IP Library Granted Patent US 10,881,034
Granted Patent B2
US 10,881,034 · App. 16/196,838 · Granted Dec 29, 2020

Passive nano-heat pipes for cooling and thermal management of electronics and power conversion devices

Inventors: Shalabh C. Maroo (Syracuse, NY); An Zou (Cortland, NY); Manish Gupta (Syracuse, NY)
Assignee: Syracuse University
H05K7/20936F28D15/00H01L23/427H05K7/20309H05K7/20318H05K7/20327H05K7/20336F28D15/0283F28D2015/0225
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Quick Facts
Patent No.
US 10,881,034
App. No.
16/196,838
Granted
Dec 29, 2020
Kind
B2
Abstract

A cooling device for a heat source, such as an electronic component, has a single or set of nano- and/or micro-sized channel(s) connected to a single or multiple reservoir(s). The heat source causes nucleation within a channel, and a vapor bubble forms removing heat from the heat source via evaporation of liquid to vapor in the bubble and condensation of the generated vapor at the cooler ends of the bubble. Thus, the channel operates as a passive heat pipe and removes heat from the source by passively circulating the cooling fluid between the vapor bubble and the reservoir(s).

Claims (26)

1. A device for providing cooling to an electronic component, comprising:

a substrate having at least one channel embedded in the substrate, wherein the at least one channel has a depth of between 5 nanometers and 10,000 nanometers, a width of at least 5 nanometer, and a length of at least 5 nanometers;

a plate positioned over the substrate and enclosing a top of the at least one channel;

at least one reservoir embedded in the substrate and passing through the plate, the at least one reservoir positioned at at least one end of and in fluid communication only with the at least one channel;

a cover positioned over the plate and enclosing a top of the at least one reservoir; and

a coolant capable of a reversible liquid to vapor transition, the coolant positioned only in the at least one channel and the at least one reservoir,

wherein the substrate, the plate, and the cover seal the coolant in the at least channel and the at least one reservoir.

2. The device of claim 1 , further comprising a heat sink associated with the cover.

3. The device of claim 1 , wherein the liquid is water.

4. The device of claim 1 , wherein the liquid is a dielectric fluid.

5. The device of claim 1 , wherein the liquid is selected from a group consisting of glycols, alcohols and combinations thereof.

6. The device of claim 1 , wherein the liquid is a refrigerant.

7. The device of claim 1 , wherein the device is positioned against a heat source associated with the electronic component so that the at least one channel is operatively aligned with the heat source.

8. A method of cooling an electronic component, comprising steps of:

providing a cooling device, the cooling device including:

a substrate having at least one channel embedded in the substrate, wherein the at least one channel has a depth of between 5 nanometers and 10,000 nanometers, a width of at least 5 nanometers, and a length of at least 5 nanometers,

a plate positioned over the substrate and enclosing a top of the at least one channel;

at least one reservoir embedded in the substrate and passing through the plate, the at least one reservoir positioned at at least one end of the length and in fluid communication only with the at least one channel,

a cover positioned over the plate and enclosing a top of the at least one reservoir; and

a coolant capable of a reversible liquid to vapor transition, the coolant positioned only in the at least one channel and the at least one reservoir,

wherein the substrate, the plate, and the cover seal the coolant in the at least channel and the at least one reservoir, and

wherein the cooling device is positioned along the electronic component so that a heat source of the electronic device is thermally coupled to the at least one channel of the cooling device.

9. The method of claim 8 , wherein the step of providing the cooling device comprises integrally forming the cooling device with the electronic component.

10. The method of claim 8 , wherein the step of providing the cooling device comprises placing a separate cooling device against the electronic component.

11. The method of claim 8 , further comprising a step of allowing the heat source of the electronic component to cause the liquid in the at least one channel to vaporize and form a vapor bubble of the vapor in the at least one channel.

12. The method of claim 11 , further comprising a step of cooling the at least one reservoir so that the vapor condenses within the vapor bubble at ends of the vapor bubble.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Aug 3, 2020
From: MAROO, SHALABH C.; ZOU, AN; GUPTA, MANISH
To: SYRACUSE UNIVERSITY
Reel/Frame 053381/0090 →
CONFIRMATORY LICENSE Recorded Feb 19, 2020
From: SYRACUSE UNIVERSITY
To: NATIONAL SCIENCE FOUNDATION
Reel/Frame 051969/0508 →
Continuity (2)
Provisional Application 62589202 · Nov 21, 2017
Related Publication 20190159368A1 · May 23, 2019