Methods for forming narrow vertical pillars and integrated circuit devices having the same
In some embodiments, an integrated circuit includes narrow, vertically-extending pillars that fill openings formed in the integrated circuit. In some embodiments, the openings can contain phase change material to form a phase change memory cell. The openings occupied by the pillars can be defined using crossing lines of sacrificial material, e.g., spacers, that are formed on different vertical levels. The lines of material can be formed by deposition processes that allow the formation of very thin lines. Exposed material at the intersection of the lines is selectively removed to form the openings, which have dimensions determined by the widths of the lines. The openings can be filled, for example, with phase change material.
1. An integrated circuit, comprising:
a memory cell;
a bottom electrode;
an upper electrode; and
a conductive wire extending between the bottom electrode and the upper electrode, the conductive wire disposed within an insulating region that is laterally elongated and the conductive wire extending across a width of the insulating region, wherein the insulating region is formed between a dielectric material that extends laterally across a length of the insulating region, and the dielectric material is in direct physical contact with the bottom electrode and the upper electrode.
2. The integrated circuit of claim 1 , wherein the insulating region is formed between a first portion of the dielectric material and a second portion of the dielectric material.
3. The integrated circuit of claim 2 , wherein the insulating region is formed between a first portion of a second material that is different than the dielectric material and a second portion of the second material.
4. The integrated circuit of claim 3 , wherein the second material is formed above or below the dielectric material.
5. The integrated circuit of claim 1 , wherein a cross-section of the insulating region has a parallelogram shape.
6. The integrated circuit of claim 1 , wherein the conductive wire comprises phase change material.
7. The integrated circuit of claim 1 , wherein a cross-section of the insulating region has a geometric shape.
8. The integrated circuit of claim 1 , further comprising:
a spacer that is disposed within the insulating region and extends across the length and the width of the insulating region.
9. The integrated circuit of claim 8 , wherein the spacer is formed between the bottom electrode and the upper electrode.
10. The integrated circuit of claim 9 , wherein the spacer comprises a resistive heater.
11. An integrated circuit, comprising:
a memory cell;
a lower electrode;
an upper electrode;
a conductive line in a channel between a first portion of a dielectric material and a second portion of the dielectric material, wherein the dielectric material is positioned between the lower electrode and the upper electrode and is in direct physical contact with the lower electrode and the upper electrode, and wherein the channel formed between the first portion of the dielectric material and the second portion of the dielectric material is further formed between a first portion of a second material and a second portion of the second material.
12. The integrated circuit of claim 11 , wherein the conductive line is formed above a spacer that contacts the lower electrode, the channel extending vertically between the lower electrode and the upper electrode and between the first portion and the second portion of the dielectric material.
13. The integrated circuit of claim 11 , wherein the second material is formed above or below the dielectric material.