IP Library Granted Patent US 10,460,981
Granted Patent B2
US 10,460,981 · App. 16/183,493 · Granted Oct 29, 2019

Array of gated devices and methods of forming an array of gated devices

Inventors: Marcello Mariani (Milan, IT); Anna Maria Conti (Milan, IT); Sara Vigano (Monza, IT)
Assignee: Micron Technology, Inc.
H01L21/76224H01L21/308H01L21/8229H01L21/8239H01L21/8249H01L21/823437H01L21/823475H01L21/823487H01L27/1022H01L27/1027H01L27/1052H01L29/4236H01L29/42364H01L29/66333H01L29/66363H01L29/66666H01L29/744H01L29/749H01L29/7827
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Quick Facts
Patent No.
US 10,460,981
App. No.
16/183,493
Granted
Oct 29, 2019
Kind
B2
Abstract

An array of gated devices includes a plurality of gated devices arranged in rows and columns and individually including an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region. A plurality of access lines are individually laterally proximate the mid regions along individual of the rows. A plurality of data/sense lines are individually elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns. A plurality of metal lines individually extends along and between immediately adjacent of the rows elevationally inward of the access lines. The individual metal lines are directly against and electrically coupled to sidewalls of the inner regions of each of immediately adjacent of the rows. The metal lines are electrically isolated from the data/sense lines. Other arrays of gated devices and methods of forming arrays of gated devices are disclosed.

Claims (6)

1. An array of gated devices, comprising:

rows and columns comprising a plurality of gated devices individually comprising an elevationally inner region, a mid region elevationally outward of the inner region, and an elevationally outer region elevationally outward of the mid region, individual of the inner regions comprising one of a plurality of pillars, the one pillar being spaced from others of the pillars of other inner regions in a horizontal cross section;

a plurality of access lines that individually are laterally proximate the mid regions along individual of the rows;

a plurality of data/sense lines that individually are elevationally outward of the access lines and electrically coupled to the outer regions along individual of the columns;

metal circumferentially surrounding, directly against, and electrically coupled to sidewalls of the inner regions of the pillars; the metal being electrically isolated from the data/sense lines; and

the inner regions being electrically coupled to one another elevationally inward of the metal, thereby being electrically coupled to one another by other than, and/or not solely by, the metal that is directly against the sidewalls of the inner regions of the pillars.

Assignments (4)
RELEASE OF SECURITY INTEREST Recorded Nov 15, 2019
From: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 051026/0568 →
RELEASE OF SECURITY INTEREST Recorded Oct 14, 2019
From: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
To: MICRON TECHNOLOGY, INC.
Reel/Frame 050718/0764 →
SUPPLEMENT NO. 11 TO PATENT SECURITY AGREEMENT Recorded Jan 16, 2019
From: MICRON TECHNOLOGY, INC.
To: MORGAN STANLEY SENIOR FUNDING, INC., AS COLLATERAL AGENT
Reel/Frame 048082/0860 →
SUPPLEMENT NO. 2 TO PATENT SECURITY AGREEMENT Recorded Jan 16, 2019
From: MICRON TECHNOLOGY, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 048082/0889 →