IP Library Granted Patent US 10,310,060
Granted Patent B2
US 10,310,060 · App. 16/153,631 · Granted Jun 4, 2019

High-speed light sensing apparatus

Inventors: Yun-Chung Na (Zhubei, TW); Che-Fu Liang (Zhubei, TW)
Assignees: Artilux Corporation; Artilux Inc.
G01S7/4863G01S17/10G01S17/89H01L27/14609H01L27/14629H01L27/14643H01L29/161H01L31/1037
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Quick Facts
Patent No.
US 10,310,060
App. No.
16/153,631
Granted
Jun 4, 2019
Kind
B2
Abstract

An apparatus including a semiconductor substrate; an absorption layer coupled to the semiconductor substrate, the absorption layer including a photodiode region configured to absorb photons and to generate photo-carriers from the absorbed photons; one or more first switches controlled by a first control signal, the one or more first switches configured to collect at least a portion of the photo-carriers based on the first control signal; and one or more second switches controlled by a second control signal, the one or more second switches configured to collect at least a portion of the photo-carriers based on the second control signal, where the second control signal is different from the first control signal.

Claims (41)

1. A time-of-flight system, comprising:

a light source for generating photons; and

an image sensor comprising multiple pixels supported by a semiconductor substrate, wherein each pixel comprises:

an absorption layer supported by the semiconductor substrate having a different material composition from the absorption layer, the absorption layer comprising a photodetection region configured to absorb the photons and to generate photo-carriers in response to the absorbed photons;

one or more first switches each controlled by a first control signal, the one or more first switches each configured to collect at least a first portion of the photo-carriers based on the first control signal; and

one or more second switches each controlled by a second control signal, the one or more second switches each configured to collect at least a second portion of the photo-carriers based on the second control signal, wherein the second control signal is different from the first control signal, and wherein the first portion of the photo-carriers and the second portion of the photo-carriers are of a same type of carriers.

2. The time-of-flight system of claim 1 , wherein the absorption layer comprises a germanium-silicon layer.

3. The time-of-flight system of claim 1 , wherein the semiconductor substrate comprises a silicon substrate.

4. The time-of-flight system of claim 1 ,

wherein the light source is configured, during operation, to emit optical pulses having a duty cycle less than 50%,

wherein, during operation, the one or more first switches receive electrical pulses from the first control signal having a demodulation duty cycle that is the same as the duty cycle of the optical pulses, and

wherein, during operation, the one or more second switches receive electrical pulses from the second control signal having a demodulation duty cycle that is a reverse of the duty cycle of the optical pulses.

5. The time-of-flight system of claim 4 , wherein the light source is configured so that, during operation, an energy of each of the optical pulses is the same.

6. The time-of-flight system of claim 1 , wherein the photons generated by the light source have a wavelength at which the semiconductor substrate is transparent.

7. The time-of-flight system of claim 1 , wherein the photons generated by the light source have a wavelength at which the absorption layer has a substantial quantum efficiency and the semiconductor substrate allows no or partial absorption of the photons.

8. An optical apparatus comprising:

an absorption layer comprising a photodetection region configured to absorb photons and to generate photo-carriers in response to the absorbed photons;

one or more first switches each controlled by a first control signal, the one or more first switches each configured to collect at least a first portion of the photo-carriers based on the first control signal; and

one or more second switches each controlled by a second control signal, the one or more second switches each configured to collect at least a second portion of the photo-carriers based on the second control signal, wherein the second control signal is different from the first control signal, and wherein the first portion of the photo-carriers and the second portion of the photo-carriers are of a same type of carriers,

wherein the one or more first switches each comprise:

a first well region having a first polarity;

a first doped region having a second polarity opposite to the first polarity, at least a portion of the first doped region having the second polarity being formed in the first well region having the first polarity, and the first doped region having the second polarity being controlled by the first control signal; and

a second doped region having the first polarity coupled to a first readout integrated circuit; and

wherein the one or more second switches each comprise:

a second well region having the first polarity;

a third doped region having the second polarity, at least a portion of the third doped region being formed in the second well region, and the third doped region being controlled by the second control signal; and

a fourth doped region having the first polarity coupled to a second readout integrated circuit.

9. The optical apparatus of claim 8 , wherein the first well region having the first polarity overlaps with the second well region having the first polarity.

10. The optical apparatus of claim 8 , wherein the absorption layer comprises both the first well region having the first polarity and the second well region having the first polarity.

11. The optical apparatus of claim 8 , wherein the absorption layer comprises both the first doped region having the second polarity and the second doped region having the second polarity.

12. The optical apparatus of claim 8 , wherein the first polarity is negative and the second polarity is positive.

13. The optical apparatus of claim 8 , wherein the first polarity is positive and the second polarity is negative.

14. A three-dimensional imaging system, comprising:

a transmitter unit comprising a light source for generating photons and directing the photons to a three-dimensional object; and

a receiver unit comprising an image sensor, the image sensor comprising multiple pixels supported by a silicon substrate, each pixel comprising an absorption layer having a different composition from the silicon substrate, the absorption layer comprising a photodetection region configured to absorb photons reflected from the three-dimensional object and to generate photo-carriers in response to the absorbed photons,

wherein each of the multiple pixels is configured so that at least some of the photons reflected from the three-dimensional object are transmitted through the silicon substrate into the photodetection region of the absorption layer,

wherein the absorption layer substantially absorbs photons in the near infrared (NIR) region for photodetection and the silicon substrate substantially absorbs photons in a shorter wavelength region compared to the NIR region for optical filtering.

15. The three-dimensional imaging system of claim 14 , wherein the light source generates photons having a wavelength for which the silicon substrate does not or partially absorbs the photons.

16. The three-dimensional imaging system of claim 14 , wherein the light source comprises an LED or a laser.

17. The three-dimensional imaging system of claim 14 , further comprising a processing unit configured to process the photo-carriers generated by the receiver unit and determines characteristics of the object.

18. The three-dimensional imaging system of claim 17 , wherein the characteristics of the object are selected from the group consisting of depth information and material composition information.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 25, 2019
From: ARTILUX CORPORATION
To: ARTILUX, INC.
Reel/Frame 049577/0289 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jan 7, 2019
From: NA, YUN-CHUNG; LIANG, CHE-FU
To: ARTILUX INC.; ARTILUX CORPORATION
Reel/Frame 048021/0717 →
Continuity (6)
Continuation 16146656 · Sep 28, 2018
Continuation 15338660 · Oct 31, 2016
Provisional Application 62294436 · Feb 12, 2016
Provisional Application 62271386 · Dec 28, 2015
Provisional Application 62251691 · Nov 6, 2015
Related Publication 20190049564A1 · Feb 14, 2019
Cited By (6)
US 12,243,901 US 12,278,252 US 12,389,697 US 12,477,856 US 12,615,862 US 12,635,268