IP Library › Patent Application 16204444
Patent Application
App. No. 16/204,444

NON-VOLATILE SEMICONDUCTOR STORAGE DEVICE AND METHOD OF MANUFACTURING THE SAME

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Quick Facts
Patent No.
US None
App. No.
16/204,444
Abstract

A non-volatile semiconductor storage device has a plurality of memory strings to each of which a plurality of electrically rewritable memory cells are connected in series. Each of the memory strings includes first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple the lower ends of the pair of columnar portions; a charge storage layer formed to surround the side surfaces of the columnar portions; and first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer. The first conductive layers function as gate electrodes of the memory cells.

Claims (5)

1 . A non-volatile semiconductor storage device having a plurality of memory strings in each of which a plurality of electrically rewritable memory cells are connected in series, each of the memory strings comprising:

first semiconductor layers each functioning as channels of the memory cells, the first semiconductor layers each having a pair of columnar portions extending in a vertical direction with respect to a substrate and a coupling portion formed to couple lower ends of the pair of columnar portions;

a charge storage layer formed to surround side surfaces of the columnar portions; and

first conductive layers formed to surround the side surfaces of the columnar portions and the charge storage layer,

the first conductive layers functioning as gate electrodes of the memory cells.