IP Library Granted Patent US 11,092,486
Granted Patent B2
US 11,092,486 · App. 16/213,810 · Granted Aug 17, 2021

Compact folded metasurface spectrometer

Inventors: MohammadSadegh Faraji-Dana (Pasadena, CA); Ehsan Arbabi (Arcadia, CA); Amir Arbabi (Sunderland, CA); Andrei Faraon (La Canada Flintridge, CA)
Assignee: CALIFORNIA INSTITUTE OF TECHNOLOGY
G01J3/0259G01J3/0208G01J3/0224G02B5/1814G02B5/1847G02B5/1861
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Quick Facts
Patent No.
US 11,092,486
App. No.
16/213,810
Granted
Aug 17, 2021
Kind
B2
Abstract

Compact optical devices such as spectrometers are realized with metasurfaces within a dielectric medium confined by reflective surfaces. The metasurfaces control the phase profiles of the reflected electromagnetic waves within the device. In a compact spectrometer, the metasurfaces within the device separate the electromagnetic waves in different wavelengths. The metasurfaces are designed according to their phase profile by varying the size of the array of scatterers.

Claims (47)

1. A structure comprising:

two reflective surfaces opposite to each other and configured to reflect electromagnetic waves;

a dielectric medium between the two reflective surfaces, the dielectric medium being transparent to the reflected electromagnetic waves;

at least one first opening on one of the two reflective surfaces and configured to input electromagnetic waves;

at least one second opening on one of the two reflective surfaces and configured to output the reflected electromagnetic waves; and

a plurality of metasurfaces between the two reflective surfaces,

wherein:

each metasurface of the plurality of metasurfaces comprises an array of scatterers,

each metasurface of the plurality of metasurfaces is configured to control a phase or a polarization of the reflected electromagnetic waves, and

lateral dimensions of each scatterer of the array of scatterers are configured so that the phase of the reflected electromagnetic waves is polarization independent.

2. The structure of claim 1 , wherein the array of scatters is made of silicon and the two reflective surfaces are made of gold.

3. The structure of claim 1 , wherein the structure is a spectrometer, and the plurality of metasurfaces are configured to separate the input electromagnetic radiation into separate wavelengths.

4. The structure of claim 1 , wherein an image plane for output electromagnetic waves is parallel to the two reflective surfaces and to the plurality of metasurfaces.

5. A method comprising:

calculating a phase profile for each metasurface of a plurality of metasurfaces, each metasurface of the plurality of metasurfaces comprising an array of scatterers;

calculating lateral dimensions of each array of scatterers for each metasurface of the plurality of metasurfaces based on the phase profile of the corresponding metasurface of the plurality of metasurfaces; and

fabricating a structure comprising:

two reflective surfaces opposite to each other and configured to reflect electromagnetic waves;

a dielectric medium between the two reflective surfaces, the dielectric medium being transparent to the reflected electromagnetic waves;

at least one first opening on one of the two reflective surfaces and configured to input electromagnetic waves;

at least one second opening on one of the two reflective surfaces and configured to output the reflected electromagnetic waves;

the plurality of metasurfaces between the two reflective surfaces, and

the phase profile is polarization independent.

6. The method of claim 5 , wherein the structure is a spectrometer and the phase profile of the plurality of metasurfaces is configured to separate the input electromagnetic radiation into separate wavelengths.

7. The method of claim 5 , wherein the array of scatters is made of silicon and the two reflective surfaces are made of gold.

8. The method of claim 5 , wherein an image plane for output electromagnetic waves is parallel to the two reflective surfaces and to the plurality of metasurfaces.

9. The method of claim 5 , further comprising calculating a derivative of a phase of the reflected electromagnetic waves with respect to a wavelength of the reflected electromagnetic waves, and wherein calculating a phase profile and calculating lateral dimensions are carried out to obtain a constant derivative of the phase of the reflected electromagnetic waves with respect to the wavelength of the reflected electromagnetic waves.

10. A structure comprising:

two reflective surfaces opposite to each other and configured to reflect electromagnetic waves;

a dielectric medium between the two reflective surfaces, the dielectric medium being transparent to the reflected electromagnetic waves;

at least one first opening on one of the two reflective surfaces and configured to input electromagnetic waves;

at least one second opening on one of the two reflective surfaces and configured to output the reflected electromagnetic waves; and

a plurality of metasurfaces between the two reflective surfaces,

wherein:

each metasurface of the plurality of metasurfaces comprises an array of scatterers;

each metasurface of the plurality of metasurfaces is configured to control a phase or a polarization of the reflected electromagnetic waves, and

lateral dimensions of each scatterer of the array of scatterers are configured so that a derivative of the phase of the reflected electromagnetic waves with respect to a wavelength of the reflected electromagnetic waves is constant.

11. A method comprising:

calculating a phase profile for each metasurface of a plurality of metasurfaces, each metasurface of the plurality of metasurfaces comprising an array of scatterers;

calculating lateral dimensions of each array of scatterers for each metasurface of the plurality of metasurfaces based on the phase profile of the corresponding metasurface of the plurality of metasurfaces; and

fabricating a structure comprising:

two reflective surfaces opposite to each other and configured to reflect electromagnetic waves;

a dielectric medium between the two reflective surfaces, the dielectric medium being transparent to the reflected electromagnetic waves;

at least one first opening on one of the two reflective surfaces and configured to input electromagnetic waves;

at least one second opening on one of the two reflective surfaces and configured to output the reflected electromagnetic waves; and

the plurality of metasurfaces between the two reflective surfaces, the method further comprising

calculating a derivative of a phase of the reflected electromagnetic waves with respect to a wavelength of the reflected electromagnetic waves, and wherein calculating a phase profile and calculating lateral dimensions are carried out to obtain a constant derivative of the phase of the reflected electromagnetic waves with respect to the wavelength of the reflected electromagnetic waves.

Assignments (2)
CONFIRMATORY LICENSE Recorded Jun 15, 2021
From: CALIFORNIA INSTITUTE OF TECHNOLOGY
To: UNITED STATES DEPARTMENT OF ENERGY
Reel/Frame 056551/0014 →
ASSIGNMENT OF ASSIGNOR'S INTEREST Recorded Feb 18, 2019
From: FARAJI-DANA, MOHAMMADSADEGH; ARBABI, EHSAN; ARBABI, AMIR; FARAON, ANDREI
To: CALIFORNIA INSTITUTE OF TECHNOLOGY
Reel/Frame 048362/0827 →
Continuity (2)
Provisional Application 62596564 · Dec 8, 2017
Related Publication 20190178714A1 · Jun 13, 2019
Cited By (2)
US 12,405,425 US 12,571,712