IP Library Granted Patent US 10,505,047
Granted Patent B2
US 10,505,047 · App. 16/202,507 · Granted Dec 10, 2019

Nanowire transistor with source and drain induced by electrical contacts with negative Schottky barrier height

Inventors: Paul A. Clifton (Palo Alto, CA); Andreas Goebel (Mountain View, CA); Walter A. Harrison (Palo Alto, CA)
Assignee: ACORN SEMI, LLC
H01L29/78618B82Y10/00H01L29/0673H01L29/0847H01L29/41725H01L29/41791H01L29/42392H01L29/775H01L29/785H01L29/7839H01L29/7851H01L29/78696
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Quick Facts
Patent No.
US 10,505,047
App. No.
16/202,507
Granted
Dec 10, 2019
Kind
B2
Abstract

A nanowire transistor includes undoped source and drain regions electrically coupled with a channel region. A source stack that is electrically isolated from a gate conductor includes an interfacial layer and a source conductor, and is coaxially wrapped completely around the source region, extending along at least a portion of the source region. A Schottky barrier between the source conductor and the source region is a negative Schottky barrier and a concentration of free charge carriers is induced in the semiconductor source region.

Claims (33)

1. A fin field-effect transistor (finFET), comprising:

a semiconductor fin disposed on a substrate, wherein the fin has two major faces and a longitudinal length of the fin comprises:

an undoped channel region of a first semiconductor material;

an undoped semiconductor source region electrically coupled with a first end of the channel region;

an undoped semiconductor drain region electrically coupled with a second end of the channel region;

a gate stack comprising a gate insulator and a gate conductor wrapping around at least two sides of the channel region;

a source stack comprising a first interfacial layer and a source conductor wrapping around at least two sides of the semiconductor source region and extending along at least a portion of the semiconductor source region; and

a drain stack comprising a second interfacial layer and a drain conductor wrapping around at least two sides of the semiconductor drain region and extending along at least a portion of the semiconductor drain region,

wherein a Schottky barrier between the source conductor and the semiconductor source region is a negative Schottky barrier causing a concentration of free carriers to be induced in the semiconductor source region.

2. The finFET of claim 1 , wherein a Schottky barrier between the drain conductor and the semiconductor drain region is a negative Schottky barrier and a concentration of free carriers is induced in the semiconductor drain region.

3. The finFET of claim 1 , wherein the fin has a thickness as measured between the two major faces of 12 nm or less.

4. The finFET of claim 1 , wherein the free charge carriers induced in the semiconductor source region are electrons.

5. The finFET of claim 1 , wherein the free charge carriers induced in the semiconductor source region are holes.

6. The finFET of claim 1 , wherein the negative Schottky barrier between the source conductor and the source is between −0.1 eV and −0.5 eV.

7. The finFET of claim 1 , wherein first the interfacial layer comprises a material that would be an insulator or a semiconductor in its bulk state; and wherein a conductive path is provided between the source conductor and the semiconductor source region by quantum mechanical tunneling through the first interfacial layer.

8. The finFET of claim 1 , wherein the second interfacial layer comprises a material that would be an insulator or a semiconductor in its bulk state; and wherein a conductive path is provided between the drain conductor and the semiconductor drain region by quantum mechanical tunneling through the second interfacial layer.

9. A fin field-effect transistor (finFET), comprising:

a semiconductor fin on a top surface of a substrate, the semiconductor fin including a middle section, and a first end section and a second end section on opposite ends of the middle section, the middle section, the first end section, and the second end section being undoped;

a gate dielectric layer on a top surface and sidewalls of the middle section of the semiconductor fin;

a gate electrode on the gate dielectric layer;

a first metal contact adjacent at least two sides of the first end section and providing an electrically conductive path to the first end section, and a second metal contact adjacent at least two sides of the second end section and providing an electrically conductive path to the second end section;

wherein the first metal contact induces free charge carriers in the first end section, the first metal contact is separated from the gate electrode by an insulating material layer or a gap, and the second metal contact is separated from the gate electrode by an insulating material layer or a gap.

10. The finFET of claim 9 , wherein the second metal contact induces free charge carriers in the drain.

11. The finFET of claim 9 , wherein the free charge carriers are electrons.

12. The finFET of claim 9 , wherein the free charge carriers are holes.

13. The finFET of claim 9 , wherein a Schottky barrier between the first metal contact and the first end section has a negative Schottky barrier height.

14. The finFET of claim 9 , wherein a Schottky barrier height between the first metal contact and the first end section is between −0.1 eV and −0.5 eV.

15. The finFET of claim 9 , wherein the first metal contact is displaced from the first end section by a first interface layer, and the second metal contact is displaced from the second end section by a second interface layer, the first and second interface layers each comprising a material that would be an insulator or a semiconductor in its bulk state.

16. The finFET of claim 9 , wherein a first interface layer at an interface between the first metal contact and the first end section and a second interface layer at an interface between the second metal contact and the second end section each comprise a monolayer of elements from group V or group VI and the induced free charge carriers are electrons.

17. The finFET of claim 9 , wherein a first interface layer at an interface between the first metal contact and the first end section and a second interface layer at an interface between the second metal contact and the second end section each comprise a monolayer of elements from group III and the induced free charge carriers are holes.

18. The finFET of claim 9 , wherein the middle section, the first end section, and the second end section are all comprised of the same semiconductor material.

19. The finFET of claim 18 , wherein the semiconductor material is silicon, germanium, silicon carbide, a compound semiconductor, a fullerene, or an alloy comprising two or more of silicon, germanium, carbon and tin.

20. The finFET of claim 9 , wherein the middle section, the first end section, and the second end section are not all comprised of the same semiconductor material.

Assignments (5)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Jun 26, 2019
From: ACORN TECHNOLOGIES, INC.
To: ACORN SEMI, LLC
Reel/Frame 049602/0324 →
SECURITY INTEREST Recorded May 30, 2019
From: ACORN SEMI LLC
To: THE PETER NORTON LIVING TRUST DATED APRIL 28, 1989,
Reel/Frame 049320/0634 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 28, 2018
From: GOEBEL, ANDREAS
To: ACORN TECHNOLOGIES, INC.
Reel/Frame 047611/0920 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 28, 2018
From: CLIFTON, PAUL A.
To: ACORN TECHNOLOGIES, INC.
Reel/Frame 047611/0951 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Nov 28, 2018
From: HARRISON, WALTER A.
To: ACORN TECHNOLOGIES, INC.
Reel/Frame 047611/0961 →
Continuity (4)
Division 15816231 · Nov 17, 2017
Provisional Application 62424176 · Nov 18, 2016
Provisional Application 62456437 · Feb 8, 2017
Related Publication 20190109241A1 · Apr 11, 2019
Cited By (1)
US 12,477,776