Semiconductor device with side wall protection film for bond pad and wiring
The method of manufacturing a semiconductor device includes: forming a conductive film including a first metal-containing film and an anti-reflection film including a second metal-containing film which is laminated on the first metal-containing film, the second metal-containing film being different from the first metal-containing film and laminated on the first metal-containing film; patterning the conductive film; forming side wall protection films on side surfaces of the patterned conductive film; etching the anti-reflection film in the patterned conductive film, after formation of the side wall protection films; forming a passivation film on the first metal-containing film and the side wall protection films; and forming, in the passivation film, an opening portion in which a part of a top surface of the first metal-containing film is exposed.
1. A semiconductor device, comprising:
a bonding pad and a wiring each in the same wiring layer composed of a metal-containing film, and adjacent to each other across a distance of 1 μm or less;
side wall protection films on side surfaces of the bonding pad and side surfaces of the wiring, the side wall protection films comprising one of silicon oxide films and silicon nitride films; and
a passivation film covering a top surface of the bonding pad, a top surface of the wiring, and surfaces of the side wall protection films, and having an opening portion exposing a part of the top surface of the bonding pad,
the passivation film in direct contact with the top surface of the bonding pad and the top surface of the wiring.
2. The semiconductor device according to claim 1 , further comprising a barrier metal layer located below the metal-containing film, the barrier metal layer including one of a titanium film, a titanium nitride film, and a laminated film including a titanium film and a titanium nitride film.
3. The semiconductor device according to claim 1 , wherein the metal-containing film is one of an aluminum film and an aluminum alloy film.
4. The semiconductor device according to claim 3 , further comprising a barrier metal layer located below the metal-containing film, the barrier metal layer including one of a titanium film, a titanium nitride film, and a laminated film including a titanium film and a titanium nitride film.
5. The semiconductor device according to claim 1 , further comprising a barrier metal layer located below the metal-containing film, the barrier metal layer including one of a titanium film, a titanium nitride film, and a laminated film including a titanium film and a titanium nitride film.
6. The semiconductor device according to claim 1 , wherein the passivation film is one of a silicon oxide film, a silicon nitride film, and a laminated film including a silicon oxide film and a silicon nitride film.