Layout pattern for SRAM and manufacturing methods thereof
View Patent ↗The present invention provides a layout pattern of a static random access memory (SRAM). The layout pattern includes a first inverter and a second inverter constituting a latch circuit, wherein the latch circuit includes four transistors, a first access transistor (PG 1 ) and a second access transistor (PG 2 ) being electrically connected to the latch circuit, wherein the first access transistor is electrically connected to a first word line and a first bit line, and the second access transistor is electrically connected to a second word line and a second bit line, the first access transistor has a first gate length, the first access transistor has a second gate length, and the first gate length is different from the second gate length, and two read transistors series connected to each other, wherein one of the two read transistors is connected to the latch circuit.
1. A static random access memory (SRAM), comprising:
a substrate, a SRAM pattern disposed on the substrate, wherein the SRAM pattern comprising:
a first inverter and a second inverter constituting a latch circuit, wherein the latch circuit includes a first pull-up transistor (PL 1 ), a first pull-down transistor (PD 1 ), a second pull-up transistor (PL 2 ) and a second pull-down transistor (PD 2 );
a first access transistor (PG 1 ) and a second access transistor (PG 2 ) being electrically connected to the latch circuit, wherein the first access transistor is electrically connected to a first word line and a first bit line, and the second access transistor is electrically connected to a second word line and a second bit line, the first access transistor has a first gate length, the second access transistor has a second gate length, and the first gate length is different from the second gate length; and
a first read port transistor (RPD) and a second read port transistor (RPG) connected to each other, wherein the first read port transistor is connected to the latch circuit, and a gate of the first read port transistor is electrically connected to a gate of the first pull-down transistor, wherein the gate of the first pull-down transistor (PD 1 ) directly contacts the gate of the first read port transistor (RPD), and wherein the gate of the first pull-down transistor (PD 1 ) and the gate of the first read port transistor (RPD) are arranged along a same symmetry axis.
2. The SRAM of claim 1 , further comprising a plurality of fin structures disposed on the substrate.
3. The SRAM of claim 1 , further comprising performing an optical proximity correction (OPC) process to make the first gate length different from the second gate length.
4. The SRAM of claim 1 , wherein the gate of the first access transistor (PG 1 ) and a gate of the second read port transistor (RPG) are arranged along a same symmetry axis.
5. The SRAM of claim 1 , wherein a ratio of the second gate length and the first gate length is between 0.58 and 0.99.
6. The SRAM of claim 5 , wherein a distance of the second gate length is from 14 nanometers to 24 nanometers.