IP Library Granted Patent US 10,600,628
Granted Patent B1
US 10,600,628 · App. 16/192,223 · Granted Mar 24, 2020

Resonant transmission line to deliver precision RF voltage

Inventor: William Roger Fletcher (Shropshire, GB)
Assignee: MKS Instruments, Inc.
H01J49/022H01F19/04H01J49/0031H01J49/4225H01P3/06H03H7/0115
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Quick Facts
Patent No.
US 10,600,628
App. No.
16/192,223
Granted
Mar 24, 2020
Kind
B1
Abstract

A system for conveying a time-varying voltage signal from a first subsystem to a second subsystem, and for monitoring and controlling the time-varying voltage signal, comprises a transmission line having a first end and a second end, extending from the first end at the first subsystem to the second end at the second subsystem. The transmission line is configured to be un-terminated, and have an electrical length substantially equal to a multiple of one half wavelength of the time-varying voltage signal. The system may further comprise an adaptive control configured to couple the time-varying voltage signal to the first end, and adjust a generator of the time-varying voltage signal based on a sampling of the time-varying voltage signal at the first end, and at least one transformer at the second subsystem electrically coupled to the second end and configured to increase an amplitude of the time-varying voltage signal.

Claims (39)

1. A system for conveying a time-varying voltage signal from a first subsystem to a second subsystem, and for monitoring and adaptively controlling an amplitude of the time-varying voltage signal, comprising:

a transmission line having a first end and a second end, the transmission line extending from the first end at the first subsystem to the second end at the second subsystem, the transmission line configured to have a physical length that corresponds to an electrical length of the transmission line substantially equal to a positive integer multiple of one half wavelength of the time-varying voltage signal, the transmission line configured to be resonant;

an adaptive control facility at the first subsystem, the adaptive control facility configured to (i) electrically couple the time-varying voltage signal to the first end, and (ii) adjust a generator of the time-varying voltage signal, based on a sampling of the time-varying voltage signal at the first end, to maintain the amplitude of the time-varying voltage signal at a required level; and

at least one transformer at the second subsystem, the at least one transformer electrically coupled to the second end and configured to increase an amplitude of the time-varying voltage signal.

2. The system of claim 1 , comprising the first subsystem including signal generation, control, and analysis electronics, and the second subsystem including a quadrupole analyzer, and wherein the time-varying voltage signal is a radio frequency voltage signal configured to be applied, through the at least one transformer, to quadrupole elements of the quadrupole analyzer.

3. The system of claim 1 , wherein the adaptive control facility comprises a rectifier configured to sample the time-varying voltage signal at the first end of the transmission line and produce a feedback signal therefrom.

4. The system of claim 3 , wherein the rectifier is a semiconductor diode.

5. The system of claim 4 , further comprising a compensating diode electrically coupled to the rectifier, the compensating diode configured such that a change in a conduction voltage of the compensating diode with respect to temperature mitigates a change in a conduction voltage of the rectifier with respect to temperature.

6. The system of claim 1 , further comprising at least one transmission line length, selected from an assortment of line lengths, added to the transmission line, the at least one transmission line length configured to provide a coarse adjustment of the electrical length of the transmission line by adjusting the physical length of the transmission line.

7. The system of claim 1 , further comprising an adjustable capacitor coupled in parallel to the first end of the transmission line, the adjustable capacitor configured to provide compensation to place the transmission line in resonance.

8. The system of claim 1 , further comprising a tunable tank circuit configured to receive an excitation signal from a signal generator and to resonate at a frequency of the excitation signal to produce the time-varying voltage signal.

9. The system of claim 1 , wherein the at least one transformer comprises two transformers electrically coupled to the time-varying voltage signal to produce two phases of the time-varying voltage signal.

10. The system of claim 1 , wherein the at least one transformer comprises a single transformer having a primary winding and two secondary windings, the two secondary windings configured to produce two phases of the time-varying voltage signal applied to the primary winding.

11. The system of claim 1 , wherein the transmission line is a component of a cable assembly, the cable assembly incorporating one or more communication paths for conveying one or more of information, control signals, and power between the first subsystem and the second subsystem.

12. The system of claim 11 , wherein the first subsystem is located at least a half wavelength from the second subsystem.

13. The system of claim 11 , wherein the first subsystem is located at least 30 meters from the second subsystem.

14. A method of conveying a time-varying voltage signal from a first subsystem to a second subsystem, and for monitoring and adaptively controlling an amplitude of the time-varying voltage signal, comprising:

electrically coupling the time-varying voltage signal to a first end of a transmission line, the transmission line extending from the first end at the first subsystem to a second end at the second subsystem,

configuring a physical length of the transmission line to correspond to an electrical length substantially equal to a positive integer multiple of one half wavelength of the time-varying voltage signal;

adjusting, at an adaptive control facility at the first subsystem, a generator of the time-varying voltage signal, based on a sampling of the time-varying voltage signal at the first end, to maintain the amplitude of the time-varying voltage signal at a required level; and

increasing an amplitude of the time-varying voltage signal with at least one transformer at the second subsystem, the at least one transformer electrically coupled to the second end.

