IP Library Granted Patent US 10,504,855
Granted Patent B2
US 10,504,855 · App. 16/171,126 · Granted Dec 10, 2019

Semiconductor package

Inventors: Kyung Moon Jung (Suwon-Si, KR); Chul Kyu Kim (Suwon-si, KR); Seok Hwan Kim (Suwon-Si, KR); Kyung Ho Lee (Suwon-Si, KR); Seong Hwan Park (Suwon-si, KR)
Assignee: SAMSUNG ELECTRONICS CO., LTD.
H01L23/552H01L23/3121H01L23/5226H01L24/09H01L23/043H01L23/49805H01L23/49811H01L2224/02377H01L2224/02379
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Quick Facts
Patent No.
US 10,504,855
App. No.
16/171,126
Granted
Dec 10, 2019
Kind
B2
Abstract

A semiconductor package includes a support member having a first surface and a second surface, and having a through-hole, a first metal layer for shielding disposed on an internal sidewall of the through-hole and the first surface and the second surface of the support member, a connection member disposed on the first surface of the support member, and having a redistribution layer, a semiconductor chip disposed in the through-hole, an encapsulant sealing the semiconductor chip located in the through-hole, and covering the second surface of the support member, a second metal layer for shielding disposed on the encapsulant, and connected to the first metal layer for shielding by a connecting trench via passing through the encapsulant, and a reinforcing via disposed in a region, overlapping the trench via for connection, of the support member, and connected to the first metal layer for shielding.

Claims (30)

1. A semiconductor package, comprising:

a support member having a first surface and a second surface opposing each other, and having a through-hole;

a first metal layer disposed on an internal sidewall of the through-hole and the first surface and the second surface of the support member;

a connection member disposed on the first surface of the support member, and having a redistribution layer;

a semiconductor chip disposed in the through-hole, and having a connection pad connected to the redistribution layer;

an encapsulant sealing the semiconductor chip located in the through-hole, and covering the second surface of the support member;

a second metal layer disposed on the encapsulant, and connected to the first metal layer by a connecting trench via passing through the encapsulant; and

a reinforcing via disposed in a region, overlapping the connecting trench via, of the support member, and connected to the first metal layer.

2. The semiconductor package of claim 1 , wherein the reinforcing via includes a plurality of vias arranged along the region which overlaps the connecting trench via.

3. The semiconductor package of claim 1 , wherein the reinforcing via has a single trench structure extending along the region which overlaps the connecting trench via.

4. The semiconductor package of claim 3 , wherein the reinforcing via has a plurality of trench structures spaced apart at predetermined intervals along the region which overlaps the connecting trench via.

5. The semiconductor package of claim 1 , wherein the reinforcing via has a trapezoidal shape when viewed in a cross-section in a thickness direction of the support member.

6. The semiconductor package of claim 1 , wherein the reinforcing via is connected to a metal pattern located in the support member.

7. The semiconductor package of claim 1 , wherein the connecting trench via surrounds the through-hole in a plan view perpendicular to a thickness direction of the support member.

8. The semiconductor package of claim 1 , further comprising: a shielding via surrounding the connection member in a region, adjacent to an edge, of the connection member, and connected to the first metal layer.

9. The semiconductor package of claim 8 , wherein the shielding via is formed of a material the same as a material of the redistribution layer.

10. The semiconductor package of claim 1 , further comprising: a heat dissipating device disposed in a region, corresponding to the semiconductor chip, of the connection member.

11. The semiconductor package of claim 1 , wherein the reinforcing via includes a first via and a second via, located in a region adjacent to the region which overlaps the connecting trench via, and surrounding the through-hole.

12. A semiconductor package, comprising:

a support member having a first surface and a second surface opposing each other, and having a first through-hole and a second through-hole;

a first metal layer disposed on at least an internal sidewall of the second through-hole and the first surface and the second surface of the support member;

a connection member disposed on the first surface of the support member, and having a redistribution layer;

a semiconductor chip disposed in the first through-hole, and having a connection pad connected to the redistribution layer;

at least one passive component disposed in the second through-hole, and having a connection terminal connected to the redistribution layer;

an encapsulant sealing the semiconductor chip and the at least one passive component, and covering the second surface of the support member;

a second metal layer disposed on the encapsulant;

a connecting trench via passing through the encapsulant to connect the first metal layer to the second metal layer, and surrounding the first through-hole and the second through-hole in a plan view perpendicular to a thickness direction of the support member; and

a reinforcing via disposed in at least a portion of a region, overlapping the connecting trench via, of the support member, and connected to the first metal layer.

13. The semiconductor package of claim 12 , wherein the connecting trench via has a portion disposed along a region adjacent to an outer edge of the support member, and the reinforcing via has a portion disposed along a region adjacent to the outer edge of the support member.

14. The semiconductor package of claim 12 , further comprising: a shielding via surrounding the connection member in a region, adjacent to an edge, of the connection member, and having a via stack structure connected to the first metal layer.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 3, 2019
From: SAMSUNG ELECTRO-MECHANICS CO., LTD.
To: SAMSUNG ELECTRONICS CO., LTD.
Reel/Frame 049350/0756 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Oct 25, 2018
From: JUNG, KYUNG MOON; KIM, CHUL KYU; KIM, SEOK HWAN; LEE, KYUNG HO; PARK, SEONG HWAN
To: SAMSUNG ELECTRO-MECHANICS CO., LTD.
Reel/Frame 047316/0052 →
Priority Claims (1)
KR 10-2018-0051379 · May 3, 2018 · national
Continuity (1)
Related Publication 20190341354A1 · Nov 7, 2019