Display substrate, method of manufacturing the same, and display device including the same
A display substrate includes a first conductive layer on a base substrate, a first insulation layer on the first conductive layer, a second conductive layer on the first insulation layer, a second insulation layer on the second conductive layer, and a third conductive layer on the second insulation layer. The third conductive layer is connected to the first conductive layer and the second conductive layer through a contact hole passing through the first insulation layer, the second conductive layer, and the second insulation layer. A sidewall of the contact hole has a stepped shape.
1. A method for manufacturing a display substrate, the method comprising:
sequentially stacking a first conductive layer on a base substrate, a first insulation layer on the first conductive layer, a second conductive layer on the first insulation layer, and a second insulation layer on the second conductive layer;
after the first conductive layer, the first insulation layer, the second conductive layer, and the second insulation layer are sequentially stacked, forming a contact hole passing through the first insulation layer, the second conductive layer, and the second insulation layer, a sidewall of the contact hole having a stepped shape; and
forming a third conductive layer connected to the first conductive layer and the second conductive layer through the contact hole on the second insulation layer,
wherein forming the contact hole includes:
forming a photoresist layer on the second insulation layer;
removing a portion of the photoresist layer corresponding to a first part of the second insulation layer to form a photoresist pattern;
etching the first part of the second insulation layer;
etching the second conductive layer using the second insulation layer as an etch stopper;
performing an etchback of a portion of the photoresist pattern corresponding to a second part of the second insulation layer;
etching the second part of the second insulation layer; and
etching the first insulation layer.
2. The method as claimed in claim 1 , wherein the first part of the second insulation layer is etched using the photoresist pattern as an etch stopper.
3. The method as claimed in claim 1 , wherein etching the second part of the second insulation layer includes etching the second insulation layer using the etched photoresist pattern as an etch stopper.
4. The method as claimed in claim 1 , wherein etching the second conductive layer and performing the etchback of the portion of the photoresist pattern are simultaneously performed.
5. The method as claimed in claim 1 , wherein etching the first insulation layer includes etching the first insulation layer using the second conductive layer as an etch stopper.
6. The method as claimed in claim 1 , wherein etching the second part of the second insulation layer and etching the first insulation layer are simultaneously performed.
7. The method as claimed in claim 1 , wherein the first insulation layer is spaced apart from the second insulation layer.