Display apparatus and manufacturing method of the same
A display apparatus includes a plurality of pixels each including a substrate on which are disposed: an interlayer insulating layer; a driving thin film transistor in which a driving semiconductor layer and a driving gate electrode are each disposed between the substrate and the first interlayer insulating layer; a first capacitor in which a first electrode, a first dielectric pattern and a second electrode are sequentially stacked, the first electrode being connected to the driving gate electrode; and a plurality of contact plugs extended through a thickness of the interlayer insulating layer, with which the driving thin film transistor and the first capacitor are respectively connected to electrodes outside thereof. Lateral surfaces of the first dielectric pattern are covered by the interlayer insulating layer, and the first dielectric pattern within the first capacitor is disposed spaced apart from each of the contact plugs.
1. A display apparatus comprising:
a substrate; and
a plurality of pixels on the substrate, the plurality of pixels displaying an image, each of the plurality of pixels comprising:
a light-emitting device with which light is emitted to display the image;
a first thin film transistor on the substrate, the first thin film transistor including a driving semiconductor layer and a driving gate electrode;
a second thin film transistor on the substrate, the second thin film transistor including a second semiconductor layer;
a first capacitor in which a first electrode including the driving gate electrode of the first thin film transistor, a first dielectric pattern and a second electrode are sequentially stacked from the substrate;
a first interlayer insulating layer which covers lateral surfaces of the first dielectric pattern within the first capacitor;
a second capacitor comprising a third electrode and a fourth electrode;
a second interlayer insulating layer between the third electrode and the fourth electrode;
a first line disposed on the second interlayer insulating layer, the first line connected to the driving semiconductor layer of the first thin film transistor through a first contact hole through the first interlayer insulating layer and the second interlayer insulating layer,
wherein
the first contact hole is spaced apart from the first dielectric pattern, and
the fourth electrode is disposed on a same layer as the first line and connected to the second semiconductor layer.
2. The display apparatus of claim 1 , wherein a permittivity of the first dielectric pattern is greater than a permittivity of the first interlayer insulating layer.
3. The display apparatus of claim 1 , further comprising:
a scan line through which a control signal is transmitted to control transmission of a data signal to the first thin film transistor, disposed in and formed from a same single material layer as the second electrode of the first capacitor, and
a second dielectric pattern disposed between the substrate and the scan line, disposed in and formed from a same single material layer as the first dielectric pattern of the first capacitor.
4. The display apparatus of claim 1 , wherein
the first dielectric pattern comprises at least one of ZrO 2 , TiO 2 , Ta 2 O 5 , Al 2 O 3 , SrTiO 3 and BaTiO 3 , and
the first interlayer insulating layer comprises at least one of silicon oxide, silicon nitride and silicon oxynitride.
5. The display apparatus of claim 1 , wherein within the first capacitor, lateral surfaces of the first dielectric pattern are aligned with lateral surfaces of the second electrode.
6. The display apparatus of claim 1 , further comprising a lower insulating layer between the first electrode and the first dielectric pattern of the first capacitor.
7. The display apparatus of claim 1 , wherein within the first capacitor, the first dielectric pattern extends further than ends of the second electrode to expose opposing ends of the first dielectric pattern from the second electrode.
8. The display apparatus of claim 1 , wherein the first thin film transistor including the driving semiconductor layer and the driving gate electrode overlaps the first capacitor including the first electrode, the first dielectric pattern and the second electrode.
9. The display apparatus of claim 1 , wherein
the light-emitting device comprises:
a pixel electrode,
an opposite electrode facing the pixel electrode, and
an intermediate layer between the pixel electrode and the opposite electrode.
10. The display apparatus of claim 1 , wherein for the first thin film transistor and the first capacitor, a shape of the first dielectric pattern corresponds to a shape of the second electrode.
11. The display apparatus of claim 1 , wherein each of the plurality of pixels further comprising:
a second line disposed on a same layer as the first line, the second line connected to the second electrode of the first capacitor through a second contact hole through the first interlayer insulating layer and the second interlayer insulating layer, and
a connection electrode connecting the light-emitting device to the driving semiconductor layer of the first thin film transistor,
wherein the first line, the second line and the connection electrode are disposed on a same layer.
12. The display apparatus of claim 1 , wherein the light-emitting device is an organic light-emitting device.