Substrate processing apparatus
An embodiment of the present invention provides a buff process module. The buff process module includes: a buff table on which a processing target object is mounted; a buff head that holds a buff pad for applying a predetermined process to the processing target object; a buff arm that supports and swings the buff head; a dresser for dressing the buff pad; and a cleaning mechanism that is disposed between the buff table and the dresser and is for cleaning the buff pad.
1. A method of cleaning a support surface of a buff table of an apparatus for buff-processing a processing target object, the buff table being for supporting the processing target object,
the apparatus comprising: a nozzle for supplying the support surface with a chemical solution for cleaning the support surface of the buff table; and
a buff head to which a buff pad for buff-processing the processing target object through physical contact is attached, wherein the buff head is configured such that a cleaning member including a brush or a sponge member for cleaning the support surface of the buff table through physical contact is attached to the buff head;
wherein the buff table includes a fluid passage that extends to the support surface and is for supplying a fluid to the support surface through the buff table while the support surface of the buff table is cleaned,
wherein the fluid passage is configured to communicate with a pure water and/or chemical solution supply source, and
wherein the fluid passage is configured to be communicable with a vacuum source for causing the processing target object to be vacuum-sucked onto the support surface while the processing target object is buff-processed,
the method comprising: a step of supplying the support surface with a chemical solution from the nozzle for cleaning the support surface of the buff table; and
a step of cleaning the support surface of the buff table through physical contact using the brush or the sponge member.
2. The method of cleaning the support surface of the buff table according to claim 1 , wherein the buff table includes a stage film, and a surface of the stage film serves as the support surface for supporting the processing target object.
3. The method of cleaning the support surface of the buff table according to claim 1 , wherein the buff table includes a conveyor mechanism for conveying the processing target object to and/or from the buff table, and the method further includes a step of cleaning the conveyor mechanism while cleaning the support surface.
4. The method of cleaning the support surface of the buff table according to claim 1 , further including a step of changing a position of the nozzle, while the support surface of the buff table is cleaned.
5. The method of cleaning the support surface of the buff table according to claim 1 , further including a step of cleaning the support surface of the buff table using at least one of an atomizer cleaner, an ultrasonic cleaner, and a cavitation jet cleaner.
6. The method of cleaning the support surface of the buff table according to claim 1 , wherein the buff pad and the cleaning member are configured to independently ascend and descend,
wherein the cleaning member protrudes with respect to the buff pad when cleaning the support surface of the buff table.