IP Library Granted Patent US 10,600,845
Granted Patent B2
US 10,600,845 · App. 16/172,088 · Granted Mar 24, 2020

Memory device

Inventor: Kenichi Murooka (San Jose, CA)
Assignee: TOSHIBA MEMORY CORPORATION
H01L27/2481G11C5/02G11C5/06G11C5/063G11C7/1006G11C13/0002G11C13/003G11C13/004G11C13/0007G11C13/0023G11C13/0026G11C13/0028G11C13/0069G11C13/0097H01L21/768H01L27/249H01L27/2454H01L29/66666H01L45/1233H01L45/146H01L45/147H01L45/149H01L45/1608G11C2213/31G11C2213/32G11C2213/35G11C2213/71G11C2213/78H01L45/04H01L45/1226
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Quick Facts
Patent No.
US 10,600,845
App. No.
16/172,088
Granted
Mar 24, 2020
Kind
B2
Abstract

According to one embodiment, a memory device includes first to third interconnects, memory cells, and selectors. The first to third interconnects are provided along first to third directions, respectively. The memory cells includes variable resistance layers formed on two side surfaces, facing each other in the first direction, of the third interconnects. The selectors couple the third interconnects with the first interconnects. One of the selectors includes a semiconductor layer provided between associated one of the third interconnects and associated one of the first interconnects, and gates formed on two side surfaces of the semiconductor layer facing each other in the first direction with gate insulating films interposed therebetween.

Claims (57)

1. A memory device, comprising:

a plurality of global bit lines extending along a first direction;

a pair of word lines separated from each other, extending along a second direction;

a bit line between the pair of word lines, extending along a third direction different from the first direction and the second direction;

variable resistivity layers between the bit line and each word line of the pair of word lines, the variable resistivity layers functioning as a memory element;

a selector between the bit line and one of the plurality of global bit lines,

wherein the selector includes:

a semiconductor layer coupled with the bit line and the one of the plurality of global bit lines, and

a pair of gates on two side surfaces of the semiconductor layer facing each other in the first direction with gate insulating layers therebetween; and

a control circuit configured to perform respective operations of reading, writing, and erasing on the memory element.

2. The device according to claim 1 , wherein the control circuit includes:

a word line selection circuit configured to select at least one selected word line from the word lines;

a global bit line selection circuit configured to select at least one selected global bit lines from the global bit lines; and

a selector selection circuit configured to select the selector to connect or disconnect between the selected global bit line and the bit line.

3. The device according to claim 2 , wherein the control circuit is configured to execute:

select a global bit line, a word line and a select gate line in order to select the memory element;

apply a first voltage to a selected word line of the pair of word lines;

apply a second voltage to a selected global bit line of the plurality of global bit lines; and

apply a third voltage to a selected select gate lines.

4. The device according to claim 2 , wherein the word lines alternately belong to a same word line group, the same voltage is applied to two or more of the word lines belonging to the same word line group in an operation,

the control circuit writes data in the memory element of a word line group, and then repeats the writing data to the different word line group.

5. The device according to claim 4 , wherein the control circuit repeats the writing data to the word line group in the different global bit line.

6. The device according to claim 2 , wherein the control circuit writes the data in the memory elements of a word line group, and then repeats the writing data to the different global bit line.

7. The device according to claim 6 , herein the control circuit repeats the writing data to the global bit line in the different word line group.

8. The device according to claim 2 , wherein the control circuit writes the data in the memory elements of a word line group, and then repeats the writing data in the word line group;

repeats the writing data to the different word line group; and

repeats the writing data to the word line group in the different global bit line.

9. The device according to claim 2 , wherein the control circuit writes data in the memory element of a word line group, and then repeats the writing data to the different word line group;

repeats the writing data to the different memory elements of the word line group; and

repeats the writing data to the memory elements in the different global bit line.

10. The device according to claim 2 , wherein the control circuit writes the data in the memory elements of a word line group, and then repeats the writing data in the word line group;

repeats the writing data to the memory elements in the different global bit line; and

repeats the writing data to the different word line group.

11. The device according to claim 2 , wherein the control circuit writes data in the memory element of a word line group, and then repeats the writing data to the different word line group;

repeats the writing data to the word line group in the different global bit line; and then

repeats the writing data to the different memory elements.

12. The device according to claim 2 , wherein the number of accessible memory elements in parallel in a writing operation is different from the number of accessible memory elements in parallel in a reading operation; and

the control circuit arranges a received data set sequence to the different sequence onto the global bit line in write.

13. A memory device, comprising:

a plurality of global bit lines extending along a first direction;

a pair of word lines extending along a second direction, and separated from each other;

a bit line between the pair of word lines, extending along a third direction different from the first direction and the second direction;

a pair of gates separated from each other in parallel in the first direction, and separated from the pair of word lines in the third direction;

variable resistivity layers between the bit line and each word line of the pair of word lines;

a pair of gate insulating layers between the bit line and the pair of gates,

wherein the bit line includes a semiconductor layer coupled with the gate insulating layers in a part thereof, the semiconductor layer also being coupled with one of the plurality of global bit lines; and

a control circuit configured to perform respective operations of reading, writing, and erasing on the memory element.

14. The device according to claim 13 , wherein the control circuit includes:

a word line selection circuit configured to select at least one selected word line from the word lines;

a global bit line selection circuit configured to select at least one selected global bit lines from the global bit lines; and

a selector selection circuit configured to select the selector to connect or disconnect between the selected global bit line and the bit line.

15. The device according to claim 14 , wherein the control circuit is configured to execute:

select a global bit line, a word line and a select gate line in order to select the memory element;

apply a first voltage to a selected word line of the plurality of word lines;

apply a second voltage to a selected global bit line of the plurality of global bit lines; and

apply a third voltage to a selected select gate lines.

16. The device according to claim 13 , wherein the first direction is substantially perpendicular to the second direction, the second direction is substantially perpendicular to the third direction, and the third direction is substantially perpendicular to the first direction.

Assignments (3)
MERGER Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: K.K. PANGEA
Reel/Frame 055659/0471 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: TOSHIBA MEMORY CORPORATION
To: KIOXIA CORPORATION
Reel/Frame 055669/0001 →
CHANGE OF NAME AND ADDRESS Recorded Jan 22, 2021
From: K.K. PANGEA
To: TOSHIBA MEMORY CORPORATION
Reel/Frame 055669/0401 →
Continuity (5)
Continuation 15650526 · Jul 14, 2017
Continuation 15152342 · May 11, 2016
Continuation 14472094 · Aug 28, 2014
Continuation 13313186 · Dec 7, 2011
Related Publication 20190067376A1 · Feb 28, 2019