IP Library › Granted Patent US 10,424,762
Granted Patent B2
US 10,424,762 · App. 16/155,413 · Granted Sep 24, 2019

Method for manufacturing transparent display device

Inventors: Byung Hoon Kang (Hwaseong-si, KR); Seung Jun Moon (Cheonan-si, KR); Hee Kyun Shin (Incheon, KR); Min-Woo Lee (Seoul, KR); Woo Jin Cho (Yongin-si, KR)
Assignee: Samsung Display Co., Ltd.
H01L51/56H01L51/0097H01L51/5237
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Quick Facts
Patent No.
US 10,424,762
App. No.
16/155,413
Granted
Sep 24, 2019
Kind
B2
Abstract

A method for manufacturing a transparent display device includes: providing a transparent flexible substrate on a support substrate; forming a display unit on a front side of the transparent flexible substrate; separating the transparent flexible substrate from the support substrate; and cleaning a rear side of the transparent flexible substrate with plasma.

Claims (19)

1. A method for manufacturing a transparent display device, the method comprising:

providing a transparent flexible substrate on a support substrate;

forming a display unit on a front side of the transparent flexible substrate;

separating the transparent flexible substrate from the support substrate; and

cleaning a rear side of the transparent flexible substrate with plasma.

2. The method of claim 1 , wherein the separating of the transparent flexible substrate includes irradiating laser beams to an interface of the support substrate and the transparent flexible substrate through the support substrate.

3. The method of claim 2 , wherein

the transparent flexible substrate is colored, and

an energy density of the laser beams is 120 mJ/cm 2 to 200 mJ/cm 2 .

4. The method of claim 2 , wherein

the transparent flexible substrate is colorless, and

an energy density of the laser beams is 250 mJ/cm 2 to 330 mJ/cm 2 .

5. The method of claim 2 , wherein the cleaning of the rear side of the transparent flexible substrate with plasma includes removing soot provided on the rear side of the transparent flexible substrate.

6. The method of claim 1 , further comprising providing a sacrificial layer on the support substrate such that the sacrificial layer is provided between the support substrate and the transparent flexible substrate.

7. The method of claim 6 , wherein the separating of the transparent flexible substrate includes separating the sacrificial layer from the support substrate.

8. The method of claim 6 , wherein the sacrificial layer includes a graphene oxide or carbon nanotubes.

9. The method of claim 6 , wherein the cleaning of the rear side of the transparent flexible substrate with plasma includes removing a remnant of the sacrificial layer provided on the rear side of the transparent flexible substrate.

10. The method of claim 1 , wherein the cleaning with plasma is performed by using a plasma torch using clean dry air including O 2 .

11. The method of claim 10 , wherein a power of the plasma torch is 900 W to 1300 W.

Assignments (1)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 9, 2018
From: KANG, BYUNG HOON; MOON, SEUNG JUN; SHIN, HEE KYUN; LEE, MIN-WOO; CHO, WOO JIN
To: SAMSUNG DISPLAY CO., LTD.
Reel/Frame 047108/0973 →
Priority Claims (1)
KR 10-2017-0173229 · Dec 15, 2017 · national
Continuity (1)
Related Publication 20190189973A1 · Jun 20, 2019