Movable and removable process kit
Aspects of the present disclosure generally relate to methods and apparatuses for adjusting an edge ring position, and for removing or replacing one or more components of a process kit of a process chamber. The process kit includes one or more of an edge ring, a support ring, a sliding ring, and other consumable or degradable components.
1. A process kit for a substrate support, the process kit comprising:
a sliding ring having a body defined by an inner diameter and an outer diameter, the body having:
one or more openings formed through the body, wherein each of the one or more openings has an axis that is parallel to an axis of the body;
a horizontal portion at an upper end of the body, the horizontal portion extending radially outward from the inner diameter of the body; and
a vertical portion extending from the horizontal portion in a first direction, wherein the first direction is parallel to the axis of the body;
a support ring having a stepped upper surface with a radially inward portion raised above a radially outward portion, the support ring having an outer diameter; and
an edge ring having a planar upper surface and a planar lower surface, the edge ring having:
an inner diameter less than the outer diameter of the support ring; and
an outer diameter greater than the outer diameter of the support ring; wherein:
an inner diameter of the vertical portion of the sliding ring is greater than the outer diameter of the support ring, and
the vertical portion of the sliding ring is configured to directly contact and support the edge ring, and wherein the outer diameter of the edge ring is greater than the outer diameter of the body of the sliding ring.
2. The process kit of claim 1 , wherein the one or more openings formed in the body of the sliding ring comprise at least three openings.
3. The process kit of claim 1 , wherein an outer diameter of the vertical portion of the sliding ring is less than the outer diameter of the edge ring.
4. The process kit of claim 1 , wherein the outer diameter of the support ring is greater than the inner diameter of the body of the sliding ring.
5. The process kit of claim 1 , wherein each of the one or more openings formed in the body of the sliding ring are configured to house one or more lift pins.
6. The process kit of claim 1 , wherein the outer diameter of the support ring is greater than the inner diameter of the body of the sliding ring, the support ring includes one or more openings formed through the support ring, and each of the one or more openings formed through the support ring is aligned with one of the one or more openings formed through the body of the sliding ring.
7. A substrate support, comprising:
an electrostatic chuck base;
a puck positioned over the electrostatic chuck base; and
a process kit, comprising:
a sliding ring positioned around the electrostatic chuck base and having a body defined by an inner diameter and an outer diameter, the body having:
one or more openings formed through the body, wherein each of the one or more openings has an axis that is parallel to an axis of the body;
a horizontal portion at an upper end of the body, the horizontal portion extending radially outward from the inner diameter of the body; and
a vertical portion extending from the horizontal portion in a first direction, wherein the first direction is parallel to the axis of the body;
a support ring having a stepped upper surface with a radially inward portion raised above a radially outward portion, the support ring having an outer diameter; and
an edge ring having a planar upper surface and a planar lower surface, the edge ring having:
an inner diameter less than the outer diameter of the support ring; and
an outer diameter greater than the outer diameter of the support ring;
wherein:
an inner diameter of the vertical portion of the sliding ring is greater than the outer diameter of the support ring, and
the vertical portion of the sliding ring is configured to directly contact the edge ring when the edge ring is in a lowered position, and wherein the outer diameter of the edge ring is greater than the outer diameter of the body of the sliding ring.
8. The substrate support of claim 7 , wherein the one or more openings formed in the body of the sliding ring comprise at least three openings.
9. The substrate support of claim 7 , wherein an outer diameter of the vertical portion of the sliding ring is less than the outer diameter of the edge ring.
10. The substrate support of claim 7 , wherein the outer diameter of the support ring is greater than the inner diameter of the body of the sliding ring.
11. The substrate support of claim 7 , wherein each of the one or more openings formed in the body of the sliding ring are configured to house one or more lift pins.
12. The substrate support of claim 7 , wherein the outer diameter of the support ring is greater than the inner diameter of the body of the sliding ring; and the support ring includes one or more openings formed therethrough, and each of the one or more openings is aligned with one of the one or more openings formed through the body of the sliding ring.
13. A process kit for a substrate support, the process kit comprising:
a lift pin;
a sliding ring having a body defined by an inner diameter and an outer diameter, the body having:
one or more openings formed through the body, wherein each of the one or more openings has an axis that is parallel to an axis of the body, at least one of the one or more openings at least partially surrounding the lift pin;
a horizontal portion at an upper end of the body, the horizontal portion extending radially outward from the inner diameter of the body; and
a vertical portion extending from the horizontal portion extending in a first direction, wherein the first direction is parallel to the axis of the body;
a support ring having a stepped upper surface with a radially inward portion raised above a radially outward portion, the support ring having an outer diameter; and
an edge ring having a planar upper surface and a planar lower surface, the edge ring having:
an inner diameter less than the outer diameter of the support ring; and
an outer diameter greater than the outer diameter of the support ring; wherein:
an inner diameter of the vertical portion of the sliding ring is greater than the outer diameter of the support ring,
the vertical portion of the sliding ring is configured to directly contact the edge ring when the lift pin is in a lowered position, and
the support ring is configured to directly contact and support the edge ring when the lift pin is in an elevated position, and wherein the outer diameter of the edge ring is greater than the outer diameter of the body of the sliding ring.
14. The process kit of claim 13 , wherein the one or more openings formed in the body of the sliding ring comprise at least three openings, the lift pin disposed within one of the at least three openings.
15. The process kit of claim 14 , further comprising two additional lift pins, each additional lift pin disposed within one of the at least three openings.
16. The process kit of claim 13 , wherein an outer diameter of the vertical portion of the sliding ring is less than the outer diameter of the edge ring.
17. The process kit of claim 13 , wherein the outer diameter of the support ring is greater than the inner diameter of the body of the sliding ring.