Multi-frequency hybrid piezo actuation and capactive transducer
In one embodiment, a transducer comprises a first piezoelectric stack comprising a piezoelectric material; a first layer in contact with the piezoelectric stack; and a base structure beneath the first layer. The first layer has a first displacement between a first portion of the base structure and the first layer, and the first displacement is configurable by a first bias voltage received by the transducer.
1. A transducer, comprising:
a first piezoelectric stack comprising a piezoelectric material;
a first layer in contact with the piezoelectric stack; and
a base structure beneath the first layer, wherein the transducer is configured to have:
a gap between the first layer and a first portion of the base structure in an absence of a first bias voltage; and
contact between the first layer and the first portion of base structure responsive to the first bias voltage.
2. The transducer of claim 1 , wherein the first bias voltage is a direct current (“DC”) voltage.
3. The transducer of claim 1 , wherein the first bias voltage is the voltage difference between the first layer and the base structure.
4. The transducer of claim 1 , wherein the first bias voltage is received by the base structure.
5. The transducer of claim 1 , wherein the first bias voltage is is received by the first layer.
6. The transducer of claim 1 , wherein the first layer does not contact a second portion of the base structure responsive to the first bias voltage received by the transducer.
7. The transducer of claim 1 , wherein the first layer comprises a top plate and an insulation layer.
8. The transducer of claim 7 , wherein the transducer is configured to have contact between the insulation layer and the first portion of the base structure responsive to the first bias voltage.
9. The transducer of claim 7 , wherein the insulation layer does not contact a second portion of the base structure responsive to the first bias voltage.
10. The transducer of claim 1 , wherein the piezoelectric stack comprises:
a first electrode;
a second electrode; and
the piezoelectric material is between the first electrode and the second electrode.
11. The transducer of claim 1 , wherein the piezoelectric stack is a first piezoelectric stack; and
further comprising a second piezoelectric stack separate from the first piezoelectric stack and in contact with the first layer.
12. The transducer of claim 1 , wherein the transducer is configured to have a gap between the first layer and a second portion of the base structure in an absence of a second bias voltage.
13. The transducer of claim 12 , wherein:
the transducer is configured to have contact between the first layer and the second portion of the base structure responsive to the second bias voltage.
14. The transducer of claim 13 , wherein the second bias voltage is received by the base structure.
15. The transducer of claim 13 , wherein the second bias voltage is received by the top plate.
16. The transducer of claim 13 , wherein the second bias voltage is between the first layer and the base structure.
17. The transducer of claim 1 , wherein a support structure connects the base structure with the first layer.