IP Library › Granted Patent US 10,541,297
Granted Patent B2
US 10,541,297 · App. 16/205,065 · Granted Jan 21, 2020

Semiconductor structure having integrated inductor therein

Inventors: Ming-Che Lee (Tainan, TW); I-Nan Chen (Taipei, TW); Sheng-Chau Chen (Tainan, TW); Cheng-Hsien Chou (Tainan, TW); Cheng-Yuan Tsai (Hsin-Chu, TW)
Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD.
H01L28/10H01L23/3171H01L23/5227H01L24/05H01L27/01H01L2224/11
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Quick Facts
Patent No.
US 10,541,297
App. No.
16/205,065
Granted
Jan 21, 2020
Kind
B2
Abstract

A semiconductor structure includes: a substrate; a first passivation layer over the substrate; a second passivation layer over the first passivation layer; and a magnetic core in the second passivation layer; wherein the magnetic core includes a first magnetic material layer and a second magnetic material layer over the first magnetic material layer, the first magnetic material layer and the second magnetic material layer are separated by a high resistance isolation layer, and the high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm.

Claims (37)

1. A magnetic core, comprising:

a first magnetic material layer;

a second magnetic material layer;

a high resistance isolation; and

a metal layer between the high resistance isolation layer and the second magnetic material layer;

wherein the second magnetic material layer is over the first magnetic material layer, the first magnetic material layer and the second magnetic material layer are separated by the high resistance isolation layer, and the high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm.

2. The magnetic core of claim 1 , wherein high resistance isolation layer includes Si 3 N 4 .

3. The magnetic core of claim 1 , wherein high resistance isolation layer includes AlN.

4. The magnetic core of claim 1 , wherein high resistance isolation layer includes Al 2 O 3 .

5. The magnetic core of claim 1 , wherein the metal layer includes tantalum (Ta).

6. The magnetic core of claim 1 , further comprising a low resistance isolation layer on a top surface of the second magnetic material layer, and the low resistance isolation layer has a resistivity less than about 1.3 ohm-cm.

7. The magnetic core of claim 1 , further comprising another high resistance isolation layer on a top surface of the second magnetic material layer, and the another high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm.

8. A magnetic core, comprising:

a first magnetic material layer;

a second magnetic material layer; and

a composite isolation layer, including a high resistance isolation layer and a low resistance isolation layer;

wherein the second magnetic material layer is over the first magnetic material layer, the first magnetic material layer and the second magnetic material layer are separated by the composite isolation layer, and the high resistance isolation layer has a resistivity greater than that of the low resistance isolation layer.

9. The magnetic core of claim 8 , wherein the high resistance isolation layer is over the low resistance isolation layer.

10. The magnetic core of claim 9 , wherein the high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm, and the low resistance isolation layer has a resistivity less than about 1.3 ohm-cm.

11. The magnetic core of claim 8 , further comprising a metal layer between the high resistance isolation layer and the second magnetic material layer.

12. The magnetic core of claim 11 , wherein the metal layer includes tantalum (Ta).

13. The magnetic core of claim 8 , further comprising a metal layer below a bottom surface of the first magnetic material layer.

14. The magnetic core of claim 8 , wherein the low resistance isolation layer includes oxide of the first magnetic material layer.

15. A magnetic core, comprising:

a first magnetic material layer;

a first low resistance isolation layer;

a second magnetic material layer, over the first magnetic material layer;

a high resistance isolation layer;

a third magnetic material layer, over the second magnetic material layer;

a second low resistance isolation layer; and

a fourth magnetic material layer, over the third magnetic material layer;

wherein the first magnetic material layer and the second magnetic material layer are separated by the first low resistance isolation layer, the second magnetic material layer and the third magnetic material layer are separated by the high resistance isolation layer, the third magnetic material layer and the fourth magnetic material layer are separated by the second low resistance isolation layer, and the high resistance isolation layer has a resistivity greater than that of the low resistance isolation layer.

16. The magnetic core of claim 15 , wherein the high resistance isolation layer has a resistivity greater than about 1.3 ohm-cm, and the first and second low resistance isolation layers have a resistivity less than about 1.3 ohm-cm.

17. The magnetic core of claim 15 , wherein the first low resistance isolation layer includes oxide of the first magnetic material layer.

18. The magnetic core of claim 15 , wherein the second low resistance isolation layer includes oxide of the third magnetic material layer.

19. The magnetic core of claim 15 , wherein high resistance isolation layer includes Si 3 N 4 .

20. The magnetic core of claim 15 , wherein high resistance isolation layer includes AlN.

Continuity (2)
Continuation 15707240 · Sep 18, 2017
Related Publication 20190109185A1 · Apr 11, 2019
Cited By (1)
US 12,500,166