uniform current spreading path and the transparency. In addition to simplifying the whole fabrication process, the optical confinement is improved and the maximum gain to optical feedback is obtained. Overall, low threshold, small divergence angle and high quality laser output is achieved to satisfy the requirements for next-generation light sources.
1. A two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer, comprise
a substrate;
a N-type graded-refractive layer disposed on the substrate;
a N-type cladding layer disposed on the N-type graded-refractive layer;
a N-type optical confinement layer disposed on the N-type cladding layer;
an emission layer disposed on the N-type optical confinement layer;
a P-type optical confinement layer disposed on the emission layer;
a photonic crystal region disposed on the P-type optical confinement layer, and comprising a P-type injection layer, and a plurality of periodic holes formed in the P-type injection layer and arranged in interval and there is an area duty ratio between each of the periodic hole;
a current confinement structure surrounding the photonic crystal region; and
a transparent conductive layer disposed on the current confinement structure and covering the photonic crystal region.
2. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein the photonic crystal region is a two-dimensional periodic structure.
3. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein the P-type injection layer comprises a P-type cladding layer, a P-type graded-refractive layer and a P-type heavily-doped capping layer, and the P-type cladding layer is disposed on the P-type optical confinement layer, the P-type graded-refractive layer is disposed on the P-type cladding layer, the P-type heavily-doped capping layer is disposed on the P-type graded-refractive layer.
4. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein a width of each of the periodic hole and a duty cycle of the area duty ratio is in a range from 100 nm to 1000 nm.
5. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein a cross-sectional shape of each of the plurality of periodic holes is a circular shape, a quadrangular shape or a hexagonal shape.
6. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein the emission layer is a multiple-quantum-well structure.
7. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , further comprising a P-type metal electrode and a back electrode, wherein the P-type metal electrode is disposed to surround the photonic crystal region, and deposited on the transparent conductive layer, and the back electrode is disposed under the substrate.
8. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein a size of the current confinement structure is in a range from 1 μm to 1000 μm.
9. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein material of the current confinement structure is insulation material.
10. The two-dimensional photonic crystal surface-emitting laser with transparent conductive cladding layer according to claim 1 , wherein material of the transparent conductive layer comprises ITO, ZnO, AlGaInSnO, AZO, SnO 2 , In 2 O 3 , SnZnO, or graphene.