15. The method of claim 14 , further sampling the time-varying voltage signal at the first end of the transmission line and producing a feedback signal therefrom.

16. The method of claim 14 , further adding at least one binary-weighted transmission line length, selected from an assortment of transmission line lengths, to the transmission line to provide a coarse adjustment of the electrical length of the transmission line by adjusting the physical length of the transmission line.

17. The method of claim 14 , further adjusting a adjustable capacitor coupled in parallel to the first end of the un-terminated transmission line to provide compensation to place the transmission line in resonance.

18. A system for conveying a time-varying voltage signal from a signal generation, control, and analysis first subsystem to a quadrupole analyzer second subsystem, and for monitoring and adaptively controlling an amplitude of the time-varying voltage signal, comprising:

the signal generation, control, and analysis first subsystem,

the quadrupole analyzer second subsystem having a quadrupole analyzer, the time-varying voltage signal being a radio frequency voltage signal configured to be applied, through at least one transformer, to quadrupole elements of the quadrupole analyzer;

a transmission line having a first end and a second end, the transmission line extending from the first end at the first subsystem to the second end at the second subsystem, the transmission line configured to have an electrical length substantially equal to a positive integer multiple of one half wavelength of the time-varying voltage signal;

a rectifier circuit configured to sample the time-varying voltage coupled to the first end to produce a feedback signal, and convey the feedback signal in an adaptive control facility, the adaptive control facility configured to adjust a generator of the time-varying voltage signal, based on a sampling of the time-varying voltage signal at the first end, to maintain the amplitude of the time-varying voltage signal at a required level; and

at least one transformer at the second subsystem, the at least one transformer electrically coupled to the second end and configured to increase an amplitude of the time-varying voltage signal.

19. The system of claim 18 , further comprising a temperature compensation circuit electrically coupled to the rectifier, the temperature compensation circuit configured to mitigate a change in a conduction voltage of the rectifier with respect to temperature according to a change in a conduction voltage of the compensating diode with respect to temperature.

20. The system of claim 18 , further comprising at least one transmission line length, selected from an assortment of line lengths, added to the transmission line, the at least one transmission line length configured to provide a coarse adjustment of the electrical length of the transmission line by adjusting the physical length of the transmission line.

21. The system of claim 18 , further comprising an adjustable capacitor coupled in parallel to the first end of the transmission line, the adjustable capacitor configured to provide compensation to place the transmission line in resonance.

22. A method of conveying a time-varying voltage signal from a signal generation, control, and analysis subsystem to a quadrupole analyzer, and for monitoring and adaptively controlling an amplitude of the time-varying voltage signal, comprising:

electrically coupling the time-varying voltage signal to a first end of a transmission line, the transmission line extending from the first end at the signal generation, control, and analysis subsystem to a second end at the quadrupole analyzer,

configuring a physical length of the transmission line to correspond to an electrical length substantially equal to a positive integer multiple of one half wavelength of the time-varying voltage signal;

sampling, with a rectifier circuit, the time-varying voltage coupled to the first end to produce a feedback signal, and conveying the feedback signal to an adaptive control facility, the adaptive control facility configured to adjust a generator of the time-varying voltage signal, based on a sampling of the time-varying voltage signal at the first end, to maintain the amplitude of the time-varying voltage signal at a required level; and

increasing an amplitude of the time-varying voltage signal with at least one transformer at the second subsystem, the at least one transformer electrically coupled to the second end.

23. The method of claim 22 , further mitigating a change in a conduction voltage of the rectifier with respect to temperature according to a change in a conduction voltage of the compensating diode with respect to temperature.

Assignments (8)
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 063009/0001 →
RELEASE OF SECURITY INTEREST Recorded Aug 24, 2022
From: BARCLAYS BANK PLC
To: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
Reel/Frame 062739/0001 →
SECURITY INTEREST Recorded Aug 19, 2022
From: MKS INSTRUMENTS, INC.; NEWPORT CORPORATION; ELECTRO SCIENTIFIC INDUSTRIES, INC.
To: JPMORGAN CHASE BANK, N.A., AS COLLATERAL AGENT
Reel/Frame 061572/0069 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO.7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0312. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (ABL). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055668/0687 →
CORRECTIVE ASSIGNMENT TO CORRECT THE REMOVE U.S. PATENT NO. 7,919,646 PREVIOUSLY RECORDED ON REEL 048211 FRAME 0227. ASSIGNOR(S) HEREBY CONFIRMS THE PATENT SECURITY AGREEMENT (TERM LOAN). Recorded Jan 14, 2021
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 055006/0492 →
PATENT SECURITY AGREEMENT (ABL) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0312 →
PATENT SECURITY AGREEMENT (TERM LOAN) Recorded Feb 1, 2019
From: ELECTRO SCIENTIFIC INDUSTRIES, INC.; MKS INSTRUMENTS, INC.; NEWPORT CORPORATION
To: BARCLAYS BANK PLC, AS COLLATERAL AGENT
Reel/Frame 048211/0227 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 15, 2018
From: FLETCHER, WILLIAM ROGER
To: MKS INSTRUMENTS, INC.
Reel/Frame 047517/0924 →