Transfer apparatus
According to one embodiment, a transfer apparatus includes a coating part for coating an uncured resin on a substrate, a substrate installation part for positioning and installing the substrate integrally, a mold installation part for installing a sheet-like mold, a transfer roller for transferring a fine transfer pattern formed on the mold to the resin coated on the substrate, and a plasma unit for cleaning the mold by irradiating plasma to the mold peeled off from the resin after transferring. After cleaning by the plasma using the plasma unit, the cleaned mold is used again for transferring of the transfer pattern.
1. A transfer apparatus for transferring a fine transfer pattern formed on a mold to a resin coated on a substrate, comprising:
a coating part configured to coat the resin in an uncured state on the substrate;
a substrate installation part configured to position and install the substrate therein integrally;
a mold installation part configured to install the mold in a form of a sheet therein;
a transfer roller configured to transfer the fine transfer pattern formed on the mold to the resin coated on the substrate;
a plasma unit configured to irradiate plasma to the mold peeled off from the resin after the transfer pattern formed on the mold is transferred to the resin coated on the substrate, thereby cleaning the mold;
a rolled web mold configured to wind the mold therearound;
a winding roll configured to wind up the mold fed out from the rolled web mold; and
a controller, wherein
the transfer roller is wound with the mold extending between the rolled web mold and the winding roll, and
the transfer apparatus is configured to:
perform both pressing of the mold against the resin and peeling off the mold from the resin, by roll-transferring of moving the transfer roller on a condition that the transfer roller is pressing the mold against the resin; and
allow the plasma unit to irradiate the plasma to the mold in a state of the mold after the peeling off the mold from the resin has been completed, wherein the controller is programmed to simultaneously move the coating part and the plasma unit in relation to the substrate installed on the substrate installation part, and the controller is programmed to coat the resin in the uncured state on the substrate by the coating part while irradiating plasma on the substrate by the plasma unit,
the mold peeled off from the resin on the substrate is used again for transferring of the transfer pattern after being cleaned by irradiation of the plasma by the plasma unit, and
in response to the cleaning of the mold by the plasma unit being insufficient, the winding roll operates to wind up a portion of the mold peeled off from the resin, and a new portion of the mold is unwound from rolled web mold.
2. The transfer apparatus of claim 1 , wherein
the plasma unit is configured to change an irradiation dose of the plasma to the mold according to the number of times when the transfer is performed by the mold.
3. The transfer apparatus of claim 1 , further comprising
a mold detecting part configured to detect contamination of the mold peeled off from the resin, wherein
the transfer apparatus is configured to judge whether or not the cleaning of the mold by the plasma unit is insufficient according to a detection result by the mold detecting part.