IP Library Granted Patent US 48,287
Granted Patent E1
US 48,287 · App. 16/150,286 · Granted Oct 27, 2020

Method for forming an optical fiber array

Inventors: Guido De Boer (Leerdam, NL); Ralph Van Melle (Hellevoetsluis, NL); Teunis Van De Peut (Leusden, NL); Henk Derks (Waalre, NL); Frederik Matthias Spiegelhalder (The Hague, NL); Roy Josephus Stephanus Derks (Overloon, NL); Edwin Johannes Theodorus Smulders (Nuenen, NL)
Assignee: ASML Netherlands B.V.
G02B6/3652B32B37/1284B32B37/1292B32B37/142B32B38/0012B82Y10/00B82Y40/00G02B6/3612H01J37/3177B32B2551/00H01J2237/0435H01J2237/2482Y10T156/1002
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Quick Facts
Patent No.
US 48,287
App. No.
16/150,286
Granted
Oct 27, 2020
Kind
E1
Abstract

A method for forming an optical fiber array. A substrate having a first surface and an opposing second surface is provided. The substrate is provided with a plurality of apertures extending through the substrate from the first surface to the second surface. In addition, a plurality of fibers are provided. The fibers have fiber ends with a diameter smaller than the smallest diameter of the apertures. A first fiber is inserted in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted first fiber is bent in a predetermined direction such that the fiber abuts a side wall of the first aperture at a predetermined position. After the first fiber is bent, a second fiber is inserted in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end is positioned in close proximity of the second surface. The inserted second fiber is bent in conformity with a shape of the first fiber, such that the fiber abuts a side wall of the second aperture at a predetermined position. The bent fibers are bonded together using an adhesive material.

Claims (30)

1. A method for forming an optical fiber array, the method comprising:

providing a substrate having a first surface and an opposing second surface, the substrate being provided with a plurality of apertures extending through the substrate from the first surface to the second surface;

providing a plurality of fibers, the fibers having fiber ends with a diameter smaller than the smallest diameter of the apertures;

inserting a first fiber in a first corresponding aperture, from the first surface side of the substrate, such that the fiber end of the first fiber is positioned in close proximity of the second surface;

bending the inserted first fiber in a predetermined direction such that the first fiber abuts a side wall of the first aperture at a predetermined position;

after the first fiber is bent, inserting a second fiber in a second corresponding aperture, from the first surface side of the substrate, such that the fiber end of the second fiber is positioned in close proximity of the second surface;

bending the inserted second fiber in conformity with a shape of the first fiber, such that the second fiber abuts a side wall of the second aperture at a predetermined position; and

bonding the bent fibers together using an adhesive material.

2. The method of claim 1 , wherein the plurality of fibers are bent in conformity with a shape of one another, and are stacked on one another, such that the fibers together form a unitary bonded structure, comprising a first end on the substrate and a second end in a remote area, wherein the unitary bounded structure has an elongated cross-section at the first end and at the second end.

3. The method of claim 1 , wherein the plurality of fibers are bent in the same direction, and are stacked on one another, such that the fibers together form a unitary bonded structure extending along a curve, wherein the unitary bonded structure has substantially uniform cross-sections on planes transverse to the curve, wherein the cross-sections have an elongated shape.

4. The method of claim 1 , further comprising: applying an adhesive material onto the first fiber, prior to completion of bending the second fiber.

5. The method of claim 1 , further comprising: fixating the second fiber for enabling curing of an adhesive material, upon positioning the second fiber in contact with the first fiber.

6. The method of claim 1 , further comprising:

providing a bending structure at the first surface side of the substrate, wherein bending the fiber in a predetermined direction comprises bending the fiber over the bending structure.

7. The method of claim 6 , wherein the bending structure is provided temporarily, and is removed after the plurality of fibers are bent.

8. The method of claim 6 , wherein the bending structure is bonded together with the fibers using an adhesive material.

9. The method of claim 6 , wherein the plurality of fibers are bent with a predetermined curvature in conformity with a shape of the bending structure.

10. The method of claim 1 , further comprising: applying a pre-load force onto a fiber prior to inserting the fiber into an aperture.

11. The method of claim 1 , wherein the plurality of fibers are bent in the same direction.

12. The method of claim 1 , wherein the bent fibers are stacked in a predefined spatial arrangement.

13. The method of claim 1 , wherein the method further comprises securing the fiber ends within the apertures.

14. The method of claim 13 , wherein securing the fiber ends is executed after insertion of the plurality of fibers in corresponding apertures in the substrate.

15. The method of claim 13 , wherein the fiber ends are secured by using an adhesive, the method further comprising, prior to inserting, applying an adhesive onto the fiber ends.

16. The method of claim 1 , wherein the apertures have a cross-sectional shape consisting of a circular portion and an additional portion in the form of a groove, and wherein the fibers are bent in such direction that the predetermined position at which the fibers abut the side wall of the apertures is within the additional portion.

17. The method of claim 1 , wherein bonding the bent fibers together comprises:

forming a mold around the plurality of bent fibers;

filling the mold with an adhesive material; and curing the adhesive material.

18. The method of claim 1 , further comprising: inserting and bending a plurality of other fibers,

wherein the first fiber and the other inserted and bent fibers together form a support for the second fiber, wherein bending the second fiber comprises bending the second fiber over the support formed by the first fiber and the other fibers.

19. The method of claim 18 , wherein the support for the second fiber is formed without a rigid supporting member between the first and the other fibers.

Assignments (3)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Sep 3, 2020
From: DE BOER, GUIDO; VAN MELLE, RALPH; VAN DE PEUT, TEUNIS; DERKS, HENK; SPIEGELHALDER, FREDERIK MATTHIAS; DERKS, ROY JOSEPHUS STEPHANUS; SMULDERS, EDWIN JOHANNES THEODORUS
To: MAPPER LITHOGRAPHY IP B.V.
Reel/Frame 053691/0390 →
COURT APPOINTMENT Recorded May 7, 2019
From: MAPPER LITHOGRAPHY HOLDING B.V.; MAPPER LITHOGRAPHY IP B.V.; MAPPER LITHOGRAPHY B.V.
To: WITTEKAMP, J.J.
Reel/Frame 049104/0734 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded May 7, 2019
From: WITTEKAMP, J.J.
To: ASML NETHERLANDS B.V.
Reel/Frame 049296/0606 →