IP Library Granted Patent US 12,500,090
Granted Patent B2
US 12,500,090 · App. 16/210,156 · Granted Dec 16, 2025

Formation of superhydrophobic surfaces

Inventors: Antonio Checco (Stony Brook, NY); Benjamin M. Ocko (Stony Brook, NY); Atikur Rahman (Pune, IN); Charles T. Black (New York, NY)
H01L21/3086B08B17/065B81C1/00111B82Y40/00G02B1/118G02B1/18G03F7/0002G03F7/405H01L21/0271H01L21/0273H01L21/0337H01L21/3065B81C2201/0149H01J2237/334
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Quick Facts
Patent No.
US 12,500,090
App. No.
16/210,156
Granted
Dec 16, 2025
Kind
B2
Abstract

Technologies are described for methods and systems effective for etching nanostructures in a substrate. The methods may comprise depositing a patterned block copolymer on the substrate. The methods may comprise applying a precursor to the patterned block copolymer to generate an infiltrated block copolymer. The precursor may infiltrate into the first polymer block domain and generate a material. The methods may comprise applying a removal agent effective to remove the polymer block domains to the infiltrated block copolymer to generate a pattern of the material. The methods may comprise etching the substrate. The pattern of the material may mask the substrate to pattern the etching. The etching may be performed under conditions to produce nanostructures in the substrate. The methods may comprise removing the pattern of the material and coating the nanostructures and the surface of the substrate with a hydrophobic coating.

Claims (32)

1 . A surface comprising:

a nanotexture formed by pillars in a substrate, where each pillar has a top, a base, a pillar center, a substantially circular top cross-section, and a base width of about 5 nm to about 100 nm, and wherein the pillars are patterned in an array with distances of about 5 nm to about 100 nm between adjacent pillar centers; and

a hydrophobic coating on the pillars and on the substrate between the pillars such that the surface is superhydrophobic;

wherein the pillars comprise nanostructures, the nanostructures exhibiting a water contact angle exceeding 160 degrees and a contact angle hysteresis smaller than 10 degrees;

wherein the nanostructures comprise an hourglass shape; and

wherein the top of each pillar, the base of each pillar, and the pillar center of each pillar are defined in the substrate such that an entirety of the hourglass shape is defined in the substrate.

2 . The surface of claim 1 , wherein the substrate is a polymer, a polyimide, silicon nitride, glass, or silicon.

3 . The surface of claim 1 , wherein the pillars are patterned by a block copolymer.

4 . The surface of claim 3 , wherein the block copolymer is polystyrene-block-poly (methylmethacrylate).

5 . The surface of claim 1 , wherein the hydrophobic coating is conformal.

6 . The surface of claim 1 , wherein the hydrophobic coating does not completely fill in spaces between the pillars.

7 . The surface of claim 1 , wherein the hydrophobic coating is a monolayer.

8 . The surface of claim 1 , wherein the hydrophobic coating has a thickness falling in a range from 1 nanometer to 3 nanometers.

9 . A surface comprising:

a nanotexture formed by pillars in a substrate, where each pillar has a top, a base, a pillar center, and a base width of about 5 nm to about 100 nm, and wherein the pillars are patterned in an array with distances of about 5 nm to about 100 nm between adjacent pillar centers; and

a hydrophobic coating on the pillars and on the substrate between the pillars such that the surface is superhydrophobic;

wherein the pillars comprise nanostructures, the nanostructures exhibiting a water contact angle exceeding 160 degrees and a contact angle hysteresis smaller than 10 degrees; wherein the nanostructures comprise an hourglass shape; and

wherein the top of each pillar, the base of each pillar, and the pillar center of each pillar are defined in the substrate such that an entirety of the hourglass shape is defined in the substrate.

10 . The surface of claim 9 , wherein the hydrophobic coating is conformal.

11 . The surface of claim 9 , wherein the hydrophobic coating does not completely fill in spaces between the pillars.

12 . The surface of claim 9 , wherein the hydrophobic coating is a monolayer.

13 . A surface comprising:

a nanotextured substrate comprising nanostructures, each nanostructure having a top, a base, a center, and a base width of about 5 nm to about 100 nm, wherein the nanostructures are arranged in a pattern having distances of about 5 nm to about 100 nm between adjacent centers; and

a hydrophobic coating on the nanostructures and on the nanotextured substrate between the nanostructures such that the surface is superhydrophobic;

wherein the nanostructures exhibit a water contact angle exceeding 160 degrees and a contact angle hysteresis smaller than 10 degrees;

wherein the nanostructures comprise an hourglass shape; and

wherein the top of each nanostructure, the base of each nanostructure, and the center of each nanostructure are defined in the nanotextured substrate such that an entirety of the hourglass is defined in the nanotextured substrate.

14 . The surface of claim 13 , wherein the hydrophobic coating is conformal.

15 . The surface of claim 13 , wherein the hydrophobic coating does not completely fill in spaces between the nanostructure.

16 . The surface of claim 13 , wherein the hydrophobic coating is a monolayer.

17 . The surface of claim 1 , wherein the pillars have an aspect ratio of a height to average width that is about 1:1 to about 20:1.

18 . The surface of claim 1 , wherein the hourglass shape prevents water penetration.

Assignments (2)
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Apr 1, 2026
From: CHECCO, ANTONIO; BLACK, CHARLES T.; RAHMAN, ATIKUR; OCKO, BENJAMIN M.
To: BROOKHAVEN SCIENCE ASSOCIATES, LLC
Reel/Frame 074249/0491 →
CONFIRMATORY LICENSE Recorded May 17, 2019
From: BROOKHAVEN SCIENCE ASSOC-BROOKHAVEN LAB
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 049219/0807 →
Continuity (4)
Division 14897441
Provisional Application 61893072 · Oct 18, 2013
Provisional Application 61835576 · Jun 15, 2013
Related Publication 20190109011A1 · Apr 11, 2019
References Cited (5)
US 20070224391A1 · Krupenkin · 2007 [cited by examiner]
US 20110229667A1 · Jin · 2011 [cited by examiner]
US 20120276334A1 · Fedynyshyn · 2012 [cited by examiner]
US 20130227972A1 · Hatton · 2013 [cited by examiner]
US 20140011013A1 · Jin · 2014 [cited by examiner]