Dynamic random access memory and methods of manufacturing, writing and reading the same
A dynamic random access memory (DRAM) and methods of manufacturing, writing and reading the same. The DRAM includes a substrate, a bit line, a sidewall structure and an interconnection structure. The bit line is disposed on the substrate. The sidewall structure is disposed on a sidewall of the bit line. The sidewall structure includes a first insulation layer, a second insulation layer, and a shield conductor layer. The first insulation layer is disposed on the sidewall of the bit line. The second insulation layer is disposed on the first insulation layer. The shield conductor layer is disposed between the first insulation layer and the second insulation layer. The interconnection structure is electrically connected to the shield conductor layer. The DRAM and the manufacturing, writing and reading methods thereof can effectively reduce the parasitic capacitance of the bit line.
1. A dynamic random access memory, comprising:
a substrate;
a bit line, disposed on the substrate;
a sidewall structure, disposed on a sidewall of the bit line, and comprising:
a first insulation layer, disposed on the sidewall of the bit line;
a second insulation layer, disposed on the first insulation layer; and
a shield conductor layer, disposed between the first insulation layer and the second insulation layer, wherein a top surface of the first insulation layer, a top surface of the second insulation layer, and a top surface of the shield conductor layer are coplanar; and
an interconnection structure, electrically connected to the shield conductor layer, wherein
the interconnection structure includes a contact located on the shield conductor layer,
first top surfaces of portions of the shield conductor layer directly below the contact are lower than second top surfaces of other portions of the shield conductor layer not directly below the contact, and
the portions of the shield conductor layer directly below the contact are located on two sides of the bit line.
2. The dynamic random access memory according to claim 1 , wherein a material of the shield conductor layer comprises metal or doped polycrystalline silicon.
3. The dynamic random access memory according to claim 1 , wherein the interconnection structure and the bit line are electrically insulated from each other.
4. The dynamic random access memory according to claim 1 , wherein the interconnection structure is electrically connected to the shield conductor layer at an end position of the bit line.
5. The dynamic random access memory according to claim further comprising isolation structures, wherein the isolation structures are disposed in the substrate to define active regions.
6. The dynamic random access memory according to claim 1 , further comprising a word line, wherein the word line and the bit line are intersected with and electrically insulated from each other.
7. The dynamic random access memory according to claim 6 , further comprising a first doped region and a second doped region, wherein the first doped region and the second doped region are respectively located in the substrate at one side and another side of the word line, and the bit line is electrically connected to the first doped region.
8. The dynamic random access memory according to claim 7 , further comprising a capacitor structure, wherein the capacitor structure is electrically connected to the second doped region.