Laser printing of color converter devices on micro LED display devices and methods
Embodiments disclosed herein include micro light emitting device (LED) display panels and methods of forming such devices. In an embodiment, a display panel includes a display backplane substrate, a light emitting element on the display backplane, a transparent conductor over the light emitting element, a dielectric layer over the transparent conductor, and a color conversion device over the light emitting element. In an embodiment, the dielectric layer separates the transparent conductor from the color conversion device.
1. A method of manufacturing a micro-light emitting diode (LED) display panel, the method comprising:
positioning a carrier substrate above a display backplane, wherein the carrier substrate comprises a release layer and a plurality of color conversion devices over the release layer, and wherein the display backplane comprises a pixel element with a groove above at least one subpixel of the pixel element;
aligning the carrier substrate with the display backplane substrate, wherein at least one of the plurality of color conversion devices is over and above the groove; and
ablating a portion of the release layer, wherein ablating the portion of the release layer separates the at least one color conversion device from the carrier substrate, and wherein the color conversion device falls into the groove.
2. The method of claim 1 , wherein ablating the portion of the release layer comprises irradiating the portion of the release layer with an IR or UV laser.
3. The method of claim 2 , wherein the IR or UV laser is pulsed with pulses having a duration between 10 femtoseconds and 100 picoseconds.
4. The method of claim 2 , wherein the laser energy us between 10 mJ/cm 2 and 10 J/cm 2 .
5. The method of claim 1 , further comprising:
forming the plurality of color conversion devices on the carrier substrate.
6. The method of claim 5 , wherein forming the plurality of color conversion devices on the carrier substrate, comprises:
disposing a color conversion layer on the release layer; and
patterning the color conversion layer to form the plurality of color conversion devices.
7. The method of claim 6 , wherein the plurality of color conversion devices are circular shaped or rectangular shaped.
8. The method of claim 1 , wherein the carrier substrate is substantially the same size as the display backplane.