Semiconductor device and method for fabricating the same
The on-state characteristics of a transistor are improved and thus, a semiconductor device capable of high-speed response and high-speed operation is provided. A highly reliable semiconductor device showing stable electric characteristics is made. The semiconductor device includes a transistor including a first oxide layer; an oxide semiconductor layer over the first oxide layer; a source electrode layer and a drain electrode layer in contact with the oxide semiconductor layer; a second oxide layer over the oxide semiconductor layer; a gate insulating layer over the second oxide layer; and a gate electrode layer over the gate insulating layer. An end portion of the second oxide layer and an end portion of the gate insulating layer overlap with the source electrode layer and the drain electrode layer.
1. A method for fabricating a semiconductor device, comprising the steps of:
stacking a first oxide layer and an oxide semiconductor layer;
forming a source electrode layer and a drain electrode layer over the first oxide layer and the oxide semiconductor layer;
stacking an oxide film and a gate insulating film over the source electrode layer and the drain electrode layer;
forming a gate electrode layer over the oxide film and the gate insulating film;
forming an oxide insulating layer over the gate insulating film and the gate electrode layer;
etching the oxide insulating layer to form a sidewall insulating layer in contact with a side surface of the gate electrode layer; and
etching the oxide film and the gate insulating film using the sidewall insulating layer and the gate electrode layer as masks so that a second oxide layer and a gate insulating layer are formed.
2. The method for fabricating the semiconductor device according to claim 1 , wherein each of the first oxide layer, the second oxide layer, and the oxide semiconductor layer contains indium, zinc, and gallium.
3. The method for fabricating the semiconductor device according to claim 1 ,
wherein an upper surface of the source electrode layer is in direct contact with the second oxide layer, and
wherein an upper surface of the drain electrode layer is in direct contact with the second oxide layer.
4. The method for fabricating the semiconductor device according to claim 1 ,
wherein the source electrode layer comprises a stepped-shape near the drain electrode layer, and
wherein the drain electrode layer comprises a stepped-shape near the source electrode layer.
5. The method for fabricating the semiconductor device according to claim 1 ,
wherein a side surface of the sidewall insulating layer is aligned with a side surface of the gate insulating layer.
6. The method for fabricating the semiconductor device according to claim 5 ,
wherein the side surface of the gate insulating layer is aligned with a side surface of the second oxide layer.