Microelectromechanical systems packages and methods for packaging a microelectromechanical systems device
A microelectromechanical systems (MEMS) package may include a wafer having a MEMS device; a metal cap partially anchored to the wafer where at least one point between the cap and the wafer is unanchored, the metal cap at least substantially extending over the MEMS device; an electrical contact pad electrically coupled to the MEMS device; and a sealing layer disposed over the metal cap and the wafer, such that the sealing layer seals a gap between an unanchored portion of the metal cap and the wafer to encapsulate the MEMS device; wherein the electrical contact pad and the metal cap include the same composition.
1. A microelectromechanical systems (MEMS) package comprising:
a wafer having a MEMS device area and a contact area;
at least one electrode disposed in the MEMS device area and separated from a substrate of the wafer;
a metal cap partially anchored to the wafer where at least one point between the cap and the wafer is unanchored, the metal cap at least substantially extending over the MEMS device area;
an electrical contact pad disposed in the contact area and electrically coupled to the MEMS device area; and
a sealing layer disposed over the metal cap and the wafer, such that the sealing layer seals a gap between an unanchored portion of the metal cap and the wafer to encapsulate the MEMS device area;
wherein the electrical contact pad and the metal cap comprise the same composition.
2. The MEMS package of claim 1 , wherein the unanchored portion of the metal cap extends beyond the MEMS device area.
3. The MEMS package of claim 1 , wherein the MEMS package comprises an upper cavity between the metal cap and the at least one electrode.
4. The MEMS package of claim 1 , wherein the MEMS package comprises a lower cavity between the substrate and the at least one electrode of the MEMS device area.
5. The MEMS package of claim 1 , wherein the MEMS device area comprises a MEMS device, and an upper surface of the MEMS device facing the metal cap has an indentation, wherein the metal cap is anchored to the wafer at the indentation.
6. The MEMS package of claim 1 , wherein the electrical contact pad and the metal cap are formed from the same layer.
7. The MEMS package of claim 1 , wherein the at least one electrode comprises a first electrode and a second electrode, and the MEMS device area comprises a piezoelectric film disposed between the first electrode and the second electrode.
8. The MEMS package of claim 7 , wherein the piezoelectric film comprises at least aluminum nitride (AlN), scandium-doped AlN (ScAlN), lithium niobate (LiNbO 3 ), lithium tantalate (LiTa 2 O 3 ), zinc oxide (ZnO), lead zirconate titanate (PZT), polyvinylidene fluoride (PVDF) or combinations thereof.
9. The MEMS package of claim 1 , further comprising a vertical via between the MEMS device area and the contact area.