MATERIALS FOR NEAR FIELD TRANSDUCERS AND NEAR FIELD TRANSDUCERS CONTAINING SAME
A method of forming a near field transducer (NFT) layer, the method including depositing a film of a primary element, the film having a film thickness and a film expanse; and implanting at least one secondary element into the primary element, wherein the NFT layer includes the film of the primary element doped with the at least one secondary element.
1 . A method of forming a near field transducer (NFT) layer, the method comprising:
depositing a film of a primary element, the film having a film thickness and a film expanse; and
implanting at least one secondary element into the primary element,
wherein the NFT layer comprises the film of the primary element doped with the at least one secondary element.
2 . The method according to claim 1 , wherein the at least one secondary element is implanted using beam line implanting, or plasma immersion implanting.
3 . The method according to claim 1 , wherein the concentration of the at least one secondary element is not constant across the thickness of the film
4 . The method according to claim 1 , wherein the concentration of the at least one secondary element is not constant across the expanse of the film.
5 . The method according to claim 1 , wherein the at least one secondary element is implanted at more than one energy.
6 . The method according to claim 1 further comprising annealing after implanting the at least one secondary element.
7 . The method according to claim 6 further comprising depositing a metal or dielectric layer on the implanted film before annealing.
8 . The method according to claim 6 further comprising implanting at least one secondary element after annealing.
9 . The method according to claim 1 further comprising patterning the NFT layer into a NFT.
10 . The method according to claim 1 further comprising depositing a metal or dielectric layer on the film of primary element before implanting the at least one secondary element.
11 . A method of forming a peg of a near field transducer (NFT), the method comprising:
depositing a primary element to form a primary element film or layer;
defining a peg of the NFT from the primary element film or layer;
forming the peg of the NFT;
encapsulating the peg with an encapsulation layer;
defining an implant; and
implanting at least one secondary element in the implant area of the primary element film to form the peg of the NFT.
12 . The method according to claim 11 , wherein the step of defining the implant comprises using a mask so that only the implant area is exposed.
13 . The method according to claim 11 further comprising annealing after implanting the at least one secondary element.
14 . The method according to claim 13 further comprising at least one additional implanting step and at least one additional annealing step.
15 . The method according to claim 11 further comprising removing at least a portion of the encapsulation layer after implanting the at least one secondary element.
16 . The method according to claim 15 further comprising depositing a dielectric material after removing at least a portion of the encapsulation layer.
17 . A method of forming a plurality of magnetic heads, each of the magnetic heads comprising an alloyed peg of a NFT, the method comprising:
depositing a primary element on a substrate to form a primary element film or layer;
forming a plurality of pegs of the NFTs;
slicing the substrate into rows, each row containing a plurality of pegs;
depositing head overcoat material on each row; and
implanting at least one secondary element in the primary element film of the peg to form an alloyed peg of a NFT.
18 . The method according to claim 17 , wherein the step of implanting comprises using a mask so that only the implant area is exposed to the at least one secondary element.
19 . The method according to claim 17 further comprising depositing additional head overcoat material after implanting the at least one secondary element.